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HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 Note 2) M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order.

Introduction. 1-1 1.1 Outline .1-1 1.1.1 List of Models Compatible with the SMC VLS software . 1-1 1.1.2 Product Configuration. 1-1 1.1.3 Major Features of the ECC-PNAL-PCS/WIN-E Software. 1-1 1.2 Definitions.1-2 1.3 Abbreviations.1-2 2. Installation . 2-1 2.1 Operating System Requirements.2-1 2.2 Installation.2-1 2.3 Uninstallation .2-1 2.4 System Configuration .2-2 3.

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

01 1/8" 03 5/32" 07 1/4" 09 5/16" 11 3/8" 13 1/2" -X214 Restrictor (Without check valve) 04 4 06 6 08 8 10 10 12 12 With One-touch fittings Example) AS2002F-04A-X214 10Clean Series Example) 10-AS2002F-04A 1 For selecting applicable tubing O.D., refer to the Model shown above. 2 Use 1/8" tubing. *1 Fluorine grease is used. *2 The cleanliness class (ISO class) is 5.

L1 L2 L3 L4 L5 L6 L7 L8 D Model Bore size ASS AS2000-01 AS2000-02 AS3000-02, 03 1 8 Rc Rc Rc , 40 40 56 30 30 45.5 5 5 5.25 17 23 25 10 11.5 13.2 15.5 17 20.6 54.5 56 68 50 51.5 61 16 20 26 4.5 4.5 5.5 1 4 1 4 ASR Effective thread depth 6 8 3 Dimensions: AS5000 ASF 2-1/4 to 1/2 2-M4 x 0.7 Effective thread depth 7 15-9-31

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.

N.O. 1 (P) 3 (R) 1 (P) 3 (R) a c e d a c e d (A) (A) 2 2 g g 3 (R) 1 (P) 3 (R) 1 (P) b b f f Component parts Replacement parts Note Zinc die-casted No.

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

C D F J K ARP20(K) 1021 1021 1021 2 Note 2) 40 1/8 98 27 28.5 M28 x 1 28.5 1/8, 1/4 ARP30(K) 2.5 1/8 53 117 29 29.5 M38 x 1.5 29.5 1/4, 3/8 ARP40(K) 1 1/4 70 148 41 34 M42 x 1.5 34 1/4, 3/8, 1/2 Optional specifications Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) H J H J M N Q R S T U V W Y 27.8 1021 1021 1021 44 40 69 30

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

series 02 03 04 06 10 12 14 20 Caution L (2) Note 1) AS800 is available as special.

E C Padlock mounting position C D D SUP SUP. A OUT IN A OUT IN 1 2 3 B B EXH. EXH. H 28 30 36 44 54 G 33 42 44 50 61 F 45 55 58 65 76 E 22 21 26 D 34 46 63 67 78 C 40 53 70 75 90 B 20 29 39 42 53 A 59 78 107 110 134 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 3

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 1999 SMC CORPORATION All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing November, 1999 D-SMC.L.A. P-80 (YG)