HEC-OM-U015

ZS AS BS . This function raises an alarm when temperature of the circulating fluid is out of allowable upper and lower range. When the alarm is raised, WRN is indicated on LCD. If circulating fluid temperature returns to within allowable upper/ lower range, this alarm is automatically cancelled. The allowable upper and lower range of temperature can be set between 0.1 and 10 C.

CXT

With 1 shock absorber (Set on the driving cylinder side when packed.) 25 B 32 BS 40 Standard stroke Long stroke * Refer to p.3.8-10 for minimum strokes for auto switch equipped style. Applicable auto switches/Refer to p.5.3-2 for further information on auto switch.

SQ1000/2000

V0V CANL FG CANH V+ 24V V0V CANL FG CANH V+ BDH BS+ BDL BS24V 0V BDH BS+ BDL BS24V 0V 24V Master unit SI unit SI unit DG DB DA DG DB DA DG DB DA End resistance End resistance Master Connector with end resistance VSLD FG FG FG BDH CANL BDL FG CANH Type 3 grounding Type 3 grounding Type 3 grounding V+ Branching crimp connectors Twisted pair line with shielding DeviceNet CompoBus/S System

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

Basic type / Direct mount type Series CY3B/CY3R

2 t r @2 @1 #3 #4 #1 @9 #2 @5 @7 @4 @6 CY1H10 CY1H10-B CY1H10-BS CY1H10@3 @8 #0 t Material Note Component Parts No. 1 2 3 4 No.

Modular F.R.L. Pressure Control Equipment

AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50

modular-press-e

AD37 AD47 Spacer Y100 Y200 Y300 Y400 Y500 Y600 Y400 AKM4000-(02) 03 IS1000M-40 Y410-(02) 03 02 VHS40-03 04 02 E400-03 04 06 02 IS1000E-4003 04 06 Y44-02 03 Y600 Y500 Check valve Note 6) Note 7) Pressure switch Note 7) IS1000M-60 IS1000M-50 Y510-(02) 03 IS1000M-20 IS1000M-30 IS1000M-40 IS1000M-50 IS1000M-60 Y610-03 (04) Y610-(03) 04 T-interface Note 6) Note 7) Y110-M5 Y110-M5 VHS20-01 02 VHS50

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

Best Pneumatics Vol. 14

(This is not applicable to VHS40 and VHS50) Body size Applicable model AC20 AC25/30 AC40 AC50, AC60 Note) Symbol 20 30 40 50 Effective area (mm2) 5 5 Model VHS20 VHS30 Note) When the valve is mounted on AC60, the flow rate may decrease depending upon the mounting position.

-fl Seies

brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.

Series SV

+ BS 24V 0V BDH BDL BS+ BS 24V 0V BDH BDL CANH V+ 24V 0V V CANL CANH FG V+ Slave unit 75 Slave unit 03 Slave unit 01 Master unit With terminal resistor connector S2 S1 S2 S1 S2 S1 S2 S1 Master unit V BDH SD FG SD FG SD FG SD FG CANL Twisted pair wire with shield FG BDL Class 3 ground Class 3 ground Class 3 ground Class 3 ground CANH V+ Connect the shielding wire to the SD terminal.

5-Port Solenoid Valve

With Residual Pressure Release Valve Pilot, Silencer/Piping type Symbol Pilot type Built-in silencer Piping direction Internal External Nil V Side S V V R V V V Top RV V VP V V*1 B V Bottom BS V V BR V Vacuum Release Valve with Restrictor BSUP/EXH end block assembly (Includes a) A-e aTension bolt ( ) Tightening torque: 0.8 Nm SY3000: 2 pcs.

Electric Actuator with Integrated Guide

JOG JOG operation mode HOLD /BS UP L R Monitors operating condition. MON Monitor mode DOWN MODE ENT /ESC Directs alarm code display and clear. ALM Alarm reset mode Key Functions Moves upward for item selections. Also used to increase values for data entry. In combination with L/R keys, this key drives the actuator at high speed during a JOG operation.

OMU0023

(a) Alphanumeric characters (capital / small letters) (b) Special characters (BS, space, TAB, comma, full stop, hyphen) (c) Line-break code (CR + LF) (3) ID When communication is established between the Card Motor controller and upper level device such as a PLC, a request will be received and a response will be sent only when the pre-set Card Motor controller ID matches with the controller

XL

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K

15

BS Bumper bolt (resin tipped): Plate B side or C side Shock absorber Applicable Auto Switches/Refer to pages 1575 to 1701 for further information on auto switches.

Speed Controller with Indicator

Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate characteristic curves in the charts show the applicable tubing outside diameter as defined by the product number. 29 Speed Controller with Indicator/Elbow Type Uni Thread Type Series AS-FS Construction: Elbow Type AS22l1FSl-U01-06A

Compact Rotary Actuator

Then, piston A moves right , and the magnet goes into switch Bs operation range to turn on switch B. 7Cushions a) Rotary actuator is not adjusted so that the cushions work during shipment. Adjust the cushion valve attached to the cover depending on rotation time and load inertia moment.See Fig 15 b)Rotating the cushion valve reduces the orifice diameter and increases cushion effect.

Low-Speed Rotary Actuator

Then, piston A moves right, and the magnet goes into switch Bs operation range to turn on switch B. Mounting of auto switch When tightening the auto switch mounting screw, use a precision screwdriver with a handle of 5 to 6 mm in diameter. Table 8 shows the recommended tightening torque. Use the designated slotted set screw (M2.54L) to mount the auto switch. Table 8.

AS

16.5 6 10.4 18.6 23.4 6 AS12;1F-U10/32-06A Note 1) Reference dimensions Note 2) Reference dimensions after installation of thread Inch size (mm) T D1 H D3 L1 L2 L3 M L4 Note 1) A Note 2) Model Weight d (g) Lock Unlock Lock Unlock AS12;1F-M5-01A 1/8" 7.2 AS12;1F-U10/32-01A 17.2 22 16.9 5 AS12;1F-M5-03A M5 x 0.8 9 9 26.5 25.4 23.5 22.4 13.3 5/32" 8.2 10-32 UNF AS12;1F-U10/32-03A AS12;1F-M5