Process Pump

1/8" 10 PA PB (270) 249 AIR SUP Rc, NPT, G 1/4" FLUID OUT Rc, NPT, G 3/4" 195 166 157 82 110 51 18 FLUID IN Rc, NPT, G 3/4" AIR EXH Rc, NPT, G 1/4" Silencer: AN20-02 (Option) Tube extension: PAF5410P19 P19N P19F 204 10 255 120 4 x 9 (270) 249 43 AIR SUP Rc, NPT, G 1/4" 10 Reset button Air operated reset port Rc, NPT, G 1/8" (19.05) (15.85) FLUID OUT 3/4" tube extension Straight part 40 82

Profile Design ISO/VDMA Air Cylinder Series CP95

Bore stroke 32 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 700 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500 800 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600 1200 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 450, 500, 600, 700, 800 1400 100 25, 50, 80, 100, 125, 160, 200,

Information

35.3 oz (1000 g) 1 If the system comprises of both CC-Link Ver. 1.00 and Ver. 1.10 compliant cables, Ver. 1.00 specifications are applied to the cable extensions and the cable length between stations. 2 USB communication and RS-422 communication cannot be performed at the same time. 7 Series LECSm Specifications Series LECSS LECSS1-S5 100 LECSS1-S7 200 LECSS2-S5 100 LECSS2-S7 200 LECSS2-

Ionizer

85% Rh (No condensation) Ambient temperature Ambient humidity Case material Vibration resistance Shock resistance Weight Installation distance Compliance with overseas standards/directive ABS Durability 50 Hz Amplitude 1 mm XYZ each 2 hours ABS ABS, Stainless steel Static Neutralization Equipment 10 G 220 g (Including cable weight) 110 g (Including cable weight) 200 g (Including cable weight

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

Thread type Rc G NPT Nil F N Voltage 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Series Symbol Port size Consult P/A regarding other voltages. 300 200 M5 01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G Grommet Orifice size N.O. Orifice size mm N.C.

Table of Contents - Tubing

200 LX5 + 200 LX3 + 200 LX5 + 200 LX3 + 200 1 2 3 1 2 3 1 2 1 2 1 2 3 to 90 3 to 90 3 to 63 3 to 90 3 to 66 3 to 44 3 to 90 3 to 40 3 to 45 3 to 35 3 to 35 3 to 30 4 2.5 6 4 8 5 10 6.5 12 8 B (Black), W (White), R (Red), BU (Blue), Y (Yellow), G (Green), C (Transparent), YR (Orange) L* is calculated by the number of coils (N) x O.D. 10Clean Series (Example) 10-TCU0425B-1 TUB-11 Polyurethane

HRX-OM-Y098

A 20 HRL Cooling capacity CH1 CH2 100 9 kw 1 kw 200 19 kw 1 kw 300 26 kw 1 kw Cooling method A Air-cooled refrigeration Piping thread type Nil Rc F G (Rc-G thread adapter set is included) N NPT (Rc-NPT thread adapter set is included) Power supply 20 3phase AC200V(50Hz) 3phase AC200-230V(60Hz) Option Nil CH2 Electric conductivity control D1 CH1,CH2 Electric conductivity control Fig. 2-1 Product

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

D-G

MLGP

Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5

MLGP

Dimensions A, DB, E: MLGPL (Ball bushing bearing) Dimensions A, DB, E: MLGPM (Slide bearing) A E A E Bore size (mm) 131 141.5 144.5 Bore size (mm) 115 128 131 DB DB st 50 50 < st 200 200 < st 350 200 < st 350 20 25 25 st 50 50 < st 200 74 89 84 st 50 50 < st 100 100 < st 200 200 < st 350 16 20 20 st 50 50 < st 100 100 < st 200 200 < st 350 74 89 84 40 50 63 40 50 63 31 34.5

HEC_001W-E

Heating/Cooling Ratio Setting range : 10 to 999% Min. increment : 1% Indicated content : Heating/cooling gain ratio(Ex. : 200%) Function: Sets output ratio of cooling to heating to compensate difference of gain between them. H e a t i n g / C o o l i n g R a t i o M O D E < 2 0 0 % 8. Overload Judging Temp.

VQ20/30

Combination screw M3 Conduit terminal View A-A (Internal connection diagram) Class H coil: AWG18 Class B coil: AWG20 (1) SMC (2) Wiring conduit Seal (VCW20-15-6) Port size G 1/2 Tightening torque 0.5 to 0.6 Nm Rated voltage Lead wire color (1) (2) Black Red DC Blue Blue 100 VAC Red Red 200 VAC Gray Gray Other AC There is no polarity. Description Part no.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

DO Without connector Do not replace V111 (G, H, L, M, W) to V115 (DIN terminal) and vice versa when replacing pilot valve assembly only. 18 Series SYJ500 Body Ported [ ] for AC Grommet (G), (H): SYJ52G H -M5 With bracket: SYJ52G H -M5-F G: Approx. 300 H: Approx. 600 (Lead wire length) 55.6 [57.8] 37 M5 x 0.8 (A port) 33.5 2-3.5 (For mounting) 30 3.5 15.5 2.5 15 11 A 18 25 + Manual override

Table of Contents

Single vane type Double vane type , , 0 -5 Chamfer 0 +4 0 9 a 0 a r r n n e n n g g g o o e e n i i 0 t t 1 a a 2 a 8 r t 1 t 7 +4 0 o o 0 0 n R R +4 0 +4 0 e o 0 i g t a 9 n t a o e r R g n n o a ti r a n t o o ti R a t o R Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer. +5 0 +

Rubber seal 5 Port Solenoid Valve Series SYJ7000

300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm 51 Series SYJ7000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ7120-01 With bracket: SYJ7120-01-F 44 36 2-4.5 (For mounting) 4 26 34 + G: Approx. 300 H: Approx. 600 (Lead wire length) 82 [84.2] 59.8 24.1 28.3 39.5 [46.5] 13 B A 3 Manual override 2-3.2 (For manifold mounting) 35 17 1/8 (A, B port)

CV/MVGQ

C D T U 200 VAC (50/60 Hz) 24 VDC CY Action Light/Surge voltage suppressor MQQ M Single acting, Spring return Single acting, Spring extend None With surge voltage suppressor With light/surge voltage suppressor (Except Type G) Nil S Z S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

225 237.5 L3 88 104 120 136 152 168 184 200 216 L4 17.5 15.5 14 12 16.5 15 13 17.5 16 [47.9] R 41.9 34.5 29 22.4 19.1 Manual override (non-locking) (7.5) (DIN rail dimension) Manual override In case of locking type, ( turn after pushing in. ) U side G: Approx. 300 H: Approx. 600 lead wire length ( ) D side (L4) L3 DIN rail release button 2n1-Rc(PT) 1/8 (ports A, B) DIN rail holding screw

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

CL

(The lock-up cylinder can operate at 50 to 200 mm/s.)

51

Calculation: (Example) CDG3BN40-150 Standard mass of movable parts: Table (2) Rod end [Basic], Bore size [40] 121 g Additional mass: Additional mass of stroke 61 x 150/50 = 183 g 183 g Switch magnet 13 g Total 317 g Construction With rubber bumper o r !0 t !2 q y e !1 i u w Contents Replacement Parts/Seal Kit Note No.