HRX-OM-O021

Projection is not included. 11 Weight when the circulating fluid and facility water (for water-cooled type) is not included.

HRX-OM-R005

Centigrade(oC) Fahrenheit(oF) 5.13 11 Changing temp. unit 12 Changing pressure unit Pressure unit can be changed.

Programless controller (with stroke study) Step motor (servo 24 VDC)

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F 13 No.JXC-OMU0030-A 3.2 Parts description The detailed descriptions of each part are as follows: (e) (d) (c) No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

16 15 44 10 8 22 42.3 56 M8 X 1.25 M14 X 1.5 146 32 84 17 11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

32 10 15 15 51 8 22 42.3 56 M8 M14 X 1.5 146 30 27 60 11 27 17 84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to

Free Mount Cylinder for Vacuum Series ZCUK

Urethane Material Note 13 Description No.

LECP6_C

(DC24V) DC24V10 (1) 3A 5A 2 (3) 11 () 13 () A/B (800 /) RS485 Modbus EEPROM LED LED/1 I/O 5m 20m 0~40 90%RH ) -10~60 90%RH ) ()FG 50MDC500V 150g() 170g(DIN ) 1 2 3UL UL1310 Class2 11 - 3.2. ( SV1.00 ARX8300073 ()"SV1.00" ON/ ()/ 1 PWR LED() (LED()) () 2 ALM LED() ON/ 3 CN5 I/O (26 ) I/O PLC (11 COM 13 COM ) 4 CN4 I/O (8 ) 5 CN3 (16 ) 6 CN2 (6 ) 7 CN1 5 (DC24V)

IDX-OM-W034

Please refer to 11-6 Electric circuit when option T is included. 12-3How to perform maintenance 12 2 IDFB Series IDX-OM-W034 Air Dryer 13 Service Record 13 Service Record 13-1 Service Record It is recommended to keep a maintenance/service record. Parts No.

A

13 90 3.2 90 NAL6000 95 268 45 95 70 66 35 11 13 90 3.2 95 Courtesy of Steven Engineering, Inc. !

HRX-OM-W032

Blue (DC COM) 11 Terminal No. Black (Output 1) 3 Terminal No. Black (Output 1) Fig. 3-10 Wiring of the external switch (NPN open collector output) (example) Flow switch Blue (DC COM) Brown (24 VDC) Brown (24 VDC) Terminal No. 14 Terminal No. 6 Flow switch Blue (DC COM) Terminal No. 13 Terminal No. 3 Black (Output 1) Black (Output 1) 11 Terminal No.

Step Motor Driver （ Pulse input type ）

Product Outline . 7 2.1 Product features . 7 2.2 Product configuration . 8 2.3 How to Order . 9 2.4 Option . 10 (1) Actuator cable (5m or less) . 10 (2) Actuator cable (8-20m) . 10 (3) Actuator cable for with lock (5m or less) . 11 (4) Actuator cable for with lock (8-20m) . 11 (5) I/O Cable . 12 (6) Controller setting kit . 12 (7) Teaching box . 13 (8) Noise filter set . 14 (9) Current limiting

CEx-OMQ0011

OUTPUT 35 9-3-5. 36 10 3744 11 11-1. 11-1-1. 45 11-1-2. 4548 11-1-3. 48 11-2. 11-2-1. 4952 11-2-2. 53 11-3. 11-3-1. 53 12 12-1. 54 12-2. 54 13 13-1. 5557 13-2. () 5758 14 14-1. 5960 - 1 1 1 1 (ISO/IEC)(JIS) 1) 2) *1) ISO 4414:Pneumatic fluid powerGeneral rules relating to systems ISO 10218-1:2006Robots for industrial environments-Safety requirements-part1

Manifold Specifications

16 12.5 15.5 12.5 15.5 12 15 (mm) 11 12 13 14 15 16 17 18 19 20 485.5 475 458 14 Stations (Station n)(Station 1) L1 310.5 335.5 348 373 385.5 410.5 423 448 473 L2 300 325 337.5 362.5 375 400 412.5 437.5 462.5 L3 287 306 325 344 363 382 401 420 439 L4 12 15 11.5 14.5 11.5 14.5 11 14 17 VV5Z5-45Station U-C4C C6C (Pitch) Separation lever (mm) 2 123 112.5 97 13 3 148 137.5 116 16 4 160.5 150

Compact Cylinder

Rod End Nut CZ 8 10 10 CX 9 11 13 CT 9.5 11 14 CR 5.3 6.4 8.4 CL 26 42 54 Part no. MU-C02 MU-C03 MU-C04 Double clevis socket material: Cast iron Surface treatment: Painted MM Note) Double clevis socket is available for sizes from 25 to 40. (mm) MM M8 x 1.25 M12 x 1.25 H 5 9.6 B 13 22.2 C 15.0 21.9 D 12.5 18 Part no.

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 NBR NBR NBR NBR NBR NBR 1 2 3 4 5 6 7 8 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer MYN-11 MYN-16 VQZ110QVV71-FPG 5 Series VQ7-6 Manifold Series VV71 How to order Manifolds VV71 6 02D 02R Stations Air release valve coil rating 1 station 1 None 100VAC 50Hz/60Hz 200VAC 50Hz/60Hz 24VDC 12VDC

Environment

Note 11) The maximum instantaneous power consumption (including the controller) is for when the actuator is operating. This value can be used for the selection of the power supply. Note 12) With lock only Note 13) For an actuator with lock, add the power consumption for the lock.

LEH_C

/LEHZ .10 2.1 LEHZ () . 10 2.1.1 . 10 2.1.2 . 11 2.1.3 . 12 2.2 LEHZJ () . 13 2.2.1 . 13 2.2.2 . 14 2.2.3 . 15 2.2.4 . 16 3./LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

R 32 DS5032 45 14 34 3.3 11.5 32.5 3 5 5.5 22 10 30 10.5 6.6 10 11 17 40 DS5040 55 16 40 4.3 12 38 4 5 5.5 25 10 35 11 6.6 12 13 20 50 DS5050 65 21 45 4.3 14 46.5 4 5 6.5 27 12 40 15 9 16 18 22 63 DS5063 75 21 51 4.3 14 56.5 4 5 6.5 32 12 45 15 9 16 18 25 80 DS5080 95 25 65 4.3 16 72 4 5 10 36 16 45 18 11 20 22 30 100 DS5100 115 25 75 6.3 16 89 4 5 10 41 16 55 18 11 20 22 32 * Supplied with

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

14 2.8 depth 8.4 8 PF2M701/702/705/710/ 725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 2 x P PF2M701/702/705/710/ 725/750L-F1(-L) 84.4 13 14 2.8 depth 8.4 PF2M711/721L-02(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-N2(-L) 88 13 17 2.8 depth 6.2 PF2M711/721L-F2(-L) 88 17 21 2.8 depth 6.2 20 PF2M7(-L) Series Dimensions 76 A PF2M7mS-C4/C6/C8/N7(-L) 76 A 68 68 58 58 48 48 18 18 OUT1 OUT2 OUT1 OUT2 DC(

High Purity Fluoropolymer

Applicable tubing size Connection tubing size Class 1 2 3 4 5 6 Symbol Connection tubing size Class 1 2 3 4 5 6 Symbol Inch sizes Metric sizes Class 03 05 07 11 13 19 25 03 04 06 08 10 12 19 25 1/8" x 0.086" 3/16" x 0.127" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" 1" x 0.886" 3 x 2 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 25 x 22.5 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15