VCC

mountable number 3 port valve mountable number 00 02 04 00 02 04 No 2 port valves used 2 pcs.

VQ20/30

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Polyurethane Coil Tubing Series TCU

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Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Noise reduction capability of over 30 dB. Provides a sufficient effective area. Operating Fluid Piping Caution Warning 1.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

FR Soft Nylon Tubing Series TRS Flame Resistant (Equivalent to UL-94 Standard V-0)

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TS/TISA

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DM

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Antistatic Tubing Series TA

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Clean Tubing: Polyolefin Tubing Series TPH

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ISG

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Precision Regulator Series IR1000/2000/3000

Supply pressure: 0.7 MPa Set pressure: 0.2 MPa Flow rate: 0 l/min (ANR) Back pressure: 0.5 MPa Supply pressure: 0.5 MPa IR2000-02 IR2000-02 IR2000-02 0.204 0.5 0.2 Set pressure (MPa) Set pressure (MPa) Set pressure P2 (MPa) 0.4 0.202 Set point 0.15 0.3 0.200 0.1 0.2 0.198 0.05 0.1 0.196 0 0.2 0.1 0.4 0.3 0.6 0.5 0.8 0.7 0.9 1.0 0 100 200 300 400 0 100 200 300 400 500 600 700 Flow rate (l

20

Nozzle size Coil tube Fitting Blow gun Recommended system Distance S coupler TCU0604l-1-20-X6 KQ2H06-02S Up to 20 mm VMG1ll-02-01 KK4P-06H 1 TCU0604l-1-20-X6 KQ2H06-02S Up to 40 mm VMG1ll-02-02 KK4P-06H 1.5 TCU0805l-1-20-X6 KQ2H08-02S Up to 60 mm VMG1ll-02-03 KK4P-08H 2 TCU1065l-1-20-X6 KQ2H10-02S Over 60 mm VMG1ll-02-04 KK4P-10H 2.5 l: B (Black), W (White), R (Red), BU (Blue), Y (Y ellow

T/TIA

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Polyurethane Flat Tubing Series TFU

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Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

KDM

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Flame Resistant (Equivalent to UL-94 Standard V-0) FR Double Layer Tubing Series TRB

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DOC1001322

Refer to the Communication Function of Operation Manual for details. (1) (2) (3) Setting of contact input signal form Table 5.4-21 Setting of contact input signal form No.

HRX-OM-W060

Date and time, Operation time and Alarm history are not reset. (1) Data reset setting screen Table 5.4-21 Data reset setting No.