Movement Speed Position Acceleration Deceleration Force Value Area 1 Area 2 In pos force speed force mode mm/s mm mm/s2 mm/s2 mm mm mm mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0.1 (E.g.) Flow chart Controller (1) Select/input Step No.1.
1 42 1 0 1 0 1 0 42 1 0 1 0 1 0 43 1 0 1 0 1 1 43 1 0 1 0 1 1 44 1 0 1 1 0 0 44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1
43 45 13.5 Electrical entry Grommet Conduit Conduit terminal Port size P Model Q R Q R Q R S DIN terminal S 79.5 79.5 82 82 T 100 (106.5) 108 (114.5) 119 (126) 125 (131) Q 50 50 52.5 52.5 R 57.5 (64) 62.5 (68.5) 70.5 (77) 73.5 (79) 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 67 67 69.5 69.5 55.5 (62) 60.5 (66.5) 68.5 (75) 71.5 (77) 55 55 57.5 57.5 29.5 29.5 32 32 63.5 (70) 68.5
MOD mm/s mm mm mm mm/s 2 mm/s 2 % % mm/s % mm 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 (1) Select/input Step No.1 (Turn on IN0) Controller (2) Turn on DRIVE input Parallel I/O signal Start moving to the position of Step No. 1 Signal Category Step No. output (OUT0 to 5) turns off (2)(5)(10)(13) DRIVE (3) INP output turns off (
0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57 1 1 1 0 0 1 58 1 1 1 0 1 0 58 1 1 1 0 1 0 59 1 1 1 0 1 1 59 1 1 1 0 1 1 60 1 1 1 1 0 0 60 1 1 1 1 0 0 61 1 1 1
44 1 0 1 1 0 0 45 1 0 1 1 0 1 45 1 0 1 1 0 1 46 1 0 1 1 1 0 46 1 0 1 1 1 0 47 1 0 1 1 1 1 47 1 0 1 1 1 1 48 1 1 0 0 0 0 48 1 1 0 0 0 0 49 1 1 0 0 0 1 49 1 1 0 0 0 1 50 1 1 0 0 1 0 50 1 1 0 0 1 0 51 1 1 0 0 1 1 51 1 1 0 0 1 1 52 1 1 0 1 0 0 52 1 1 0 1 0 0 53 1 1 0 1 0 1 53 1 1 0 1 0 1 54 1 1 0 1 1 0 54 1 1 0 1 1 0 55 1 1 0 1 1 1 55 1 1 0 1 1 1 56 1 1 1 0 0 0 56 1 1 1 0 0 0 57 1 1 1 0 0 1 57
Bore size (mm) 40 50 63 80 100 Without rod boot With rod boot ZZ 201 208 217 245 253 W RS H A l 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke 1/4 stroke h 59 66 66 80 81 f 11.2 11.2 11.2 12.5 14 e 43 52 52 65 65 ZZ 209 216 225 254 262 H 51 58 58 71 72 8 8 8 0 0 RZQ MI W S CEP1 Axial Foot Style: CVS1L CE1 Lube type (CVS1L), Non-lube type (CVS1LN) CE2 ML2B With rod boot Width across flats B1
Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable
Baud Rate B a u d R a t e M O D E < 1 2 0 0 b / s Setting range : 600, 1200, 2400, 4800, 9600, 19200b/s Indicated content : Baud rate (Ex. : 1200b/s) Function : Sets baud rate for communication. 3.
M 0.35 MPa S 0.45 MPa H 0.5 MPa Refer to Table (1) for selection of standard supply pressure and nozzle diameter.
(A) 2 1/8 1/4 4.2 12 1 (P) 3 (R) VPA500 N.O. Base mounted Body ported (A) 2 1/4 3/8 12 P. 25 8.9 1 (P) 3 (R) VPA700 For vacuum N.C./N.O. (A) 2 3/8 1/2 15.3 12 Air operated valve 1 (P) 3 (R) VPA300 N.C. (A) 2 12 1/8 1/4 3.8 1 (P) 3 (R) N.O. (A) 2 12 VPA500 1 (P) 3 (R) 1/4 3/8 P. 30 8.8 For vacuum N.C.
IIIB OA DB IOL lou DC OX iDE .1 00 DS OH Z ODHIl ": ~ 46 , 31 1 21 18 5 3a , 2' 1 51 l a.5 6.6 If 7 32 1184 lO ' ;~ 52 35 ,24 I 22 15.5 41 21 i 54 16.5 6.6 11 9 ' 36 l a, J:!'
s NVZ3000 Symbol With Subplate Body porled Vpe Base mounted type with subplate NVZ3r20 NVZ340 Cv0.25 1 1 / l \ l h u d l / l \ L E l ff NVZ32?
N P FD FT FX FZ H zz I h 22 1 3 6 (3s) 3 . 1 9 (81) 2.76 (70) 2.05 (52) o.79 (20) 1.57 (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) MAx1.25 024 l7t M18x1.5 1 . 1 4 (30) 3 5 4 (90) 2 7 6 (70) 0 3 5 ( s 0 ) (.12) 3.54 (90) 1.97 (50) 4.33 ( 1 1 0 ) 2.28 (54) 6 3 0 o60) 205 (52) 11 2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l
s NVZ3000 Symbol With Subplate Body porled Vpe Base mounted type with subplate NVZ3r20 NVZ340 Cv0.25 1 1 / l \ l h u d l / l \ L E l ff NVZ32?
For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315
For subsonic range Where P1 + 0.1013 = (1 to 2) (P2 + 0.1013) Formula based on Cv factor Q = 197.8Cv P (P2 + 0.1013) kg/h Formula based on effective area Q = 11.0S P (P2 + 0.1013) kg/h [650] (133) 0.2 [646] (120) 0.1 S = 2.8mm S = 5.9mm S = 9.2mm S = 11.7mm S = 6.3mm S = 9.7mm S = 14.4mm S = 10.8mm S = 15.3mm S = 24.8mm Flow rate Q kg/h VCS212 VCS213 VCS214 VCS215 VCS 13 VCS314 VCS315
Value Description Configuration Value Unit Range 0-2 Unavailable 0 Target Position [m] Note 1) 1 Note 1) 1 PositioningsTime [s] 0.01 0 to 60 2 Speed [mm/s] 1 0 to 400 3 Acceleration [mm/s2] 1 0 to 60 4 Deceleration [mm/s2] 1 0 to 60 1 to 20, 5 PushingSpeed [mm/s]Note2) 1 32768 to 32788 6 Thrust Setting Value Note 3) 0.1 More than 1Note 3) Step Data No. 1 7 Load Mass [g] 50 0,50,100 3 (Step
Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.
Output voltage (Rated pressure range) Linearity Output impedance 1% F .S. or less Approx. 1 k 4 to 20 mA 2.5% F.S.