SMC Corporation of America
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Light/Surge voltage suppressor Electrical entry (2) Manifold base (5) Digital vacuum switch unit 06 ZZX1 R B 21 C 0X ZSE3 D Supply port location Stations 01 1 Unit for replacement Thread type R L Left side Right side Nil F G Rc 1 8 Piping specifications 08 8 B Both sides C Connector (0.6 m) T NPTF Pressure indication System for external vacuum (3) Adsorption confirmation switch unit Output

2 (A) 4 (B) 2 Note) Not applicable to S kit. 1 A Note) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) Coil voltage B: Locking type (Slotted) N.C N.C 12 VDC 5 6 4 position dual 3 port valve (B) 2 position double (metal) 24 VDC Note) (A) 4 (B) 2 (A) 4 (B) 2 B Note) S kit is only available for 24 VDC.

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

OPERATING PRESSURE: 100 PSI .007 B-062-007 B-125-007 .008 B-062-008 B-125-008 .009 B-062-009 B-125-009 .010 B-062-010 B-125-010 .012 B-062-012 B-125-012 .014 B-062-014 B-125-014 .016 B-062-016 B-125-016 .017 B-062-017 B-125-017 .019 B-062-019 B-125-019 .020 B-062-020 B-125-020 .025 B-062-025 B-125-025 .030 B-062-030 B-125-030 .035 B-062-035 B-125-035 .040 B-062-040 B-125-040 Back to Top .

END 1014 Booster Regulator VBA Series Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure from drive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

Momentary MT N.C.type B External N.O.type A Used Used Alternate ALT switch signal N.C.type B Used Used SW N.O.type A Used Used Momentary MT input N.C.type B Used Used N.O.type A Without Alternate ALT N.C.type B intput OFF N.O.type A signal Momentary MT N.C.type B N.O.type A Alternate ALT Stop N.C.type B signal STOP N.O.type A Contact input signal 2 Momentary MT N.C.type B External N.O.type

C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS Pn511.0 8 7 H DEC 9 A B C D E F L EXT1 * * * * 4 5 6 External Latch Signal 1 Pn511.1 7 8 H

VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station

Local Area: (800) 258-9200-www.stevenengineering.com Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

B B B B B B RE A B 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7)

FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Discharge port (FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

(FLUID OUT) Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Diaphragm B Diaphragm A Drive chamber A Drive chamber B Control unit 1.

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

6 AS1211F-M5-06 AS1311F-M5-06 M5 For details about one-touch fittings, miniature fittings and speed controllers (applicable tubing O.D. 2 only), refer to the catalog ES50-25 (B edition or later).

Note 9) : For thread type: NPT only Standard Specifications 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B 1/8, 1/4 1/4, 3/8 Model 1/4, 3/8, 1/2 3/4 3/4, 1 Port size 1/8 Pressure gauge port size Air Fluid 5 to 60C (with no freezing) Ambient and fluid temperature 1.5 MPa Proof pressure 1.0 MPa Maximum operating pressure 0.05 to 0.85 MPa Set pressure

END 5 Booster Regulator Series VBA Working Principle The IN air passes through the check valve to booster chambers A and B. Meanwhile, air is supplied to drive chamber B via the governor and the switching valve. Then, the air pressure fromdrive chamber B and booster chamber A are applied to the piston, boosting the air in booster chamber B.

Type 21P Single base/B mount Common SUP/Common EXH 3 to 12 stations Valve Rc 1 8 M5 x 0.8 Model Manifold type P(SUP), R(EXH) Valve stations A, B port location 1(P), 3(R) port 4(A), 2(B) port Port size Valve (1) effective area (mm2) (Cv factor) 1 4: 0.48, 4 3: 0.85 VZ1120 Socket: 26 pins MIL, with strain relief (Conforming to MIL-C-83503) Applicable flat ribbon cable connector Internal wiring

01 1 station Solenoid on same side of A and B port A port: Rc 1/8 B port: Rc 1/8 Nil P port: Rc 1/8 Thread type R port: Rc 1/8 20 Type S42 Solenoid on same side of A and B port 20 stations Type VK334 Nil F N T Rc S Port size Type VK3140 G P port: Rc 1/8 1 8 01 Rc C6 6 cassette NPT R port: Rc 1/8 NPTF B port: Rc 1/8 A port: Rc 1/8 Common SUP/Individual EXH Type 21: Body ported (A, B port

Note 1) At rated voltage Note 2) Plug-in should be ZNR 3-3-68 5 Port Solenoid Valve Base Mounted Series VZ5000 (2) Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Type of actuation Weight (g) 1 4/2 (P A/B) 4, 2 (A, B) 1, 5, 3 (P , EA, EB) 4/2 5/3 (A/B EA/EB) C [dm3/(sbar)] Grommet 200(120) 240(160) C [dm3/(sbar)] Cv b Cv b Single Double Closed center Exhaust