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When hysteresis mode is selected: Refer to page 31. When window comparator mode is selected: Refer to page 32. When accumulated output mode is selected: Refer to page 33. When accumulated pulse output mode is selected: Refer to page 35. -30No.PF-OMP0002-H a. When hysteresis mode is selected Set value [P_1] or [n_1] and [the current set value] are displayed in turn.

0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm 3 1 ft -27No.PF-OMP0001CN-F [F 1] OUT1 OUT1 ( )OUT2 0 ON 0 OFF 0 ON 0 OFF -28No.PF-OMP0001CN-F ( )OUT2 3 3 3 3 3 3 ON OFF ON OFF OUT2 -29No.PF-OMP0001CN-F <>OUT1 [F 1] [F 1][oU1] [oU1][] [1ot][] 31

Switching function of [F 0] Flow range, display unit and switch output specifications Page 31 Item Default setting Flow range 3000 L/min Display units 1 L Switch output specifications NPN 1: This setting is only available for models with the units selection function.

Setting of reversed output 1_P/1_N (page 29) * Input of set values Setting of Add/dEC P1AH/n2AH Setting of P1L/n1LP1H/ n1H/H1 (Page 30) Setting of P_1/n_1/H_1 (Page 30) P1dH/n1dH (Page 31) 4 Select display color SoG/ SoR/ Red/ GRN (page 33) 5.

, Rc1/4 RETURN(3) port M5 leakage detection port 30 19 11 23 Part number for sub-base VCC13-S02 02F [Rc1/4] [G1/4] 38.4 Sub-base material is aluminum + hard anodized containing PTFE. 70 0.5 to 2 12 Valve for Water and Chemical Base Fluids VCC Series Dimensions Manifold Pilot port C4: 4 One-touch fitting C6: 6 One-touch fitting G1/4 (RETURN port) G1/4 (IN port) VV2CC1 VVMCC1, VV3CC1 30 31

In the latter case, up to 31 products can be connected. Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 RD RD 3 3 SD SD 5 5 SG SG Controller This product Do not connect any wire to other PIN numbers.

(1) (1) (2) (3) A O B (4) (5) /() 0.2 AB (6) 31 (7) 9. (1)(1.) (2) (3) (4) (5) 18 (1) (2) (3) IP65IP65 2.83.0Nm (4) (5) (6) (7) (8) 0 (1) (1) (2) (3) (4) (1) (2) (3) (4) 19 (1) (2) (3) 10 1. OUT1OUT2 OUT1OUT2 OUT2 OUT2 / +/ ( 8. ) ( 5. ) ( 7-3) 2.ON-OFF OUT1OUT2 ( 3-2-3 ( 4. ) ) 20 3. ( ) ( 8. ( 11-1 ) ) (A) (A): P2240112 4.

25.4 30.7 29.7 29.7 29.7 42.7 42.7 28.7 67.7 67.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 18 7.4 7.4 7.4 7.4 7.4 3 13.6 13.6 19.6 36.6 13.6 MXQ8B 29 13.9 13.9 13.9 13.9 13.9 13.9 4 11.1 11.1 19.1 19.1 38.1 38.1 MXQ12B 16.5 16.5 16.5 16.5 16.5 16.5 16.5 16.5 26.1 20.1 20.1 27.1 27.1 33.1 52.1 52.1 MXQ16B 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 20.6 35 25 25 25 31

Internal parts are broken. 31 - Refere nce Problem Possible cause Solution page 23 29 30 Please confirm the presence of the wound in the cylinder inner wall after cleaning the inside of the cylinder.

Magnet A Magnet B Auto switch A Auto switch B Fig. 13 Auto switch operation principle -31- Maintenance and Inspection Periodic inspection is necessary for optimum use. Generally, annual inspection is recommended for the rotary actuator. Even if no problem is found, seal parts replacement is recommended every three years.

S [S ] 2.S [S ] S S 1 () (0 ) (+) (+) 1 + mm (-) (-) 1 mm 1 mm/s 1 mm/s 2 1 INP mm 1 31 - mm 0mm M (0mm) 100mm 1 M (100mm) (+)(-) 1 1 +(++) 12 2 (+) SW SW SW 12 1. 2. W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 7.3 () 12 1.CW [CW] 2.CCW [CCW] 12 1. [] 2.

CN5I/O .23 6.1 /.23 6.2 /(NPNPNP ).23 (1) I/O (NPNPNP ).23 (2) I/O .23 63 /.24 64 I/O .27 7 .28 71 .28 72 .31 73 .33 8 .34 81 .34 82 .34 83 .35 1 .35 2 (.35 3 .35 84 .36 85 .36 9 .37 91 .37 92 .38 10 .39 101 .39 102 I/O .39 1 .39 2 .40 3 .41 4 HOLD.42 5 .42 2 - 6 .42 7 .43 11 .44 111 [5m ].44 112 [820m].44 113 [5m ].45 114 [820m] .45 115 I/O .46 116 .46 117 .47 12. .48 12.1 .48 12.2 .49 13

P.46 c 31 No.JXC-OMU0004-A 7.2 (1)3 (1) e e (4) [2] i j 3 LED a LED a i j 7 LED f 3 h O g 3 7 LED 0 LED b LED b g h 32 No.JXC-OMU0004-A (4) h NO( 7 LED f 2)7 LED h h *NO NO. 1 2 3 (5 g 7 LED 7 LED f 1 g h * h 4 7 LED f 6 g 2 7 LED f g 33 No.JXC-OMU0004-A (7) i j e 3) g 2 7 LED g j i * 47 e NO. (*) 1 1CW [CW] 2.

Differential input Open collector input 2s or more 2.5V to 4.3V 5s or more 24V 21.6V to 26.4V 5V 4.75V to 5.25V 0V 0.25s or less 0.25s or less 0V to 0.8V 3s or less 5s or moer 3s or less -2.5V to -4.3V 2s or more 16s or more 5s or more 31 - 6.3 The parallel I/O signal is detailed Pin No.

) . 13 (2)DIN(LECGDN1D) . 13 3.4 . 14 (1) . 14 (2) . 14 4. . 15 4.1 (NODE ADDRESS,B RATE) . 15 4.2(CN2SW) . 15 4.3(LEC) . 16 5. . 18 5.2 CN3 . 18 5.3 CN1CONT . 18 5.4 CN2PC/TB . 19 .CN4 . 20 6.1 . 20 6.2 . 20 6.3 . 21 1 - . 22 7.CN3 . 23 8.CN1IF(CONT) . 24 8.1 . 24 8.2 . 26 9.CN2TB/PC . 27 9.1 . 27 10.LED . 28 10.1 LED . 28 10.2IFLED . 28 11. . 29 11.1 . 29 11.2 . 29 11.3 . 29 11.4 . 31

Trouble When the valve is failing, use this flow chart to Possible cause Countermeasures 31 No.VQC1000V-OMM0002-B clarify the cause of the failure and take countermeasures appropriate for the cause. 1. Between valve and base 1-1) Looseness of clamp screw or mounting bolt. Give more torque to clamp screw.

adjustment 20 7-3 Manual switching 20 8.Maintenance and Check 21 9.Caution on Handling 22-23 10.Troubleshooting 24-26 11.Option 27-29 11-1 Pilot valve with output throttle 27 11-2 Fork lever type joint (Type IP8100) 27-28 11-3 External feet back lever (Type IP8000) 28 11-4 Resin Cable cramp unit ( Type non-explosion protection) 28 11-4 Scale plate unit 29 13.How to order 30 14.Attached Drawing 31

Setting method . 27 7.1 Setting procedure . 28 (1) Supply of power . 28 (2) Changes to Manual mode . 28 (3) Stroke study . 28 (4) Test run . 30 (5) Setting of Speed and Acceleration . 30 (6) Completion of setting . 30 (7) Intermediate position setting . 31 7.2 Setting of the speed and the acceleration . 35 7.3 Setting parameters . 36 8.

. / See 2) Origin offset on p.31 Before the positioning and pushing operation, return to origin is necessary to establish the origin. The current position value of the actuator increases if the rod extend (move in the CW direction).

Instructions 2 Model Indication and How to Order 8 Summary of Product parts 10 Definition and terminology 11 Mounting and Installation 14 Installation 14 Piping 17 Wiring 18 Pressure Setting 21 Measurement mode 21 Function Setting 24 Function selection mode 24 Default setting 24 F0 Units selection function 26 F1 Setting of OUT1 27 F2 Setting of OUT2 30 F3 Response time 30 F4 Display resolution 31