High Purity Chemical Valve

Dimensions LLCmA-mm-C Stations 4 x Mounting hole for W Y A K D L3 L2 L1 (Max.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

1.0 Communication speed [bps] 156 k/625 k/2.5 M /5 M/10 M 125 k/250 k/500 k 9.6 k/19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 M 10 M/100 M Configuration file Note 2) EDS file GSD file EDS file Communication specifications Input 896 points 108 words 4 stations occupied (8 times setting) Input 200 bytes Output 200 bytes Input 57 words Output 57 words Input 256 bytes Output 256

Fieldbus System

type) H Nil R Internal pilot External pilot R U S Z NS NZ For K and H, mounting screws do not fall out from the valve.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Fittings & Tubing Air Cylinders Rotary Actuators 11.5 65 Operating port 2 x Rc1/8 (NPT1/8, G1/8) 32 14 26 20 Other dimensions are the same as basic type. 818 MXQ 1322Air Slide Table Dimensions: MXQ20L / Symmetric Type 1322Basic ZZ Z 43.5 0.5 46 6.5 6.5 12 25 K NA x M6 x 1 thread depth 6 Note 1) If long bolts are used, they can touch the guide block and cause malfunction, etc.

MB

) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 13 13 l + Stroke 9 l 9 A K f N N f K A ZZ + 2 Stroke S + Stroke h + Stroke h Without Air Cushion S ZZ Stroke range Width across flats Bore (mm) Eff. thread length C B A D Ee11 F G H MA MB J K MM N P V W S ZZ 32 40 50 63 80 100 125 46 52 65 75 95 114 136 32.5 38 46.5 56.5 72 89 110 12 16 20 20 25 30 32 30 35 40 45 45 55

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Clamp Cylinder with Lock

Note 2) Clevis width B is not available with mounting base K. B F Retraction locking Extension locking Applicable Magnetic Field Resistant Auto Switches (Refer to page 21 through to 25 for detailed auto switch specifications.)

Air Cylinder Series CS1

f K h + l h + l + Stroke S + Stroke ZZ + 2l + 2 stroke (mm) Type Stroke range (mm) Bore size (mm) AL B C D E EA F FA G J K KA M MM N P S A With rod boot Without rod boot 1 2 1 2 3 4 3 4 3 4 125 140 160 180 200 250 300 Up to 1000 30 to 1000 50 47 36 90 59 43 14 16 M14 x 1.5 15 31 27 M30 x 1.5 35 98 145 115 Lube Non-lube Air-hydro Up to 1000 30 to 1000 50 47 36 90 59 43 14 16 M14 x 1.5 15 31

Modular Style Regulator with Built-in Pressure Gauge Series ARG

K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Mounting angles other than 45, 135, 225 and 315 are available through the Made to Order (page 29).

Electric Actuator/Slider Type

Note 2) The direction of rod end width across ats ( K) differs depending on the products.

LEH_C

4 6N J 2 1 R 1 DIN 10 10 )DIN I/O (m) 16 16 2 0 2 0 25 25 1.5 1 1 L L 3 3 3 3 5 5 5 5 K K 2 LECP6 ( NPN NPN (mm) PNP PNP 10 LECP1 1 LECP1 ( 1 NPN NPN 1P 1P PNP PNP 4 4 10 (CR) AN LECPA ( AP AN LECPA 6 6 16 16 NPN NPN (FKM) K K 20 10 20 10 AP PNP PNP S S (m) 25 14 25 14 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B 3 3 3 3 15 15 F F C C 5 5 5 20 20 5 ( () R R S S 15 - / P.42

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Confirm the position where the pushing operation starts. a b c d e f g h i j k No.

10

G G 2 x Rc P Width across flats KA E Width across flats KA TX D E E D B C MM MM H1 MB K Width across flats B1 TT ZZ + 2 x Stroke H S + Stroke H + Stroke N F A MA AL H1 Width across flats B1 C B N F A AL 2 x 4 x J K TY e d 10.2 10.2 f h l When the stroke is 1001 mm or longer, a tie-rod reinforcement ring is attached.

Thermo-chiller

(Fluid can be supplied manually for models without option -K if the side panel is removed.)

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

DC () Load Load Load Load Load IS 1.2 k Sensor input: +1 to 5 VDC 7.3 k Auto shift input (Yellow) DC (+) N.C. ISG Pressure is applied to a pressure sensor during the reset operation (a zero point adjustment) as follows: When compound pressure is used: 2.5% F.S. or more. When pressure other than compound pressure is used: 5% F.S. or more.

NCG/CG1

With rod boot Nil J K Without rod boot Nylon tarpaulin Heat resistant tarpaulin Type N A Rubber bumper Air cushion In the case of w/ rod boot, and a foot bracket or rod side flange as a bracket, those parts are to be assembled at the time of shipment.

/

J F H K J (D) F H 2 x P Port size 2 x P Port size Conduit terminal: T DIN terminal: D M N E (N) (M) E C C 25 32 31.5 (44) A A G1/2 L L G1/2 OUT IN OUT IN Applications B B (D) F H (D) F H K J K J 2 x P Port size Cable 6 to 12 2 x P Port size With bracket e a g d Bracket h b i (mm) Model A B C D E F H J K Port size P N.C. 1/4, 3/8 1/2 3/4 1/1 40 52 65 70 22 29.5 36 40.5 20 26 32.5 35 30 37

AC Servo Motor Driver (Network card type ）

SIGNALS AND WIRING 3.8 Interfaces 3.8.1 Internal connection diagram POINT Refer to section 13.3.1 for the CN8 connector. driver Servo amplifier (Note 1) 24 V DC CN3 CN3 Forced stop 2 Approximately 6.2 k EM2 20 3 DOCOM LSP 2 13 MBR RA (Note 3) (Note 2) LSN 12 9 INP Approximately 6.2 k 15 ALM DOG 19 RA (Note 3) Approximately 4.3 k TPR1 10 Approximately 4.3 k 1 TPR2 Isolated 5 DICOM CN3 (Note