Function: 1 (2 Position Single), Body Style: 20 (Body Ported/Individual Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 6 (12VDC), Lead Wire: T (Conduit Terminal), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread

Function: 5 (3 Position Pressure Center), Body Style: 20 (Body Ported/Individual Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 6 (12VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1)

Function: 1 (2 Position Single), Body Style: 20 (Body Ported/Individual Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 6 (12VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: A (Non-locking Push Extended Style), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread

Function: 2 (2 Position Double), Body Style: 20 (Body Ported/Individual Pilot EXH), Body Option: Body Ported Type, Pilot: Internal Pilot, Voltage: 6 (12VDC), Lead Wire: D (DIN Connector), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread:

Function: 1 (2 Position Single), Body Style: 0 (Base Mounted Plug-in), Body Option: 0 (Standard for Base Mounted Type), Pilot: Internal Pilot, Voltage: 6 (12VDC), Lead Wire: F (Plug-in), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style (Flush), Piping: Side, Port Size: 02 (Sub-plate Plug-in 1/4, Non Plug-in 1/4, Direct Ported P,A,B Ports 1), Thread:

Size: 01(Size 26mm), Stations: 6 Stations, A, B Port: 02 (Side, 1/4), Port Thread: T (NPTF), SI Unit: SD0 (EX250/500 Serial Kit w/o SI Unit), End Plate: w/o SI Unit/End Plate, SI Unit COM: +COM, Number of Input Blocks: w/o SI Unit/Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block

Function: 1 (2 Position Single), Piping: 3 (Body Ported), Exhaust: 0 (Individual), Low Wattage: None, Pressure Specification: Standard (0.7MPa), Coil Specification: Standard, Voltage: 6 (12VDC), Lead Wire: DO (DIN Connector w/o Connector), Light/Surge Suppressor: Without light/surge voltage suppressor, Manual Override: Non-locking Push Type, A, B Port Size: 02 (1/4), Thread: Rc, Bracket:

Series: AFM, Body Size: 30, Thread: N (NPT), Port Size: 02 (1/4), Mounting: w/o Mounting Option, Float Type Auto Drain: w/o Auto Drain, Bowl Type: 6 (Nylon Bowl), Bowl Guard: None, Drain Port: w/Drain Cock, Indicator: without Indicator, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting), Pressure Unit: Z (Pressure Unit: psi; Temp. Unit: °F)

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and common precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. Bore size Applicable series 02 03 04 06 10 12 14 20 Note 1) AS800 is available as special.

SFA100/200/300 Series Clean Gas Filter: Cartridge Type/Disc Type

Note 2) Weight kg Connection Filtration area cm 2 AME SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 SFA102-02 SFA202-02 SFA302-02 SFA103-02 SFA203-02 SFA303-02 Rc 1/4 (Female thread) 13.85 ED001S-X10V 0.34 26 NPT 1/4 (Female thread) AMF Rc 1/4 (Female thread) 33.18 ED101S-X10V 0.44 70 NPT 1/4 (Female thread) ZFC Rc 1/4 (Female thread) 56.75 ED201S-X10V 0.66 140 SF SF NPT 1/

VM

F.O.F. 4.5 mm 2.0 mm 2.5 mm 6 N Applicable tube Mounting hole One way roller lever VM1000-4N-02 VM1000-4NU-02 VM1100-4N-02 VM1100-4NU-02 JIS Symbol/2 port 3 port 0.5 MPa supply Applicable tubing T0425 TU0425, T0403, TS0425 VM1100-4N-02 VM1000-4N-02 Side ported 3 port 2 port VM1100-4NU-02 VM1000-4NU-02 T.T. O.T. P.T.

Port Size: 04 (Ø4), Model: R (Reducer 3.2, 4)

Body Style: Single Type, Applicable Tube OD: 04 (ø4)

Model: 5 (10-SY5000), Stations: 04, Thread: 00T (NPTF)

Nozzle Diameter: 04 (0.4mm), Vacuum Pressure: L (-48 kPa)

Model: VVQ5000, Style: R (EXH), Port: 04 (1/2)

Model: VVQ5000, Style: P (SUP), Port: 04 (1/2)

Mounting: F (Flange), Applicable Bore: 04 (for 40mm Bore)

Type: I (Single), Applicable Bore: 04 (for 40mm Bore)

Type: Y (Double), Applicable Bore: 04 (for 40mm Bore)