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VX2 Table (1) Indication of Flow Rate Characteristics VXK Indication by international standard Corresponding equipment Other indications Conformed standard VXD ISO 6358: 1989 JIS B 8390: 2000 C, b VXZ Pneumatic equipment JIS B 8390: 2000 Equipment: JIS B 8379, 8381-1, 8381-2 VXS VXS S Cv VXB ANSI/(NFPA)T3.21.3 R1-2008 IEC60534-1: 2005 IEC60534-2-3: 1997 JIS B 2005-1: 2012 JIS B 2005-2-3

) Type of actuation Light/Surge voltage suppressor 2 position single 4 position dual 3 port valve (A) (A) 4 (B) 2 (A) 4 (B) 2 With Without Note) Nil E 1 A Note) 5 (R1) 3 (R2) 1 (P) Note) Not applicable to S kit. 5 (R1) 3 (R2) 1 (P) N.C N.C 2 position double (metal) 4 position dual 3 port valve (B) (A) 4 (B) 2 (A) 4 (B) 2 B: Locking type (Slotted) Coil voltage B 12 VDC 5 6 24 VDC Note) Note

1> Unit 0 Unit 1 DY#B SEN7 Digital output SI unit End plate Valve unit 1 byte output 4 bytes output Input data: None Output data: (Unit 0) Digital output unit (EX600-DY#B): 1 byte occupied Output data: (Unit 1) SI unit (EX600-SEN7): 4 bytes occupied When Diagnostic mode 0 is selected Input data Output data Byte 0 Byte 0 DY#B (Unit 0) Output 0 to 7 Padding data Byte 1 Byte 1 Output

regulator IN port SRF Booster regulator IN port C C ITV EXH: C EXH: C IC (A) (B) Tank OUT port Rc 3/4 (A) D (B) OUT OUT 355 ITVH 256 256 205 4 x 13 4 x 13 ITVX 50 50 150 150 500 PVQ 250 250 824 (mm) VY1 Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A VBA

Unit MPa kPa kgf/cm2 bar psi InHg mmHg 0.001 0.1 0.001 0.001 0.02 0.1 1 -24NO.ZK2-OM00501-B [F 1] Setting of OUT1 The output mode of OUT1 can be set. Reversed output, pressure value and hysteresis can be set. List of output modes -25NO.ZK2-OM00501-B Press the or button in function selection mode to display [F 1]. Press the button. Move on to the check of output mode.

Applicable models 0.7MPa (101.5psi) Inlet air pressure IDG3, 5 BM59 25C (77F) 25C (77F) 25C (77F) Inlet air temperature Inlet air saturation temperature Ambient temperature IDG10 BM61 1l/min (ANR) {inlet air pressure at 0.7MPa} IDG20 BM63 Dew point indicator purge air flow rate Port size (nominal size B) Weight kg (with bracket) 1/4 1/4, 3/8 1/8, 1/4 1/2 3/8, 1/2 IDG30, 50 BM64 0.11 0.25

,oox'o''"n' ar3oro 60 Nole 2) Drain guide is G1i 4 (app cable 10 AF30lo 60) Nore 1) Wlhoul a valve name plate and caulion A F 1 0 1 0 6 0 Port size Symbol Port 1 0 20 30 40 50 60 Symbol Descrlption Applicable M5 a 1 B O AF20 to 60 1t4 a a a 3a a a 1t2 a g4 a a 1 a a auto dlain (N C.)

JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety. etc. 2) Labor Safety and Sanitation Law, etc. Caution Operator error could result in injury or equipment damage.

1 1 4 / 1 1 0 0 9 F L A N 4 9 . 3 ) 0 0 1 ( 6 5 . 3 1 ) 5 . 4 4 3 ( 8 4 . 2 ) 3 6 ( 2 r o t u b i r t s i D l i O l e d o M s t e l t u o l i o f o r e b m u N k r a m e R 4 A V 4 s d n e h t o B 6 A V 6 s d n e h t o B Dimensions/Auto feed tank 0 1 A V 0 1 s d n e h t o B 6 1 A V 6 1 s d n e h t o B 4 B V 4 e d i s e n O 6 B V 6 e d i s e n O 8 B V 8 e d i s e n O s n o i t a c i f i c

5 @6 #1#2 #3 !8 y e $2 !7 i !3 o !6 u !9 w #9 @5 $1 @7 @4 #8 #0 @9 @8 r !4 #6 #7 @3 #5 $0 #4 $4 !1 !2 !0 $5 A View A-A' A' Ball bushing bearing Front mounting flange type B B' @6 @0 !8 $3 y !

2(B) (A)4 Symbol Applicable series Nil Port size Without sub-plate 2 1 8 (EA)5 1 (P) 3(EB) 01 SYA3000 With sub-plate 1 4 3 position closed center With sub-plate 02 SYA5000 2(B) (A)4 1 4 3 With sub-plate 02 SYA7000 (EA)5 1 (P) 3(EB) 3 8 With sub-plate 03 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 5 (EA)5 1 (P) 3(EB) 1458 5 Port Air Operated

absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .

Flow characteristics Port size 1 2 (P A) 2 3 (A R) Manifold C [dm3/(sbar)] 1(P), 3(R) port 2(A) port b Cv C [dm3/(sbar)] b Cv Type SS3YJ7-20 1/8 2.2 2.2 2.1 2.2 2.0 1.6 2.1 0.34 0.39 0.35 0.35 0.27 0.32 0.24 0.55 0.59 0.59 0.59 0.47 0.39 0.51 2.3 2.4 2.3 2.4 2.2 2.2 2.3 0.27 0.32 0.27 0.36 0.32 0.27 0.31 0.59 0.62 0.54 0.66 0.56 0.54 0.59 1/8 1/4 1/8 1/4 Body ported for internal pilot

CNA 125 to 160 CNS CLS B Rc BP lock-up port A Rc BP lock-up port Unlocked when pressurized CLQ 4-FD 2-Rc P With rod boot MLGP RLQ EB EA D MLU Plug cap 2 positions Width across flats KA ML1C S + Stroke ZZ + Stroke h + l DZZ + l + Stroke -X 20Data Bore size (mm) Stroke range A AL B B1 BF BX BY C D EA EB F FD FT FX FY FZ GA GB BP GC H1 J K KA 1/4 1/4 1/4 1/4 1/2 1/2 3/4 50 63 80 100 125 140

1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 40 to 63: Over 100 stroke !6 50 to 100 80, 100: Over 200 stroke Extension locking (Type F) Retraction locking (Type B) !9 @7 #9 #5 i o @5 #5 #9 @7 !9 i @5 o Section B-B' Section B-B' @5 !8@6!7 @5@6!7 !

1#4 u @1 $0w #6 #1 #2y $0 #7 @2 q !0!4 r@4 #8 $1 e @1 @3t #3 !5 @8 B' @9 @0 A' A A' A B !6 !3 #0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 40 to 63: Over 100 stroke !

1> Unit 0 Unit 1 Unit 2 Unit 3 Unit 4 Unit 5 AXA DY#B DY#B DX#B DX#D SEC3 Digita Digital SI unit Analogue Digital output Digital output input input input End Valve plate 4 bytes 1 byte 2 bytes Input Input Input 1 byte 1 byte 4 bytes Output Output Output Input data: (Unit 0) Analogue input unit (EX600-AXA): 4 bytes occupied Input data: (Unit 3) Digital input unit (EX600-DX#B): 1 byte

External Cover Series HYQ/20, 25 2 x C 2 x C Head end Rod end D A B A B Cover material: Stainless steel Mounting bolt material: Stainless steel (mm) Cover material: Stainless steel Mounting bolt material: Stainless steel (mm) t=1 t=1 D C B A HYQ-HA020SUS HYQ-HA025SUS Part no. Installation bolt C B A HYQ-HB020SUS HYQ-HB025SUS Part no.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + t When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + t Q : Air flow rate [dm3/min (ANR)], dm3 (Cubic decimeter) of SI units are also allowed to be described by L (liter). 1 dm3 = 1 L 8 VXB Series C : Sonic conductance [dm3/(sbar)] b : Critical pressure