Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

LEC-OM07605CN

(2) ()40 10(555) (10.1) P A = (10.1) K T 2] A: [m P: [W] T: [] K: [56] (10.1),P 10.1A 10.1 40() () () 10.2 10 4 10. 10.3 101 1000 EM1(1) EM1(1) LECSS2-T 400W [Pr. PF06][Pr.

Single Axis Electric Actuator Series LJ1H

8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Page 603-10 JXC-CD-T JXC-CD-S Straight type JXC-CL-S Straight type T-branch type (Accessory) To SI To ENC To SI To MOT Provided by customer (3 m) Communication cable To PWR Page 603-10 Power supply for controller 24 VDC Power supply plug (Accessory) Page 603-10 Options Teaching box Controller setting kit Conversion cable Note) Page 603-10 P5062-5 (0.3 m) Page 603-10 (With 3 m cable) LEC-T1

CLQ

L FT B + Stroke G Stroke range 20FD FT FV FX FZ G L L1 M B A A B 91 36 10 to 50 63 46 101 9 9 80 92 108 38 8 33.5 60 Data 101 46 75, 100 107.5 43.5 10 to 50 80 53.5 117.5 11 11 99 116 134 43 10 43.5 77 117.5 53.5 75, 100 126 53 10 to 50 Rod end nut L1 100 63 136 11 11 117 136 154 50 12 43.5 94 136 63 75, 100 Double Clevis Style Double clevis style: CLQD/CDLQD Stroke range Without auto switch

2/3 Port Valve

OAllowable voltage fluctuation is 10% of the rated voltage.

One-touch Fittings Series KQ2

14 7 8 10 14 17 12 14 17 2.5 3 9.6 17.5 15.5 10 M5 0.8 M6 1.0 9.3 12.7 10.4 3.5 3.5 15.6 15.6 18 12.7 12.7 16 15.3 23 25 17.4 17.4 25.5 27.5 29 14.7 22 26 14.7 15.7 23 27 29 4 1 8 1 4 10 19 3.2 4.2 4.2 10 M5 0.8 M6 1.0 3.5 11.6 13.5 3.5 16.1 16.1 13.5 13.5 6 1 8 12 22 33 13 21 35 25 26 36 63 28 38 65 101 105 20 17 12.8 11.4 11.4 1 4 10 3 8 1 8 28 30 31.5 24.5 28.5 30.5 1 4 8 18.5 23 12 15.2

OMU0023

(1 bit) 145 20 10 85 15 10 Reading of internal parameters (7 words) 270 40 15 150 25 10 Operation mode selection 165 25 10 95 15 10 Commands for virtual I/O operation by serial communication 195 30 15 110 20 10 Reading of alarm history (4 words) 215 30 15 120 20 10 Clearing of alarm history 245 35 15 135 20 10 Confirmation of communication connection 165 25 10 95 15 10 The communication

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

JA/JAH/JB/JS

-125 14-150 18-150 22-150 26-150 30-150 36-150 Model Symbol Applicable bore size (mm) 6 10 10, 15 20 25, 30 40 50, 63 80 100 125, 140 160 6 10 15 20 30 40 63 80 100 140 160 Maintenance Standard Warning 1.

CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

EXxx-OMY0006CN

-10 EX245-FPS1 68 No.EX##-OMY0006CN Fig. 10-11 EX245-FPS2 Fig. 10-12 EX245-FPS3 69 No.EX##-OMY0006CN 11.

V

U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100 Max 20 ln/min 200 Max 50 ln/min 300 Max 75 ln/min 101 Max 20 ln/min 201 Max 30 ln/min

AS-FG/ASD-FG

43.3 AS321FG-03-12 AS321FG-N03-11 61 22 32.8 44.3 20.9 12 17.9 3/8" 21 59 33.6 47.9 AS421FG-04-10 AS421FG-N04-11 100 21 33.6 47.9 18.5 10 17.9 3/8" 21 100 R(PT) 1/2 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 28.6 35.2 49.5 AS421FG-04-12 AS421FG-N04-13 101 22 34.6 48.9 20.9 12 21.7 1/2" 22 101 Reference dimensions for threads after installation.

AZ1000

psig (2.1 MPa) Vacuum to 3500 psig (24.1 MPa) 1) Source pressure 5000 psig (34.5 MPa) 10 psig (69 MPa) 40 to 160C (40 to 71C) (No freezing) 2) 0.09 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 3) 4 x 10-9 Pam3/sec 4) Ra 10 in. (0.25 m) Option: 25 in. (0.62 m) Face seal, Tube weld 0.38 pisg (0.0026 MPa) rise in delivery pressure per 100 psig (0.7 MPa) source pressure drop Bottom mount (Option: panel

CXWM/CXWL

10 15 15 20 MS4-10 MS5-10 MS6-15 MS6-15 MS8-20 Left Right Left Right Operating direction of the housing Operating direction of the housing Manufactured by Misumi Trading Ltd.

Compact Cylinder with Lock Series CLQ

38 8 33.5 60 46 101 75, 100 43.5 107.5 10 to 50 80 117.5 53.5 11 11 99 116 134 43 10 43.5 77 53.5 117.5 75, 100 53 126 10 to 50 Rod end nut L1 100 136 63 11 11 117 136 154 50 12 43.5 94 63 136 75, 100 Double clevis type: CLQD/CDLQD Double clevis type (mm) CT 4-N Cap bolt Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 10 to 50 75, 100 10 to 50 75, 100

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

AS321FG-N03-11 31.8 43.3 61 22 32.8 44.3 20.9 17.9 12 3/8" 21 59 AS421FG-04-10 AS421FG-N04-11 33.6 47.9 100 21 33.6 47.9 18.5 17.9 10 3/8" 21 100 NPT 1/2 23.8 25.4 28.6 50.1 57.6 25.4 24 49.6 57.6 50.1 49.6 42.1 42.1 R 1/2 28.6 AS421FG-04-12 AS421FG-N04-13 35.2 49.5 101 22 34.6 48.9 20.9 21.7 12 1/2" 22 101 Reference dimensions of M5 x 0.8, R threads after installation.