Rotary Actuator/Vane Type

Weight [g] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Rotary actuator body 27 26 26 48 47 46 104 103 101 199 194 189 385 374 363 42 43 55 58 119 142 219 239 398 444 Flange assembly 9 10 19 25 9 10 19 25 Auto switch unit 15 20 28 38 43 15 20 28 38 43 Angle adjuster

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

Series AP3500

thread (2 each) Sides (2 each) Bottom mount 0.06 in3 (1.07 cm3) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Adjustable range of metered flow 2) 10 to 200 slpm 10 to 350 slpm 6 slpm 10 slpm 15 slpm 20 slpm 10 to 20 slpm 21 to 50 slpm 51 to 100 slpm 101 to 200 slpm 201 to 350 slpm

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

OMR0032

Range Resolution LAT3-10 0 to 10 Refer to the 0.03 LAT3-20 0 to 20 Area Range table on the LAT3-30 0 to 30 right. LAT3M-50 0 to 50 LAT3F-10 0 to 10 LAT3F-20 0 to 20 0.005 LAT3F-30 0 to 30 LAT3F-50 0 to 50 This determines the condition for when the INF signal is activated. The INF signal turns ON when the pushing force generated by the Card Motor exceeds the 0.5 to 5.0 set value.

51

Switch bracket Auto switch b Switch holder d Auto switch mounting screw c Auto switch mounting band D-X Technical Data 375 CG3 Series Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5.0 4.5 5.5 5.0 5.5 D-A9 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-H7/H7W D-H7NF/H7BA 9 8 10 10 10 11 8 10 9 10 10 11 11 11 13 13 14 14 14

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

3Ybore size 63 63 all types 4 x 28AW 30 10 14 6 M18 x 1.5 80 32 23 43 16 35 65 30 18.3 80 80 all types 100, 125 all types 4 x 36AW 35 10 14 7 M22 x 1.5 95 36 28 50 16 39 78 35 22.3 N M L E F 100 5 x 40AW 42 10 15 8 M27 x 2 110 40 33 59 20 46 90 43 27.5 160 160 all types 5 x 50AW 50 10 15 10 M33 x 2 120 44 37 66 22 50 100 45 34 C D Spring pin hole Drilled after assembly P A 100 Series CHA

Floating Joint

150 10 16 20 32 40 63 Be sure to read this before handling the products.

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

Single Axis Electric Actuator Serriies LJ1S Slider Guide

30 20 Transfer load m (kg) 300 L2 200 Mer m 100 L2 0 10 30 20 Mer Transfer load m (kg) m 300 a = 500 a = 1000 200 a = 2000 L3 100 m Mey a 0 10 30 20 Transfer load m (kg) Refer to page 145 for deflection data. 92 Standard Motor/Horizontal Mount Specification Series LJ1S30 Dimensions/LJ1S303SC Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5

100

Set pressure range/Display pressure range 10 to 101 kPa 105 to 105 kPa Withstand pressure 500 kPa Smallest settable increment 0.1 kPa Applicable fluid Air, Non-corrosive gas, Non-flammable gas VPressure switch correspondence table Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (with power supply polarity protection) Compact digital pressure switch ZSE10 series Current consumption

Rotary Cylinder Series MRQ Size: 32, 40 1

CRA1 2 or less Backlash P . 11-10-18 to 11-10-19 For detailed explanation of effective output, refer to the description on page 11-10-5. CRQ2 MSQ Linear Motion Parts/Standard Stroke 32, 40 Standard stroke (mm) Size MRQ 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to page 11-10-18 for other intermediate strokes.

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)