CXS

8 @2 @6 !4 !2 @4 @5 !5 t !5 t r !9 !8 @2 w !4 !2 !0 !0 !6 !6 i u !7 o i u !7 o MX MTS MY CY !3 y !1 e q !3 y !1 q @7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CXSJM20 to 32 CXSJL20 to 32 CX @5 i u !7 o !5 t !6 r !9 !8 @2 r !9 !8 @2 !6 o i u !7 !

IDU/IDF

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

•

e J1IS1Jr1aces, 15 105 tID 115 Same surface) With I pL 41 11 5+40~ With n pes. 2 15+40(1\ 2 2) 105 + 40[0 2 4) 110+40!n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O2) 8S+30~ 90+30~ 2 2 (n::: 2, 4, 6, 8) WiIh n pcs (n = 4, 8, 12, 18 ..)

MK

-www.stevenengineering.com D-M9 D-F9W W D-M9V D-F9WV Hs Hs D-F9BAL Hs Hs D-A9 D-A9V D-M9, D-F9W D-M9V, D-F9WV Auto switch model W 19.5 21.5 B 4.5 4 A 11.5 12 W 5.5 6 B 4.5 4 A 11.5 12 Hs 17 19 B 0 0 A 7.5 8 W 1.5 (4) 2 (4.5) B 0 0 A 7.5 8 Symbol Bore size (mm) 12 16 D-F9BAL Auto switch model W 14.5 15 Hs 17 19 A 10.5 11 B 3.5 3 Symbol Bore size (mm) 12 16 ( ): Denotes the values of D-A93

Tie-rod Type Hydraulic Cylinder

4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6, 8 ) 35 + 30 (n 2) (n = 2, 3, 4 ) 90 + 30 (n 2) (n = 2, 4, 6, 8 ) 100 + 100 (n 2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 Different surfaces 100 + 100 (n 2) (n = 2, 3, 4 ) Same surface 1 pc. 75 80 90 10 75 75 80 80 Different surfaces 35 55 90 90 90 + 30 (n 2) (n = 2, 4, 6, 8 ) Same surface 75 + 30 (n 2) (n = 2, 4, 6, 8 ) 80 + 30 (n 2) (n = 2, 4, 6,

Filter Regulator

Assembly of 2 types of bracket and 2 set screws. Note 4) -10- 6.

Compact Type

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 @9 !7 o i !6 r !9 !8 @2 @9 !7 o i !6 @4 @5 !8 r !9 @2 Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Parts List: Standard Piping No. Description Material No.

Modular Type Air Filters Series AF

C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C1SF-6 AD17-6 C1SF-2 AD17-2 C2SF-C AD27-C C2SF-J C2SF-CJ C2SF-6 C2SF-6C AD27-6 AD27-6C C2SF-6J C2SF-6CJ C2SF-2 AD27-2 C2SF-2J C3SF-J C3SF-W C3SF-6 AD37-6 AD38-6 C3SF-6J C3SF-6W C3SF-2 AD37-2 AD38-2 C3SF-2J C3LF-8 AD37-8 AD38-8 C3LF-8J Polycarbonate Nylon Metal AC Metal

FILTER REGULATOR

Applicable tube D.O. 10 NPT3/8" 15 Option Note 2 Note 2 Semi-standard Semi-standard Semi-standard 2 Port thread Part no. Part no. Port thread Rc Rc AD38-2-A AD38-A G G NPT AD38N(-Z)-A NPT AD38N-2(Z)-A Semi-standard 6 External B B B Port thread Part no. appearance Rc drawing and AD38-6-A part no. G NPT AD38N-6(Z)-A Applicable tube D.O.

VZ100/300/500

Cv b Cv 1 2 (P A) 2 3 (A R) Model Flow characteristics Note) Type of actuation Port size Weight (g) Base mounted VZ512 VZ522 VZ514 VZ524 VZ514 VZ524 N.C.

Manifold Specifications

fitting for 4 C4 Port size 4(A), 2(B) port One-touch fitting for 6 C6 M5 x 0.8 VF One-touch fitting for 5/32" B3 One-touch fitting for 1/4" B7 Flow Characteristics VFR Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size 1(P), 5/3(R) port Manifold 2(B), 4(A) port C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VP4 VV5Z3-40 VV5Z3-41 VV5Z3-42-01 VV5Z3-42-C6 VV5Z3-43 0.16 0.17 0.21 0.20

MQQ

E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38 5 8 20 10 3.5 6.5 39.5 7 5 4 10 to 60 M4 x 0.7 M6 x 1.0 80.5 70.5 8 8 36 11.5 47 7

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

M4 mounting hole A B 1 0 A B 1 0 A B 1 0 A B 1 0 9 61.5 A A A A R4.5 26 62.5 97 = 4.5 (5.5) (35) (L3) (5.2) 52 (L4) Stations D side U side 1 2 3 4 5 6 7 8 n 2-C6 P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken

Air Cylinder Series CS1

B B B B B B A A A A A A A Bore size 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 9.5 7.5 13.5 12.5 7 5 3.5 1.5 7.5 5.5 10 8 15 13 12 10 16 14 9.5 7.5 6 4 10 8 12.5 10.5 17.5 15.5 The mounting position should be referred for reference only for the auto switch mounting position at the stroke end

Environment

Size Lead Order no. 19 63 A/B/C LE-D-2-5 Piston rod GR-S-010 (10 g) GR-S-020 (20 g) L LE-D-2-6 * Apply grease on the piston rod periodically.

58

D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F Auto switch model D-A9 D-A9V D-A59W D-F5NTL A A A A A A B B B A B B B B Bore size 125 140 160 9 7 14.5 13 3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 9 7 14.5 13 3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 9 7 14.5 13 3 9.5 8 6 13.5 6.5 12 2 8.5 5.5 Provided as guidelines for auto switch proper mounting

ITV

ITV009 ATM VAC OUT 5.5 ERR PWR ERR PWR ERR PWR ERR PWR Note) Stations are counted starting from the D side. 35 25 50 5.25 8.5 14 8.5 12.5 15 (Pitch) (Pitch) 6 D side U side 1 2 stations 3 (8) VACz port (6, 1/4") Dimensions in inch are noted in parentheses. 1 1 89.5 ATMc port (6, 1/4") 80.5 3 3 47.5 32.5 21.2 2 2 2 12.5 7.5 Breathing hole Note) 3.7 (M3 x 0.5) OUTx port (4, 5/32") Note) For

HEC_W-E

TABLE 2-1 DIVISION OF DANGER, WARNING, CAUTION, AND NOTE -2-2 TABLE 2-2 MEANING OF A SYMBOLS -2-2 TABLE 2-3 SAFETY INTERLOCK LIST(PART 1) -2-6 TABLE 2-4 SAFETY INTERLOCK LIST(PART 2) -2-6 TABLE 3-1 QUALITY STANDARD FOR WATER(TAP WATER) -3-4 TABLE 5-1 FUNCTION OF COMPONENTS -5-3 TABLE 6-1 SPECIFICATIONS OF HEC006 -6-1 TABLE 6-2 SPECIFICATIONS OF HEC012 -6-2 TABLE 8-1 AVAILABLE MODE IN LEVEL

HRX-OM-Q026

commercial losses) (6) Expenses and compensation not covered in 2.

Model Selection 1

P. 17-5-101 6 VN 1 2 LVC 3 LVA Male 4 LVH 5 Elbow LQ1L P. 17-5-102 6 LVD 1 LVQ 2 LQ 3 Female 4 LVN 5 TI/ TIL P. 17-5-103 6 PA 1 2 PAX 3 PB Male 4 5 Run tee LQ1R P. 17-5-104 6 1 2 3 Female 4 5 P. 17-5-105 6 Note) Basic size With reducer 17-5-93 22 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.