Vacuum Saving Valve

(mm) Model M1 M2 L1 L2 L3 L4 H (Width across flats) D W (g) ZP2V-A5ZP2V-A8ZP2V-A01ZP2V-AG1ZP2V-AN1ZP2V-B5ZP2V-B6ZP2V-B01ZP2V-BG1ZP2V-BN1Tightening torque (Nm) Note) M5 x 0.8 M8 x 1.25 R1/8 G1/8 NPT1/8 M5 x 0.8 M6 x 1 Rc1/8 G1/8 NPT1/8 1.0 to 1.5 5.5 to 6.0 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 1.0 to 1.5 2.0 to 2.5 7.0 to 9.0 5.5 to 6.0 7.0 to 9.0 M5 x 0.8 M8 x 1.25 Rc1/8 G1/8 NPT1/8 M5 x 0.8

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

D-X 20Bore size (mm) Cylinder fixing bolt Tightening torque Data Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 0.55 to 0.72Nm M3 10 15 25 2.6 to 3.5Nm M3 0.37 to 0.45 Nm M5 M5 0.54 to 0.64 Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

Environment

R 4 x O1 thread depth R (GH) FH EH M A + Stroke B + Stroke PC L LEPY LEPS Stroke LER 6 x MO thread depth MR XA H9 depth XA LEH LEY -X5 LEY -X5 MH Section XX details 11LEFS ML + Stroke (MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5

Process Gas Diaphragm Valve

A Connections: TW Connections: TW 1.0 (25.4) 1.0 (25.4) 45 45 AP SL M5 x 0.8 depth 0.25 (6.4) (Mounting hole) M5 x 0.8 depth 0.25 (6.4) (Mounting hole) AZ AZ AK Note) MV6 is bar stock body.

3

Cylinder model Hexagon wrench key MKB12-10Z -20Z -30Z MKB16-10Z -20Z -30Z MKB20-10Z -20Z -30Z MKB25-10Z -20Z -30Z MKB32-10Z -20Z -30Z -50Z MKB40-10Z -20Z -30Z -50Z MKB50-10Z -20Z -30Z -50Z MKB63-10Z -20Z -30Z -50Z CQ-M3 x 50L x 60L x 70L CQ-M3 x 50L x 60L x 70L CQ-M5 x 75L x 85L x 95L CQ-M5 x 75L x 85L x 95L CQ-M5 x 85L x 95L x 105L x 125L CQ-M5 x 80L x 90L x 100L x 120L CQ-M6 x 90L x 100L

CY1F

Bore size (mm) Cylinder fixing bolt Tightening torque Bore size (mm) Hexagon socket head set screw Tightening torque 10 15 25 M3 0.55 to 0.72Nm 10 15 25 M3 0.37 to 0.45Nm M5 2.6 to 3.5Nm M5 0.54 to 0.64Nm Enlarged view of stepped part Surface D 3. Be careful about the tightening torque of the hexagon socket head screws.

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

Finger Air Gripper Dimensions (mm) 1in = 25.4mm MHS2-50D, 63D 4-5.1, counter bore dia. 9.5 Counter bore depth SC (mounting hole) RA AA 6.4 AB AC 35 35 RA 5 VA, depth VB YC RB RB NA B XA, depth XB NB Q 4-M6 x 1, thread depth 12 (mounting threads) O 20 20 FX FY FZ (Open DO) (Closed DC) WA, depth WB 4-M5 x 0.8, thread depth 10 Attachment mounting threads CB CA M5 x 0.8 (finger opening port)

Miniature Tubing & Miniature Fittings Series TU/M

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

Miniature Tubing & Miniature Fittings

Model AU ALU ALHU F R Barb fitting M3, M5 M3 M5 Barb elbow Barb one-touch Reducer Removing tubing Withdraw the sleeve straight along the tubing. Use a tool such as long-nose pliers if it is difficult to pull out by hand. 1. Withdraw the tubing straight. 2.

Cylinder

.:, 7 . "" , ,5 M14 XlQ 24 M5XO.8 10 10 16.5 14 6 15.5 6 7 18 2.3 43 15 12 19 10 5.5 30 20 Clevis Mount: CJPD/ Without Auto Switch zz Q S .CD B 2-M5 XO.8 GB Built In flange bushing / / (Except r/i6) ~~~-v : :, ~,-lI ---wCK z ' S z .. ' : -zz. . .. , ..

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

x 0.8 75 09.5 25 2 14.0 37 07.4 M5 x 0.8 07.5 095 05.5 27.5 061 08 20.0 M6 x 1 120 14.0 38 2 18.0 54 12.0 M6 x 1 12.0 160 08.6 40.0 090 12 27.0 M8 x 1.25 160 17.0 60 3 20.5 84 16.5 M8 x 1.25 22.0 220 11.0 50.0 134 16 31.0 NE NG NH NW PA PB PC PD PG Q QW T TT UU YW Z P Model MY3A16 MY3A25 MY3A40 MY3A63 4.0 110 42 30 6.5 7 19 102 4.0 32.5 26 44 43 17.2 8 22.5 M5 x 0.8 Rc, NPT, G1/8 Rc, NPT

Floating Joint

Basic type Flange type Foot type Allowable Model Applicable bore size (mm) Rotating Ambient eccentricity U (mm) Operating pressure angle temperature Standard/Thread nominal size JA6-3-050 JA10-4-070 JA15-5-080 JA15-6-100 JA20-8-125 JA30-10-125 JA40-14-150 JA63-18-150 JA80-22-150 JA100-26-150 JA140-30-150 JA160-36-150 6 10 10, 15 15 20 25, 32 40 50, 63 80 100 125, 140 160 M3 x 0.5 M4 x 0.7 M5

Parallel Type Air Gripper

-40 M8 x 1.25 17.7 16 Max. tightening torque (Nm) Model Screw MHZ2-10 M2.5x0.45 0.49 MHZ2-16 M3 x 0.5 0.88 MHZ2-20 M4x0.7 2.1 MHZ2-25 M5 x 0.8 4.3 MHZ2-32 M5 x 0.8 4.3 MHZ2-40 M6x1 7.3 Note) If auto switches D-Y59, D-Y69, or D-Y7P are used, or the auto switch is mounted to the corner of the body, only a tapped body can be used.

3-Position Rotary Table

x 0.8 M4 x 0.5 M10 x 1 34 132.5 46 50 27.3 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 37 168.5 58.5 63.5 39 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M5 x 0.5 M12 x 1.25 40 184 63.5 69 36.4 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M6 x 0.75 M14 x 1.5 46 214.5 76 78 42.4 66 26.5 5H9

SRP

x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

MHL2

X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) 4-M5 X 0.8 44 (Piston rod and rack screw) 5.5 H M5 X 0.8 18.2 (Finger closing port) 12.4 0.5 9 8 8.4 16.8 15 31 Width across 12.5 A flats 8 (4 locations) (46) 20 15 15 7 Closed 7 7 34 20 10 10 Open G 4-M4 X 0.7 through (Thread for mounting attachment) Model MHL2-10D MHL2-10D1 MHL2-10D2 J 80 108 146 A B C D E F G H 38 54

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

1, @2 and @6 each. 12 MXY12-PS 8-9-11 11 Series MXY Dimensions 2-M5 x 0.8 Piping port J + Stroke Same in case of the type of centralized piping on one side without switch rail ( ) JH Piping port (Plug: M-5P) 2-M5 x 0.8 (Plug: M-5P) 2-M5 x 0.8 Piping port FL 21 21 FH 2-M thread depth MM +0.03 0 Width across flats MB (lock plate fixing bolt) R 4-M thread depth MM PR RL PR +0.03 0 MA (Stroke