4/5 Port Air Operated Valve Series SYJA3000 1

Refer to page 5-2-19 for details. Note 2) [ ]: Denotes normal position. Note 3) ( ): Without sub-plate.

C95

19 M6 M6 M8 M8 M10 M10 M10 X 1.25 M12 X 1.25 M16 X 1.5 M16 X 1.5 M20 X 1.5 M20 X 1.5 12.2 14.2 19 19 23 27 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 15 17 24 24 30 32 4 4 5 5 5 5 30

Fluoropolymer Piping Equipment

Page 4 6 8 10 12 19 1/8" 3/16" 1/4" 3/8" 1/2" Material: Super PFA LQHB LQHB TL TIL TL TIL TL Metric Size TLM TILM TLM TILM P.948 TD TID TD TID TIL Inch Size TH TIH TH TIH Material: PFA 2, 3, 4, 6, 8, 10, 12, 16, 19, 25 TLM Metric Size From page 949 1/8", 3/16", 1/4", 3/8", 1/2", 3/4" 1", 1 1/4" TILM Inch Size 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 4 6 8 10 12 1/8" 3/16" 1/4" 3/8" 1/2" 3/4"

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

x 3.5 through 38 M6 x 1.0 0.5 20 29 8 Rod end nut 10 Flat washer 11.5 6 12 4 4 10 20 27 + Stroke 15.5 29 42.5 + Stroke 10 5 20 5.5 18 Note 3) 2 x 2 x 9 counterbore 2 x 2 x M6 x 1.0 effective depth 10 2 x M5 x 0.8 (Piping port) M5 x 0.8 (Relief port) 5.5 2 x 5.4 through M8 x 1.25 47 1 25.5 10 36 Rod end nut 12 Flat washer 8 15 14 7 7 10 25.5 29.5 + Stroke 18.5 36 48 + Stroke 13 5 25 5.5 19

Precision Cylinder Series MTS

(N) Operating pressure (MPa) Bore size (mm) Operating direction Piston area (mm) Bore size (mm) Standard stroke (mm) 0.2 10 8 23 17 40 30 63 47 98 72 161 121 251 188 0.4 20 15 45 34 80 60 126 94 196 143 322 241 502 377 0.3 15 11 34 25 60 45 94 71 147 107 241 181 377 283 0.7 35 26 79 59 141 105 220 165 343 251 563 422 879 659 0.6 30 22 68 50 121 90 188 141 294 215 482 362 754 565 0.5 25 19

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B B A W A B stroke 6 5 to 30 3.5 0 17 6.5 13 3.5 2.5(5) 17 4.5 5 to 20 17 13 17 10 25 7.5 3.5 20 16 2.5 7.5 20 1.5 0.5 30 19 15 19 (1) 5 27 23 27 10 22 18 22 15 27 23 27 16 8 4 2 8 2 0 B A 20 22 18 22 Bore (mm) 6 10 16 25 27 23 27 (0.5) 6.9 10 30 27 23 27 8.8 14 13.9 19 Note 1) Negative figures

Made to Order

series 11 14 48 8 M20 x 1.5 204 15 19 55 10 M24 x 1.5 242 M24 x 1.5 15 19 57 10 M24 x 1.5 255 (mm) b d ZZ Bore size (mm) 125 140 160 19 66 274 19 66 274 d + Adjustment ZZ + Stroke + Adjustment 22 62 288 1778 Made to Order Common Specifications: Adjustable Stroke Cylinder/Adjustable Retraction Type Symbol -XC9 Dimensions (Dimensions other than below are the same as standard type.)

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

x 1 80 80 Male thread 100 100 Mounting 125 125 M16 x 1.5 Pad type Female thread H Heavy duty Material N S NBR Silicon rubber Urethane rubber Fluororubber U F E EPR 1190 Series ZPT Vacuum Pad: Large/Heavy Duty Type Vertical Vacuum Entry: Without Buffer ZPT H-A14 (Male thread) 40 50 ZPT H-B (Female thread) 40 50 1/8 (Rc, NPT, NPTF) M14 x 1 Width across flats 24 Hexagon width across flats 19

Micro-Mist Separator with Prefilter Series AMH

10 241 90 25 10 241 90 21 10 277 100 30 10 334 150 40 13 13 16 16 19 19 22 22 32 100 63 113 76 119 76 145 90 151 90 166 106 173 106 200 122 253 160 8 12 6 40 66 84 28 5 2.0 27 37 1/4,3/8 172 AMH250 178 1/2 8 12 6 40 66 84 28 5 2.0 27 37 3/8, 1/2 204 AMH350 3/4 210 8 14 7 50 80 100 34 5 2.3 32 37 8 14 7 50 80 100 34 5 2.3 32 37 10 14 9 55 88 110 50 9 3.2 37 37 10 14 9 55 88 110 50 9 3.2 37

PSxx-OMU0005CN

DC12~24V10% DC12~24V10% DC(+) DC(-) 8 DC12~24V10% DC12~24V10% DC(+) DC(-) 9 ( ) 10 11 -72No.PS-OMU0005CN-C No. / / 5m 12 1015 10 SI (kPaMPa) ( ) SI kPa,MPa 13 14 15 16 FUNC 17 -73No.PS-OMU0005CN-C No. 4m 4m FUNC 18 (Er13) 10 10 () 19 ( ) / () -74No.PS-OMU0005CN-C 80mA 7F.S.(3.5F.S.) 1 1 F.S. 1 -75No.PS-OMU0005CN-C ZSE20B() ZSE20BF() ISE20B() 0.0-101.0 kPa -100.0100.0

Compact Electro-pneumatic Regulator Series ITV0000

SUP, VAC port (4, 5/32") OUT 3 2 5 EXH, ATM port (4, 5/32") 38 2-M3 x 0.5 thread depth 3.5 Bracket mounting hole L bracket (optional) Flat bracket (optional) 6-3.5 19 74 2-3.5 19 27 19 64 28 Minimum bending radius 80 Body +50 0 3000 15 35 (30.9) 8.7 4 9.9 Cable connector (4-wire) Straight type (optional) 7 14 Body Cable connector (4-wire) Right angle type (optional) 8.3 4.3 10.2 Minimum bending

TL/TIL

/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 7/8" Basic diameter 4 6 8 10 12 19 3.18 4.75 6.35 9.53 12.7 19.05 25.4 3.18 O.D.

CG5-S

3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5 M10 x 1.25 1/8 85 40 44 to 800 30 27 19 10 M6 x 1.0 12 26 16 23 3 19 13 50 8 47 M6 x 1.0 depth 12 6 14 4 M14 x 1.5 1/8 93 50 55 to 1200 35 32 27 13 M8 x 1.25 15.5 32 20 28 3 21 14 58 11 58 M8 x 1.25 depth 16 7 18 5.5 M18 x 1.5 1/4 109 63 69 to 1200 35 32 27 17 M10 x 1.5 19 38 20 28 3 21 14 58 11 72 M10 x 1.5 depth 16 7 18 7 M18 x 1.5 1/4 109 80

70astamb1

19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

Cylinder with Lock Series CNG

(27) 17 (25) 32 6.5 9.5 3.5 8.5 7 30.5 33 33.5 5 23.5 (33) 17.5 (27) 20.5 (30) 22.5 (32) 21 (30.5) 19 (28.5) 40 11 14.5 8.5 13.5 12 35 37.5 38 10 Dimensions inside ( ) are for long strokes. 15 Cylinder with Lock Series CNG Auto Switch Specifications Lead wire colors inside [ ] are those prior to conformity with IEC standards.

mb1

31 37.5 37.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 4 4 5 5 5 5 Up to 500 Up to 500 Up to 600 Up to 600 Up to 800 Up to 800 19.5 27 32 32 37 37 12.2 14.2 19 19 23 27 4 4 5 9 12 14 15 10.5 11.5 17 6-7-20

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

4 R 3 P 1 30 17 6.5 15 2 2 2 2 2 8 0.5 0.5 P=11 10 M5: M5 thread 2n-M5 4(A), 2(B) port 4 L2 35 L1 38 42 M plug connector (M) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Stations 1 2 3 4 5 n D side U side Direct manual override (Non-locking) 24 15 43 L plug connector (L) n: Stations Dimensions n L 11 12 13 14 15 16 17 18 19

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

Max. 34.4 AS1001F-23-3 AS1001F-01-3 38 4.5 16.8 37.6 1/8" 8.4 38 4.5 16.8 37.6 18 18 3.2 8.4 12.7 12.7 12 8 10.5 AS1001F-04-3 AS1001F-03-3 39.2 5.2 17.4 38.2 35 9.3 39.2 5.2 17.4 38.2 35 5/32" 19 19 4 3.5 9.3 3.5 12 8 10.5 AS1001F-06-3 AS1001F-05-3 6.2 18.5 40.7 6.2 18.5 39.3 36.1 11.4 48.7 3/16" 13.5 16.5 20 24 6 11.6 39.3 36.1 AS2001F-04-3 AS1001F-07-3 40.7 5.2 20.7 48 42.5 12 40.7 12.7

ZL3-OM00801

30-A *x2 17 No.ZL3-OM00801-A ZL3/ZL6 ZS-39-5G ZL3-LW1-N-A 1 1) N NPN P PNP 2 ZL3/ZL6 ZL3-EJ1-H-A 1 2) 1) M 0.35 MPa H 0.50 MPa 4 M4x110 2)1 :0.760.84Nm V * 1 3 ZL3 ZL3-SC1-A 4 ZL3 ZL3-SE1-A 1 2 18 No.ZL3-OM00801-A 5 ZL6 ZL6-SC1-A () * 6 ZL3/ZL6 ZL3-EP1-1 -A 1 1 Rc F G N NP 7 ZL3/ZL6 GZ33-K1K-01-X56 (kPa ) GZ33-K1K-01-X56 (inHg/psi ) * *inHg/psi 8 ZL3 ZL3-AD3-A 19

VH Series, 4 Way Hand Valve

88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-1/4NPT 13.5 4-1/4,3/8NPT VH32 -N02/N03 (Bottom porting) 2 (A) 44 3 (R) 1 (P) 4-1/4,3/8NPT 4 (B) 5 Series VH Body Mount/Dimensions (mm) / Body mount type Dimensions VH40 -N02/N03/N04 VH40 -N06 Scale: 35% 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) 1 (P) 3 (R) 102 88 102 89 46.6 46.6 81 88 94 144 144 97 97 123 135 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19