Plug-in/Plug Lead: Single Unit

Note2) For thread standard, refer to page 2-6-39.

IDX-OM-M050

6 2 6 . 3 Outer dimensions . 6 3 6 . 4 Electric wiring diagram . 6 6 6 . 5 Pneumatic and refrigerant circuits and their functions . 6 8 6 . 6 Consumable parts and regular maintenance parts . 6 9 Chapter 7 Service Record 7 . 1 Service Record . 7 1 Table of Contents -2 IDX-OM-M050 Air Dryer i Safety Instructions Safety Instructions Before using the product be sure to read and understand all

S Couplers Series KK/KKH/KK13

KK2P-23E -04E -06E KK3P-04E -06E -08E -10E KK4P-06E -08E -10E -12E KK6P-12E -16E KK2S-23E -04E -06E KK3S-04E -06E -08E -10E KK4S-06E -08E -10E -12E KK6S-12E -16E 3.2 4 6 4 6 8 10 6 8 10 12 12 16 3.2 4 6 4 6 8 10 6 8 10 12 12 16 M5 M5 1/8 1/8 1/4 1/4 1/2 1/2 166 S Couplers Series KK Specifications K M Fluid Air, Water KK2: 100 kPa to 1 MPa KK3: 90 kPa to 1 MPa KK4/6: 0 to 1 MPa H Operating

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

9 @0 @1 @2 @3 @4 @5 @6 @7 @8 @9 Note No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !

C76

6 !7 !

C76

6 !7 !

HRX-OM-M005

Alarm Display screen (Alarm message) Figure 6-1 Error Occurrence HRZD Series 6.1 Error Message 6-1 HRX-OM-M005 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types.

Tamper Proof and Flat Head Screw

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Models Metric sizes 10, 12 8 6 6 6 8 12 10 3.2, 4, 6 4 Tubing O.D.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

9.5 9 9.5 9.5 9.5 D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 3 5 5.5 6 6 7 D-A7/A80 D-A7H/A80H D-A73C/A80C 12 12 12 11 10 D-A79W D-F7/J79 D-F7V/J79C D-F7W/J7WV D-F7BAL/F7BAVL D-F79F/F7NTL 13 13 13 14 14 6 5.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

OMU0023

Safety Instructions . 4 2.1 Purpose of the Operation Manual . 6 2.2 Notation . 6 2.3 Abbreviations . 6 3. Scope . 7 3.1 Scope . 7 4. Hardware Specifications . 9 4.1 Input Specifications . 9 4.2 Communication Connector Pin Assignment . 9 4.3 Communication Circuit . 9 4.4 Wiring Examples . 10 5.

Compact manifold regulator ARM5 Series

side OUT side Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y Fitting size Straight R Elbow S Elbow T Elbow U Straight V Elbow W Elbow X Elbow Y 4, 5/32 2.5 6 11 35.5 2.5 6 11 35.5 4, 5/32 2.5 6 11 37.5 2.5 6 11 37.5 6 3 6.5 11 36 3 6.5 11 36 6 3 6.5 11 38 3 6.5 11 38 1/4 6.5 6 11.5 38.5 6.5 6 11.5 38.5 1/4 6.5 6 11.5 40.5 6.5 6 11.5 40.5 710 Regulator/

Modular F.R.L. Unit

Features 5 Feature 6 F.R.L.

Electric Actuator

supply connector Servo motor power connector CN1 CN2 6 156 168 CN3 CN6 CN2 CN4 Battery 6 Battery included.

CG1

6 !7 !8 !

HRX-OM-T002

Option . 6-1 6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 HRS090 Series HRX-OMT002 Contents 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm

SZ3000

Note Description C6 C8 SZ3000-50-1ASZ3000-53-1A SX3000-113-1 SZ3000-114-3A SZ3000-114-1A VZ1000-11-1SZ3000-40Supply/exhaust block assembly C6: with 6 One-touch fitting, C8: with 8 One-touch fitting 1 End block assembly 2 Housing holder 3 Bushing assembly 4 Bushing assembly 5 Refer to page 6. DIN rail 6 Refer to the connector block assembly part no. table below.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

7 5.5 10 8.5 4 14 2.5 12.5 8 6.5 10.5 9 15.5 14 4 2.5 7.5 6 7 5.5 12 12 6 16 6 16 10 10 12.5 12.5 17.5 17.5 6 6 9.5 9.5 9 9 Note) Adjust the auto switch after confirming the operating condition in the actual setting.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

linear scaled Channel parameter Channel 0 to 1 0..2 (Ch0 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA

/

Model Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC VXE21 0 1 2 3 VX021N-12A VXE22 0 2 3 4 VXE23 0 2 3 4 VX022N-12A VXE22 0 5 6 VXE23 0 5 6 VX023N-12A-L Dimensions P. 17 (Single unit) 8 Series VXE21/22/23 For Oil /Manifold Fluid and Ambient Temperature Solenoid Valve for Manifold/Valve Specifications N.C.

Compact Cylinder Series CQS

6 4 4 0 0 19 6 2 2 (4.5) 2 25 7.5 7.5 2.5 10 10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.