High Vacuum Angle Valve

For models with a solenoid valve, the temperature of the solenoid valve section should be no greater than 50C. 4. Vibration resistance allows for normal operation up to 30 m/s2 (45 to 250 Hz), but continuous vibration may cause a decline in durability. Arrange piping to avoid excessive vibrations or shocks.

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

32C Water cooled aftercooler Inlet air temperature: 180C Inlet temperature of cooling water: 30C Note 2) Series IDF Inlet air temperature: Saturated at 35C (IDF1D), saturated at 40C (IDF2D to 240D), Ambient temperature: 32C Note 3) Series IDG Inlet air temperature: Saturated at 25C, Ambient temperature: 25C Note 4) Series IDU Inlet air temperature: 60C (IDU3D to 6D), 55C (IDU8D to 37C1), 50C

CE

Withstand voltage MI W S Between case and AC line: 500 VDC, 50 M or more Insulation resistance 0 to 50C (without freezing) Ambient temperature CEP1 35 to 85% RH (No condensation) Ambient humidity Square wave noise from a noise simulator (pulse duration 1 s) between power supply terminals 1500 V, I/O line 600 V Noise resistance CE1 Endurance 10 to 55 Hz; Amplitude 0.75 mm; X, Y, Z for 2 hours

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 50mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 50mm, Motor: B (w/Lock), Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Size: 40, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 30mm, Motor: w/o Lock, Rod End Thread: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable

Size: 32, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: C (LEY25, 3; LEY32/40, 4), Stroke: 30mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting: 8

Size: 25, Motor Mounting: D (In-line Type), Motor Type: Step Motor, Servo/24 VDC, Lead: B (LEY25, 6; LEY32/40, 8), Stroke: 200mm, Motor: B (w/Lock), Rod End Thread: Rod End Female Thread, Mounting: Ends Tapped, Body Bottom Tapped, Actuator Cable Length: 5m, Controller Type (LEC, JXC): C91 (JXC91, EtherNet/IPâ„¢ Direct Input Type), I/O Cable Length for LEC: w/o Cable, Controller Mounting:

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 600mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller Type: C

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 300mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller Type: C

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 900mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 250mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m)

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: w/o Lock, Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 50mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller Type

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 200mm, Motor Option: w/o Lock, Vacuum Port: R (Right), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller Type:

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 100mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller

Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 150mm, Motor Option: B (w/Lock), Vacuum Port: Left, Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length: 5 (5m), Controller