Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Pressure Relief 3 Port Valve With Locking Holes

2 - (2) Double action type VHS4510~5510 VHS3510 VHS2510 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M Z VHS2510 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 3.2 VHS3510 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 3.2 VHS4510 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 4.2 VHS4510-06 3/4 1/2 110.4 42 75 63 22 58 44

Manifold Specifications

O.D.: 6 VP4 U D U side D side 2 to 8 2 to 8 9 to 16 D-sub connector cable assembly Symbol VZS B Both sides Passage Porting specifications 4(A), 2(B) Side 5(R1), 3(R2) 1(P) Common Common Stations Symbol VFS 02 2 stations 1 D side VS4 16 stations 16 Max. 16 stations.

53

2 Circulating fluid outlet 1 User's equipment 2 2 Circulating fluid return port 3 4 8 Automatic fluid fill port (Option J) Fluid supply 9 Overflow port (Option J) Tank drain port To wastewater collection pit 5 No.

Regulator AR30 to 60

-10AS G46-2-02 G36-2-01 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

/8 1/4 3/8 1/2 3/4 3/4 1 Piping port 1/8 1/4 1/2 1/2 EXH 3/8 4.17 IN OUT 0.54 0.76 1.46 2.06 2.98 0.87 1.68 4.44 6.78 Cv OUT EXH 0.60 0.87 0.76 1.57 1.75 2.08 2.12 2.12 2.85 2.93 Fluid Air Proof pressure 1.5 MPa Operating pressure range 0.1 to 1.0 MPa JIS Symbol 5 to 60C (No freezing) Ambient and fluid temperature (A) 2 90 Handle switching angle HandleNote): Red, Body: Platinium silver

! Contact our sales office for delivery dates and prices as this is a special model. SP133X-010E P: RU P.G.Information (Specialized Product) SMC CORPORATION Pilot Operated Check Valve 4-14-1,SOTO-KANDA, CHIYODA

Metric size Inch size Body size Port size 3 1/8 standard 06 6 07 1/4 Symbol Cylinder side 4 1/4 standard 08 8 09 5/16 01 R1/8 5 3/8 standard 10 10 11 3/8 02 R1/4 6 1/2 standard 12 12 13 1/2 03 R3/8 04 R1/2 N01 NPT1/8 N02 NPT1/4 N03 NPT3/8 N04 NPT1/2 XTO Series Applicable tubing O.D.

Water Regulator

Model Pressure range *1 Indication unit Connection thread Note MPa Port size 01 Rc1/8 02 Rc1/4 R1/8 R1/4 G46-7-02-SRB 0 to 0.7 R1/4 G46-10-02-SRB 0 to 1.0 G46-4-01 to 02-SRB 0 to 0.4 MPa Set pressure range: 0.05 to 0.69 MPa 02 WR110 X215 *1: Do not apply more pressure than the max. pressure displayed. It may cause a malfunction.

LEC-OM069xx

13 7 8 9 10 11 ON OFF H P-OT 0 1 2 3 4 5 6 Forward Run Prohibited Pn50A.3 7 8 L /P-OT 9 A B C D E F H N-OT 0 1 2 3 4 5 6 Reverse Run Prohibited Pn50B.0 7 8 L /N-OT 0 A B C D E F L /P-CL 0 1 2 3 4 5 6 Forward External Torque Limit Pn50B.2 8 7 H P-CL 9 A B C D E F L /N-CL 0 1 2 3 4 5 6 Reserve External Torque Limit Pn50B.3 8 7 H N-CL 9 A B C D E F L /DEC 0 1 2 3 4 5 6 Homing Deceleration LS

Air Cylinder

+ 2 x Stroke H + Stroke CJ2 8 8 l With rod boot (One side) JCM Width across flats B3 CM2 CM2 e CM3 JH f CG1 ZZ + 2 x Stroke JW h CG3 Width across flats B3 Width across flats B3 With rod boot (Both sides) JMB e e MB JH MB1 l + Stroke 8 8 8 8 f f JW l ZZ + 2 x Stroke h + Stroke h CA2 45 With air cushion WA WA Cushion needle (Width across flats 1.5) Cushion needle 45 CS1 (Width across flats

AC Servo Motor Driver

6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

Swivels

D Swivels Male Pipe Female Pipe Part Number A B Hex 1 Hex 2 Port 1 Port 2 A PS410102-4-4 2.87 1.85 .75 1.19 1/4-18 1/4-18 72.9 mm 47.0 mm 19.0 mm 30.2 mm NPTF NPTF B Hex 1 Hex 2 PS610102-6-6 2.98 1.92 .88 1.31 3/8-18 3/8-18 75.6 mm 48.8 mm 22.2 mm 33.3 mm NPTF NPTF Port 1 PS810102-8-8 3.24 1.96 1.12 1.50 1/2-14 1/2-14 82.2 mm 50.0 mm 28.6 mm 36.5 mm NPTF NPTF Port 2 PS1210102-12-12 3.46 2.16

VS 8-2/VS 8-4

[Option] Conforms to ISO 15407-2 Standard Size 18 mm, 26 mm Plug-in Type 5 Port Solenoid Valve Series VS 8-2/VS 8-4 S R S R Series VS 8-4 S R Series VS 8-2 S R Conforms to ISO 15407-2 Standard S R S R ISO Standard: Interface conforming to 18 mm size (VS 8-2) and 26 mm size (VS 8-4) Accommodates IP65 enclosure.

PSxx-OMV0008CN

50-A) A M4X6L B(ZS-50-B) B M4X6L -15No.PS-OMV0008CN-E 1.50.1 Nm (ZS-48-A) -16No.PS-OMV0008CN-E -02-N02 8~12 Nm -F02 4~5 Nm 24 () -17No.PS-OMV0008CN-E ()336 336 -18No.PS-OMV0008CN-E FG M12 M12 (Port Class A) 1 DC(+) DC1224 V 2 OUT2 2 3 DC(-) 0 V 4 OUT1 1 IO-Link 1 L+ DC1830 V 2 DO 2 3 L0 V 4 C/Q (IO-Link)/1(SIO) -19No.PS-OMV0008CN-E NPN 2 DC(+) OUT1 OUT2 DC(-) PNP 2 DC(+) OUT1

Metal Seal/Rubber Seal Series VQ Body Ported

9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 46 75

Clean Gas Filter

SF-OMW0001 PRODUCT NAME Clean Gas Filter MODEL / Series / Product Number SFA Series SFA10-02 SFA20-02 SFA30-02 Contents Page Safety Instructions 2 to 3 SFA Series Specific Product Precautions 4 to 5 1. Product components and functions 6 2. Specifications 7 to 8 3. Mounting 9 4.

PSxx-OMV0003CN

ID ISE70-02-L2 0x0014 (20) 0 R Pressure sensor 8 0x0015 (21) 0 R No.

HRX-OM-I051

. 7-6 Chapter 8 Appendix . 8-1 8.1 Specification . 8-1 8.1.1 System specification . 8-1 8.1.2 Refrigerant with GWP reference . 8-11 8.1.3 Communication specification. 8-12 8.1.4 Alarm signal selection . 8-14 8.2 Outer Dimensions . 8-15 8.2.1 Part 1 . 8-15 8.2.2 Part 2 . 8-15 8.2.3 Part 3 . 8-16 8.3 Flow Chart . 8-17 8.3.1 Part 1 . 8-17 8.3.2 Part 2 . 8-18 8.4 Offset Function . 8-19 8.4.1

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

0 1 2 3 Without cable Cable length 1.5m Cable length 3m Cable length 5m 1 Plug-in unit Stations Cylinder port size 02 2 stations Special wiring specifications (other than double wiring) 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) 03T 04T BT 03 04 B CM Direct exhaust with silencer box: For D and U side mounting Direct exhaust with silencer box

VS7-6

VS VS7 VQ7 A port regulation B port regulation 1.19-19 Series VS7-8 Sub-plate Sub-plate: Series VS7-2/VSA7-2 Specifications Series ISO size w ISO size w Applicable solenoid valve/air operated valve Sub-plate size 3 8 1 2 3 4 Side piping: , Piping 3 8 1 2 Bottom piping: , , 0.68kg ( , )1.29kg ( ) 3 4 3 8 1 2 Weight 3 4 How to Order A03 E VS7 2 Thread Piping Rc (PT) F G (PF) Side piping: 3