Stations: 04 (4 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: S (w/Flow Adj. Valve; Stop Valve: None), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: F (Bracket)

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Speed Controller: Standard Type Series AS In-line Type 1

32, 40, 50, 63 124 AS3000-03 3/8 810 12.3 810 12.3 221 AS4000-02 1/4 1,670 25.5 1,670 25.5 40, 50, 63 80, 100 214 AS4000-03 3/8 1,670 25.5 1,670 25.5 205 AS4000-04 1/2 1,670 25.5 1,670 25.5 242 AS5000-02 1/4 2,840 44 2,840 44 40, 50, 63 80, 100 233 AS5000-03 3/8 4,270 66 4,270 66 224 AS5000-04 1/2 4,270 66 4,270 66 AS4000 Note) Flow rate values are measured at 0.5 Mpa and 20C.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Metric size Inch size Type Elbow Universal 2 3 1 8" 5 32" 23 01 3.2 4 6 8 10 12 04 06 08 10 12 03 05 07 09 11 13 3 16" 1 4" 5 16" Control type Meter-out Meter-in 0 1 3 8" 1 2" Use 1/8" tube.

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: DN (D + N)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: N (Name Plate)

Series: VQ2000, IN Port Size: 02 (Rc 1/4), OUT Port Size: 02 (Rc 1/4), Option: FN (F + N)

21- AF-A 10- Series Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size Option a Mounting Nil Without mounting option B Note 3) With bracket + r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Port Size: 04 (Rc1/2), Mesh: 2-X204 (50 Mesh)

Port Size: 04 (Rc1/2), Mesh: 3-X204 (25 Mesh)

Fitting: 11 (Size 1), Tubing Size: 04 (ø4 x ø3)

Body Size: 450C, Thread: Rc, Port Size: 04 (1/2)

.: 04 (ø4)

.: 04 (ø4)

Mounting: C (Single Clevis), Applicable Bore: 04 (for 40mm Bore)

Mounting: D (Double Clevis), Applicable Bore: 04 (for 40mm Bore)

Type: D (Double), Applicable Bore: 04 [150 (1 1/2")]

Type: S (Single), Applicable Bore: 04 [150 (1 1/2")]

VER: VER4001 (External Pilot Type), Port Size: 04 (1/2)