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(inch) Connection thread UNF NPT Min. port size Weight (g) A D1 D2 L M Model Applicable tubing Nylon Urethane KSH03-34S KSH03-32 9 14 17 23 23 29 55 63 8 10-32 UNF 36.5 37.6 38.6 42 43.1 46.5 53.5 53.9 33 34.5 35.5 36.5 40 41 48 48.5 16 2.5 5 32 10.4 4.0 4.0 12 1 8 12.7 KSH07-34S 14.29 17 1 8 1 4 13.4 10.4 4 13.2 1 4 14 KSH07-35S KSH09-34S KSH09-35S KSH11-35S KSH11-36S 1 8 18.5

Pressure Possible range of pressure specifications up to 1.0 MPa 0.5 MPa or less OK 48 Model Selection FGF Series Selection method Selection flow chart Selection example Step 2 Selecting a vessel FGD Calculate the number of elements.

Approximately 20 g of super high purity hydrofluoric acid (48%) is measured and injected into the tubing. The interior wall of the tubing is immersed at normal temperature for one week with both ends of the tubing plugged. Then the extract was diluted with super deionized water to be subjected to a quantitative analysis on Al, Fe, Ni, Na and Ca by the stripping method.

The drain pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36

Circulating fluid discharge temp. sensor failure Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Communication Functions Contact Input/Output Item Specifications Connector type M4 terminal block Insulation method Photo coupler Rated input voltage 24 VDC Operating voltage range 21.6 to 26.4 VDC Rated input current 5 mA TYP Input impedance 4.7 kW Input signal Rated load voltage 48

website, http://www.smcworld.com 80 Thermo-chiller Standard Type HRS090 Series Communication Function Contact Input/Output Item Specifications Connector type M3 terminal block Insulation method Photocoupler Rated input voltage 24 VDC Operating voltage range 21.6 to 26.4 VDC Rated input current 5 mA TYP Input impedance 4.7 kW HRS Input signal HRS 090 HRS 090 HRS 100/150 Rated load voltage 48

Please download it via our website, http://www.smcworld.com 109 HRS100/150 Series Standard Type Communication Function Contact Input/Output Item Specifications Connector type M3 terminal block Insulation method Photocoupler Rated input voltage 24 VDC Operating voltage range 21.6 to 26.4 VDC Rated input current 5 mA TYP Input impedance 4.7 kW Input signal Rated load voltage 48 VAC or less/

[mm] HRSE012-A-10 35 Height 745 x Width 465 x Depth 575 HRSE018-A-10 HRSE012-A-10-T 42 Height 745 x Width 465 x Depth 620 HRSE018-A-10-T HRSE012-A-20 38 Height 745 x Width 465 x Depth 575 HRSE018-A-20 HRSE024-A-20 HRSE012-A-20-T 45 Height 745 x Width 465 x Depth 620 HRSE018-A-20-T HRSE024-A-20-T HRSE012-A-23 41 Height 790 x Width 470 x Depth 580 HRSE018-A-23 HRSE024-A-23 HRSE012-A-23-T 48

Please download it via our website, http://www.smcworld.com 175 HRSH Series Inverter Type Communication Function Contact Input/Output Item Specifications Connector type M3 terminal block Insulation method Photocoupler Rated input voltage 24 VDC Operating voltage range 21.6 to 26.4 VDC Rated input current 5 mA TYP Input impedance 4.7 kW Input signal Rated load voltage 48 VAC or less/30 VDC

. * For details, read the Operation Manual. 143 HRSH090 Series Inverter Type Communication Function Contact Input/Output Item Specifications Connector type M3 terminal block Insulation method Photocoupler Rated input voltage 24 VDC Operating voltage range 21.6 to 26.4 VDC Rated input current 5 mA TYP Input impedance 4.7 kW Input signal Rated load voltage 48 VAC or less/30 VDC or less Maximum

Humidity) 2 to 40 (Relative humidity of 85% or less) (3C) 12 24 36 65 80 120 Outlet air pressure dew point Note 1) IDF IDU Standard condition (ANR) (7C) 15 31 46 83 101 152 Outlet air pressure dew point Air flow capacity m3/h (10C) 17 34 50 91 112 168 Outlet air pressure dew point IDF FS (3C) 13 25 37 68 83 125 Outlet air pressure dew point Note 2) Compressor intake condition (7C) 16 32 48

of 50F (10C) 459 SCFM (780 m3/h) (13% increase compared to the current model) Power supply voltage Single-phase 230 VAC (60 Hz) Single-phase 115 VAC (60 Hz) * IDFB60 only IDFB Series CAT.ES30-21A B Refrigerated Air Dryer IDFB Series Applicable for the hightemperature environments Increased air flow capacity IDFB60 IDFB70 IDFB90 IDFB80 50 10 New Current model IDFB Series 49 IDFB Series 9 48

(Inch) VQ1000 (Pitch) VQ2000 4(A), 2(B) port Note) When inch-size fittings are selected for the cylinder port, inch-size fittings are selected on 1(P), 3(R) port, too. 1(P), 3(R) port size VQ1000 5/16" (N9) VQ2000 3/8" (N11) L = 12.5 x n + 10.5 L Dimension 1 2 3 4 5 6 7 8 9 10 23 35.5 48 60.5 73 85.5 98 110.5 123 135.5 No.

Work load [kg] LEFS25SlB/Ball Screw Drive LEFS25SlB/Ball Screw Drive Horizontal Vertical 20 20 Duty ratio: 50% Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] 17500 17500 Duty ratio: 75% Duty ratio: 75% 15000 15000 Duty ratio: 100% Duty ratio: 100% 12500 12500 10 10 7500 7500 5000 5000 2500 2500 0 0 0 5 10 15 0 5 10 15 20 Work load [kg] Work load [kg] 48

Precautions on these products. 2504 to 2511 1 Model 0.5 A B D Dimensions (mm) Recommended flow (m3/min (ANR)) 2.2 or less 3.0 or less 4.0 or less 8.0 or less 10.0 or less 1.5 or less 1.5 or less Model Port size R Effective area (mm2) Weight (g) 0.2 Inlet pressure (MPa) Noise level (dB (A)) 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 0.1 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48

Body center H R A L D F C E B Dimensions mm Interface With T Bracket 24 35 40 A B C D E F G H R L Applicable Models Y20T-T4 Y30T-T4 Y40T-T4 10 11 14 48 70 80 2.75 3.5 4.5 33 45 50 AC21*-X2217 AC31*-X2217 AC41*-X2217 15 16 22 5.5 7 9 30 41 50 3 4 4 5 7 7 Other Available Air Line Products with Epoxy Coating/Stainless Hardware Description Option Code Series (N)AV AMG AR20-60 AVL AW20-40 E*00

' B C Drain cock Drain guide R, NPT, G Operating Pressure: 0.5 (MPa) Operating pressure: 0.5 (MPa) Mounting bracket Port size Model E M3 x 0.5 Depth 8 Drain piping D C B A F G H J K B' 3 8 AMC310 75 140.5 138.5 150.5 24 50 15 55 2.3 141.5 AMC510 M4 x 0.7 Depth 8 102 193.5 196.5 203.5 40 70 20 70 3.2 199.5 3 4 Air consumption (l/min (ANR)) AMC610 M4 x 0.5 Depth 10 118 219.5 224.5 229.5 48

Dimensions AMR3000 AMR4000, 5000, 6000 N Bracket mounting dimension With auto drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) P 50 35 45 46.5 R 78 97 98 115 S 8 7 10 15 T 9 9 11 11 B 260 298 366 432 L 178 211 277 321 1 4, 3 8 1 4, 3 8 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 436 10 10 70 70 103 121 131 161 51 61 66 81 28 37 37 44 32 40 48

Pressure gauge port size Port size Model AR425/435 AR625/635 AR825/835 AR925/935 1/4, 3/8, 1/2 3/4, 1 1 , 1 2 80 98 126 160 145.5 155 216 241 3 7 5 10 1/4 1/4 1/4 1/4 39.5 43 75 90 50.0 85 48 52 80 90 B24P B25P 67 78 110 140 73 78.5 94.5 4 1 2 1 109.5 680

ARM Pressure gauge (Option) ARP IR-A IN (Common IN, with plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48