o

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

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(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

29 18 4(depth 4) 4(depth 4) 4 13 33 42 n QL Model 50 100 150 200 250 300 350 400 50 100 150 200 250 300 350 400 Stroke MXY6 2 3 3 4 39 34 59 54 MXY8 5 5 34 59 2 2 3 4 39 64 54 44 MXY12 2 4 4 5 5 37 67 47 72 52 77 2 3 3 62 42 8-9-12 12 Air Slide Table Long Stroke Type Series MXY Proper Auto Switch Mounting Position (Detection at stroke end) Reed Switch D-A90(V), D-A93(V), D-A96

Fieldbus system Digital unit

If turned too far, it will become hard to remove the connector. (1) (2) (3) D-sub socket connection method is explained below. (1)Align the D-sub socket connector of the unit and the plug connector of the cable. (2)Insert the plug connector of the cable into the D-sub socket connector of the unit vertically.

Digital Pressure Switch

Dimensions 02 type -79No.PS-OMU0009-D F02 type C01 type A2 type B2 type -80No.PS-OMU0009-D 02L type -81No.PS-OMU0009-D F02L type C01L type A2L type B2L type -82No.PS-OMU0009-D Bracket mounting dimensions Bracket A -83No.PS-OMU0009-D Bracket C -84No.PS-OMU0009-D Mounting dimensions of panel mount adapter (rear piping type) Mounting dimension of panel mount adapter (rear piping type) + Front

70pvvna

100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Other Nil A B Non-locking push type Non-locking extended type Locking slotted type 1 2 3 4 5 6 7 9 1 2 3 4 5 6 7 9 Electrical entry Grommet Conduit Conduit terminal DIN terminal DIN terminal with indicator light Option G C T Note) D DL Option Option Option Note) When the electrical entry

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13 16 45 7.5 M8 x 1.25 60 4.5 14 7 34 5.5 1/8 10.5 58.5 31.5 14 75, 100 50 43

Digital Pressure Switch

-D Mounting dimensions of panel mount adapter Mounting dimension of panel mount adapter + Front protective cover -80No.PS-OMU0003-D Panel cutout dimensions Mount individually More than 2 pcs.

Digital Pressure Switch

81No.PS-OMU0006-D Panel cutout dimensions Mount individually More than 2 pcs.

Fieldbus System

5000 47.3 14.8 1 2 1 2 19 3 4 3 4 (6.5) M12 Plug connector pin arrangement D-coded Plug connector pin arrangement D-coded M12 SPEEDCON Width across flats 16 Width across flats 13 Terminal no.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

15 7.2 7.5 41.5 22 Bracket D ZS-24-D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0 +0.5 36 70 or more 47.4 Piping port URJ 1/4 Front protection cover The thickness of the panel is to 3.2mm. 12 Series ZSE F/ISE 50 60 50 60 Description (Common to ZSE50F/ISE50 and ZSE60F/ISE60) 31/2 digit LED kPa Displays current pressure Displays current mode

Booster Regulator/Air Tank

D-DN

High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

Silencer Series AN

Construction/Parts/Dimensions AN500 to 900 End plate (Carbon steel) Tension bolt (Carbon steel) (mm) Dimensions Sound absorbing material (Resin sintered body) Model Port size R, NPT AN500-06 AN600-10 AN700-12 AN800-14 AN900-20 A B D A Cover (Carbon steel) 3/4 107 46 36 Body (Aluminum alloy) 1 127 50 41 1 1/4 186 74 50 Hexagonal flats D 1 1/2 217 74 55 2 256 86 65 Port size B 4 Series AN Specific

100

40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 Vacuum pressure [kPa] Vacuum pressure [kPa] ZL3H ZL3H04P ZL3M ZL3M04P Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 Suction flow rate [L/min (ANR)] 100 50 200 150 300 250 350 0 23 Multistage Ejector ZL3/ZL6 Series Flow Rate Characteristics (Representative value) ZL6M (04P) Supply pressure: 0.35 MPa/0.37 MPa (With valve) ZL6H (

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Air cylinder (Series compatible with secondary batteries)

Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 D-M9-900/M9V-900 D-M9W-900/M9WV-900 90-BA7-040 90-BA7-040 90-BA7-063 90-BA7-080 90-BA7-080 Table 5 Operating Range Bore size(mm) Auto swich model 40 50 63 80 100 D-A9-900 7.5 8.5 9.5 9.5 10.5 D-M9-900/M9V-900 D-M9W-900/M9WV-900 4.5 5 5.5 5 6 Values which include hysteresis are for guideline purposes only, they are

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Coil voltage 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other Note) For the special voltages, please consult with SMC.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

FU) Size (mm) (mm) FU 10 20 30 50 HD HC HB HA DF DC DB DA 10 20 30 50 HE 5 6 6 7 Size HC 20H8 28H8 32H8 35H8 63 73 76 87 9.5 13.5 13.5 15.5 35h8 40h8 48h8 54h8 31.5 34.7 34.7 51.7 46h8 61h8 67h8 77h8 24 30 30 34 45h8 60h8 65h8 75h8 15.5 19.5 19.5 21.5 DF (mm) A 50 65 70 80 DF 5 6 6 7 DG HC JB JA J H AY FB FA CB AX DE DD D AW CA AV BE BD BC BB BA AU AA Size 10 20 30 50 15.5 16 18.5 22 4 5

HEAVY DUTY STOPPER CYLINDER

D-M9/D-A9 Auto switch Figure-16 Auto switch D-M9 D-M9W D-M9AVL model D-M9V D-M9WV D-M9AL D-A9 D-A9V Bore size A B A B A B A B 50 23.5 9.0 23.5 11.0 23.5 7.0 19.5 10.5 (13.0) 63 25.5 12.5 25.5 14.5 25.5 10.5 21.5 14.0 (16.5) 80 39.5 19.5 39.5 21.5 39.5 17.5 35.5 21.0 (23.5) The values in brackets are for D-A96.