Plug-in/Plug Lead: Single Unit

Note 2) Refer to page 2-6-39 for details on external pilot specifications.

Electric Actuator Miniature Rod Type Miniature Slide table Type

This matches the controller. (2) Check Parallel I /O configuration matches (NPN or PNP). (1) LEPY6J-50 NPN (2) 10 - 2.3 Construction 7 1 4 6 9 14 13 12 2 3 11 5 10 8 Parts list No.

Compact manifold regulator ARM5 Series

Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN

HRX-OM-M005

Pump ECO Limit 5.3 Operation Screen HRZD Series 5-6 HRX-OM-M005 Chapter 5 Product Operation 5.3.4 CH1(2) setting data screen 1, 2 1 2 Figure 5-7 CH1(2) Setting Data Screen 1 3 4 5 6 Figure 5-8 CH1(2) Setting Data Screen 2 Table 5-6 CH1(2) Setting Data Screen 1, 2 No.

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

SYJ300/500/700

(For details, refer to page 4-4-11.) 4-4-6 7 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ300 Construction (A) 2 (A) 2 N.C.

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

2 !3 !6 !7 !

Mist Separator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: 2 Semi-standard: Piping port Piping port (4) Part No. thread ty pe (4) Part No. thread ty pe Rc Rc AD37-2-A AD37-D G G NPT AD37N-2(Z)-A NPT AD37N(-Z)-D Appearance and part No.

10

2 !1 et y u o !0 q !6 r RJ10, 14, 2015, 2725 w i !2 r !3 !1 q e t y u o !0 !6 Component Parts No. Material Treatment Description No.

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

2 !6 !9 !5 @1 !3 !0 !1 80, 100 80, 100 @2 Component Parts Replacement Parts/Seal Kit (Single rod) Bore size [mm] Kit no. Contents 32 CK95-32 No.

Multi-Axis Step Motor Controller

0 MOT z Motor power connector (6 pins) !1 ENC x Encoder connector (16 pins) Axis 2: Connect the actuator cable. !2 MOT x Motor power connector (6 pins) !3 ENC c Encoder connector (16 pins) Axis 3: Connect the actuator cable. !4 MOT c Motor power connector (6 pins) !

CJP

Mounting nut (Refer to page 6-2-13.)

CJP

Mounting nut (Refer to page 6-2-13.)

LEH_C

4 4 10 10 PNP PNP 1P 1P 6 6 20 20 AN LECPA () AP AN LECPA NPN NPN 32 8 32 8 PNP AP PNP 40 12 40 12 (m) 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B F F 3 3 3 3 15 15 C C 5 5 5 R 20 20 R 5 ( () R R S S / P.42 7.3 <> (NPNPNP) LEHS10K3-4 NPN 6 - 4.3 3 8 2 5 1 4 7 6 1 2 3 4 5 6 7 8 ( DC24V) 7 - 5. 5.1 I/O LEC-CN5-* PLC DC24V 2) CN5 1) CN4 LE-CP-*-* () LE-CP-*S-* () CN3 CN2

Auto Switch Guide

Water Resistant 2-color Indication Type P. 6-16-50 Band, Rail, Tie-rod, Direct Mounting With Timer P. 6-16-55 Band, Rail, Tie-rod, Direct Mounting Magnetic Field Resistant 2-color Indication Type P. 6-16-58 Rail Mounting Wide Range Detection Type P. 6-16-59 Band Mounting Made to Order Specifications P. 6-16-60 NCA D-X 20Data Technical Data 1, 2 P. 6-16-63 6-16-1 2 SMC Auto Switch

Large Size Vacuum Module: Series ZR

Filter block Nil 30 50 0.6 m 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m (Output specifications: A, B, C, D, E, F) Gasket groove 3 m 5 m 3 4 953 D Series ZR Pressure Switch for Vacuum + Suction Filter Unit: ZR1-F Dimensions: ZR1-F Circuit diagram 2 x Slitted hole (Mounting hole)1 2 2 2 Indicator light (Red) ZR1-FE 10 10 23 2 x 4.5 43 Vacuum pressure setting

Micro Mist Separator

C Note 1) C Note 1) Option symbol 2 Semi-standard symbol 6 Semi-standard: Semi-standard: 2 Piping port Piping port (4) Part No. (4) Part No. thread ty pe thread ty pe Rc Rc AD37-D AD37-2-A G G NPT AD37N(-Z)-D NPT AD37N-2(Z)-A Appearance and Semi-standard: 6 part No.

VQ5000

Note 2) Refer to page 2-6-39 for details on external pilot specifications.

Rotary Actuator/Vane Style Series CRB2

C1=C (mm) D1= Y L2 max D2 Size (mm) 10 L1 max X D1 Size 2 to 8 Y-1 3 C1 L1= 10 15 4 to 14 X-3 3 3 to 9 Y-1.5 3 to 4 Y= C2 L2= 15 20 5 to 18 X-4 3 to 4 3 to 10 Y-1.5 3 to 5 X= D2= 20 30 6 to 20 X-4.5 3 to 5 3 to 13 Y-2 3 to 6 C2=C 30 40 6 to 22 X-5 3 to 6 6 to 15 Y-4.5 3 to 8 Symbol: A7 Symbol: A8 The short shaft can be further shortened by machining it into a stepped round shaft with male

Step Motor Driver （ Pulse input type ）

circuit 3 Motor power shutdown(Stop relay contact(2) 28 6.