Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 03 (3/8), Output Specification/Temperature Sensor: LT (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: Yes), Lead Wire: N (None), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket: R (w/Bracket), Calibration

Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/o Lead Wire and M8 Connector, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 3/4, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/o Lead Wire and M8 Connector, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/o Lead Wire and M8 Connector, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 3/4, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/Lead Wire and M8 Connector, 3 m, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 3/4, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/o Lead Wire and M8 Connector, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

Valve; w/Stop Valve, Supply/Return Port Size: 1/2, Return Unit Flow Switch Output Specifications: LT [Out 1: IO-Link/Switch Output (N/P); Out 2: Flow Rate: None; Temp.: None; Temperature Sensor: Yes], Lead Wire: w/o Lead Wire and M8 Connector, Return Unit Flow Switch Unit Specifications: Integrated Display: L/min; Accumulated Flow: L; Temp.: °C; Integrated Display IO-Link: L/min; Accumulated

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor / 0 to -101 kPa / Analogue Output 1 to 5 V), Connector: L [L-type Plug Connector - w/ Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment

Accuracy: H (High Precision), Motor Mounting Position: L (Left Side Parallel), Motor Type: S4 [AC Servo Motor, (Incremental Encoder), 400W], Lead: L (2.86mm), Stroke: 150mm, Dust/Drip Proof: P (IP65, Dust/Drip Proof Specification w/vent hole tap), Motor Option: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: L (Foot), Cable Type: R (Robotic Cable, Flexible Cable), Cable Length

: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m), Option: B [Adapter Assembly for Bottom Mounting, (ZL112A-AD1-A)]

(Digital Vacuum Pressure Switch), Output Specifications: None, Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: None, Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Pressure Sensor: D (Digital Vacuum Pressure Switch), Output Specifications: None, Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Collector 2 Outputs + Copy function), Unit Specifications: P (w/Unit Switching Function, Initial Value psi, Not for Use in Japan), Lead Wire Specifications: L (Lead Wire w/Connector, 2m)

Stations: 02 (2 Stations), Piping: D (U Side: Closed; D Side: Open), Thread Type: Rc, Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Switch: 7 (Integrated Display), Return Unit Flow Range: 40 (5 to 40 L/min), Return Unit Components: S (w/Flow Adj.

Rated Pressure Range: 20 (0 to -101 kPa), Output Specification: P (PNP Open Collector 1 Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (M5 Female Thread), Option 1: L (Lead Wire w/Connector, 2m)

Rated Flow Range: 01 (10 to 1000 l/min), Output Specifications: L2 [Out1: IO-Link, Switch Output (N/P); Out2: Switch Output (N/P)], Lead Wire: N (w/o Lead Wire and M12 Connector), Unit Specification: M (SI Unit Only), Calibration Certificate: A (Yes), Flow Direction: R (Right to Left)