Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPTF, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: [Rc (R)] Rc, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: G, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Compatible Fluid: Air / Water / Vacuum / Oil / Gas, Operating Environment: Standard, Type: Air Operating Type, Number of Solenoids: -, Switching Type: Normally Closed, Application: Individual Item, Connection Type: NPT, Plumbing Thread Nominal: 1/2, Tube Flange Nominal: -, Operating Temperature Range(°C): -5～60, Driving Type: Pilot Type, Operating Pressure Difference Range(MPa): -, Orifice
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: H (High Precision Type), Size: 16, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 100mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: R [Robotic Cable, (Flexible Cable)], Actuator Cable Length
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Type: Step Motor (Servo/24 VDC), Lead: B (LEFS16, 5mm; LEFS25, 6mm; LEFS32, 8mm; LEFS40, 10mm), Stroke: 800mm, Motor Option: B (w/Lock), Vacuum Port: R (Right), Positioning Pin Hole: K (Body Bottom, 2 Locations), Actuator Cable Type: S (Standard Cable), Actuator Cable Length: 3 (3m), Controller Type: C
Series LQ3 High Purity Fluororesin Fitting C (E) M L H E C B L 14 20 25 29 37 49 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 10 17 22.5 24.5 27 30 4.8 6 9 10 14 18 3.5 4 5 6 7 8 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3E1A LQ3E2A LQ3E3A LQ3E4A LQ3E5A LQ3E6A M 1/4 L C H (E) Tee Union : LQ3T (mm) Inch Size 2-B Model Tubing O.D.
Enclosure: W (IP67), SI Unit: QA (DeviceNetâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: +COM, Stations: 10 Stations, P, E Port Entry: B (Both Sides 2~16 Stations), SUP/EXH Block Assembly: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting: D (DIN Rail Mounting), DIN Rail Option: 11 (for 11 Stations; Longer Rail than Total Length of Specified
Fluid Nil No L Yes Thread type*1 5 Steam Nil Rc A G B NPT Body material/Port size/Orifice diameter Symbol Body material Port size Orice diameter A Bronze (CAC) *1 The thread type for the main piping and pilot piping is the same. 3/8 11 B 1/2 14 C 3/4 18 D Stainless steel 316L equivalent Pressure type 3/8 11 E 1/2 14 F 3/4 18 Nil Standard H High pressure Other Special Options Special Entry
11-LEFG16-S-200 294 207 280 6 2 200 11-LEFG16-S-250 344 257 330 11-LEFG16-S-300 394 307 380 8 3 300 11-LEFG16-S-350 444 357 430 11-LEFG16-S-400 494 407 480 10 4 400 11-LEFG16-S-450 544 457 530 11-LEFG16-S-500 594 507 580 12 5 500 40 11-LEFG25-S 45 64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10
Flow Rate Range: 11 [2 to 100 (50 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N7 (ø1/4 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)]