Fieldbus system EtherCAT compatible SI Unit

LBB1 SEC3 DX#B DY#B DN#E AXA AYA -118No.EX-OMA1023 (5) When unit diagnosis is detected, the diagnostic information is displayed on the "SYSTEM CONFIGURATION" screen. Identifies the unit that detected the diagnosis. (6) When selecting I/O Monitor in the left pane, the I/O MONITOR screen is displayed. Unit tab. ON/OFF information can be monitored for each channel.

IZx-OMX0087

Negative ions are generated by setting "dn". Refer to 4-4-3. Frequency set mode for further details. 4-3. High voltage power supply module CH number setting When multiple high voltage power supply modules are connected to one controller, the CH number must be set for each high voltage power supply module to identify the information and set time.

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

XLA Series

high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XLA- ∗ -F7NJ ∗ - ∗ Series

temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XL-OMV0002

XLC-16 XLC-25 XLC-40 XLC-50-1 XLC-63-1 XLC-80-1 XLC-100-1 XLC-160-1 16 25 40 50 63 80 100 160 560(5150) -5 Pa (abs) 110 l/s 1 5 14 45 80 160 200 300 800 10 (FKM) 1.310 Pam 3/S -11 (FKM) 1.310 KF(NW) KF(NW)K(DN) SUS316LSUS304FKM() 2 MPa (G) 0.30.6 0.40.6 cm 3 3 0.5MPa 38 91 430 280 500 1000 2300 3700 M5 Rc 1/8 Rc1/4 kg 0.28 0.46 1.1 1.4 2.3 4.0 8.7 14.5 1) 2) Y-VAC2 3) 1 7 XL-OMV0002

XL-OMY0002

48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN

XLDV Series

Atmospheric pressure to 1 x 10-6 Main pumping 14 45 80 160 200 300 800 Conductance l/s Note 1 Initial pumping 0.53 28 2.511 48 418 6.531.5 6.531.5 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN

XLF Series

high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

High Vacuum L Type Valve

Operating temperature oC 5 to 50 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW), K (DN

High Vacuum L Type Valve

Conductance l/s Main pumping 14 45 80 160 200 300 800 Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 6.5 to31.5 6.5 to 31.5 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW) KF (NW) , K (DN

XLG Series

to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW) KF(NW),K(DN

Low torque Metal seal type Rotary joint

Printed in Japan. 1st printing June, 2002 D-MITAKA P-80 (DN) This catalog is printed on recycled paper with concern for the global environment.

Size: 6 (60), Valve Type: 1 (Normally Closed), Body Material: C (Brass), Seal Material: N (NBR), Port Size: 10 (Thread; 1), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Size: 1 (Series 10), Valve Operation Type: 1 (Normally Closed), Valve Type: Nil (Standard), Body Material: C (Brass), Seal Material: N (NBR), Orifice Diameter/Port Size: 201 (Orifice Diameter: ø2.4mm; Port Size: 1/8), Thread Type: F (G), Rated Voltage: 5 (24 VDC), Electrical Entry: DN (without DIN Connector, w/Surge Voltage Suppressor)

Stations: 8 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 3 (Input Block 3 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Stations: 7 Stations, Port Size: N3 (5/32" One-touch Fitting), SI Unit: ZENN (EtherNet/IP, -COM), Number of Input Blocks: 4 (Input Block 4 pcs.), Input Block: 3 [M8, 4 Inputs (3 Pins)], Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: DN (DIN Rail Mount & Name Plate), Option 2: S (Built-in Silencer, Direct Exhaust)

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

Box 3385 Al-Amir Majed Street, Jeddah-21471, Saudi Arabia TEL: 02-6761574 FAX: 02-6708173 15-18-21 Information Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved 06-E533 Issued: June, 2006 D-DNP P-120 (DN) Stainless Steel Speed Controller (Elbow Type) Series ASG Flow Rate and Effective Area Material: