Compact Cylinder Series CQS

For installation and removal, use an appropriate pair of pliers (tool for installing a type C retaining ring). 2. Even if a proper plier (tool for installing type C retaining ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a retaining ring may be flown out of the tip of a plier (tool for installing a type C retaining ring).

LEC-OM02904

(2) DC24V NFB MC M (3) IEC60664-12 (IP54) A 10 (4) (a) YIEC60664-1 400V (b) DC24V (5) (a) (PE) () (PE) (b) (PE) () 1 PE PE PE PE (c) (PE) () (6) (a) (b) EN (7) (a) EN/IEC B() A B (b) EN60204-15C 40 PVC() (c) EMC (8) EMC EMC () EMCEMC(IB()67303) A 11 UL/C-UL (1) LECSSLE-S5-LE-S6-LE-S7-LE-S8() .

REA/REB

B FB EB H 4-counterbore depth C 4-J depth JK HI S + Stroke HO TT T HP HG MM thread depth M PA H 2-P Hollow shaft for piping HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A N N (mm) HP HO HI HG HB HA H GP G FB FA EB EA d D C B Model A REAL15 REAL20 REAL25 REAL32 REAL40 39 38 14 16 4 6.5 40 65 6.5 6 3 13 6 12 16.6 5 9.5

REA/REB

B With switch rail Q + Stroke Z + Stroke HR Plug RS H A RZQ 22 8 Piping port P Operating direction B Piping port P (Plug) Operating direction B 8 Piping port P Operating direction A MI W S 12.5 19.5 16 CEP1 CE1 Plug CE2 REBR15 REBR15 ML2B (mm) C J G5-S A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15 12 8 4.2 2 0.5 17 8 5 33 31.5 32 30 17 31 30 8.5 CV REBR25 12.5 9.5 5.2 3 1

Programless Controller Series LECP1

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Y ellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

5 Port Solenoid Valve

4 (A) 1 (P) 2 (B) 3 (R2) t u Dual 3-Port: S07B0 A Plug-in Manifold Stacking Base C i r e w q y r S07A0 4 (A) 2 (B) 5 (R1) 1 (P) 3 (R2) N.C. + N.C.

Air Cylinder Series MB

2 w i A A' Cylinder tube sectional view A-A !

Digital Pressure Switch

> -65No.PS-OMV1001-C Revision history A: Contents revised in several places.

NCQ8

For installation and removal, use an appropriate pair of pliers (Tool for installing a type C snap ring). 2. Even if a proper plier (tool for installing type C snap ring) is used, it is likely to inflict damage to a human body or peripheral equipment, as a snap ring may be flown out of the tip of a plier (tool for installing a type C snap ring).

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

BEA/EB) Grommet Cv b C (dm3/ 14/2 (PA/B) 4/25/3 (A/BEA/EB) Grommet Cv b C (dm3/ Valve model Actuation type Valve model Actuation type 1, 5, 3 L/M plug W M8 L/M plug W M8 1, 5, 3 4, 2 (A, B) (P, EA, EB) 4, 2 (A, B) DIN terminal (sbar)) Cv b C (dm3/ (sbar)) Cv b C (dm3/ (P, EA, EB) connector 51 53 68 74 connector 57 82 connector 101 104 120 125 connector 108 133 (sbar)) (sbar)) Single Single

7.5

Flow Characteristics SJ2000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b b Cv 0.04 0.55 0.13 0.13 0.50 0.04 C2 C8 0.08 0.16 0.33 0.36 0.13 0.08 C4 0.52 0.06 0.18 0.20 0.29 M3 0.06 SJ3000 Flow characteristics Port size 4/23/5 (A/BE) 12/4 (PA/B) 1(P) 3/5(E) 4, 2 (A, B) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv b 0.04 0.56 C2

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Table of Contents

Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Lead wire electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P=51 (Pitch) 2 6 [2] 1 71.5 2n x 1/2, 3/4 Stations (A, B port) 24 [23] 20 70 [71.5] 2n x 1/2 28 58 114 91 105.5 176.5 209 9 D side 179 Bottom ported: VV5FR5-10Station 2Port size

Compact Manifold Regulator Series ARM5

Construction (Individual Supply Type Regulator Block) P U S H OUT IN L O C K A A A-A Component Parts Replacement Parts Material Material Part no. Description No. Description No.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Example 3 Example 4 End w (270) (135) Rotation range for block C = 30 Rotation range for block C = 90 Single flat Single flat End w End q End q (45) B port A port (45) B port A port A port B port B port A port Clockwise Clockwise Block D Stopper ring Stopper ring Block C Block C Counterclockwise Counterclockwise The maximum rotation range of the