Piping: 42R (Base Mounted), Stations: 8 Stations, A, B Port: N9T (5/16" One-touch Fitting)

Piping: 42R (Base Mounted), Stations: 12 Stations, A, B Port: 01N (NPT1/8)

Piping: 42R (Base Mounted), Stations: 18 Stations, A, B Port: 01N (NPT1/8)

Piping: 42R (Base Mounted), Stations: 20 Stations, A, B Port: 01 (Rc1/8)

SYJ300

For sub-plate type, manifold type 41, S41, 42, S42, 42R, S42R (With gasket and screws) Body option Nil: Individual pilot exhaust type Electrical entry Manual override 24, 12, 6, 5, 3 VDC/100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC Nil: Non-locking push type Grommet L plug connector M plug connector M8 connector R port P, E port G: Lead wire length 300 mm L: With lead wire (Length 300 mm) M

Piping: 42R (Base Mounted), Stations: 2 Stations, A, B Port: C8 (ø8 One-touch Fitting)

Piping: 42R (Base Mounted), Stations: 8 Stations, A, B Port: 01T (NPTF1/8)

Piping: 42R (Base Mounted), Stations: 8 Stations, A, B Port: 01 (Rc1/8)

C95Series

'(mm) dirEH;tion (inch2) 25 50 75 100 125 145 OUT 1.25 31 62 93 125 156 181 , 32 . 12 IN 1,07 27 54 80 107 134 155 i (2) Load of piston rod should always be aligned OUT 1.95 49 97 146 195 244 283 40 16 IN 1.64 41 82 123 164 205 237 parallel with rhe cylinder axis. Cll Avoid damaging (scratches, nicks) on the piston rod, which would lead to damage of rod seal, resulting m air leakage.

CG5-S

(mm) Bore size (mm) Stroke range A P AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M MM NA S ZZ 20 to 350 1/8 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 M8 x 1.25 29 83 118 25 to 400 1/8 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 M10 x 1.25 29 83 123 32 to 450 1/8 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

5H9 ( ) depth 5 +0.030 0 NN x M6 x 1 thread depth 12 A B 1 24 5.1 5.1 10.5 9.5 10.5 A B G (NN 1) x H H 21 9 21 9 A-A B-B (mm) Model F 38 38 48 58 40 46 44 44 N 4 4 4 4 6 6 8 10 G 18 18 19 19 21 36 17 H 39 39 48 58 52 44 44 NN 2 2 2 2 3 3 4 5 GA 18 18 19 19 48 73 80 105 HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123

42

5 Port Solenoid Valve VQ4000/5000 Series Metal Seal Rubber Seal VQ4000 SV VFS3000 Installation volume 42% SYJ SZ Reduction VF VP4 123 96.5 Installation area 26% VQ 1/2 VQ 4/5 VQ 4/5 Reduction 201 VQC 1/2 163 240 VQC 4/5 185 Compact and large flow capacity VQZ SQ Possible to drive cylinders up to 160 VQ4000 VQ5000 VFS Possible to drive cylinders up to 180 When the average speed is 200 mm

7

P. 123 For Oil VXE Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 124, 125 VXP How to Order . P. 126 VXR For Heated water VXH Model/Valve Specifications, Fluid and Ambient Temperature, Valve Leakage Rate ...P. 127, 128 How to Order .

Aluminum High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

High Vacuum Angle Valve

For further details, refer to mounting positions under Replacement Heaters on page 465. 452 B XLD/XLDV Series Aluminum High Vacuum Angle Valve Dimensions XLDV-25/With solenoid valve 88.5 74 48 (KF flange) (For DC) (For AC) L A V V E 57.6 M 55.4 U 40 48 U C A V H H I G (38.5) 8.5 2.2 7.5 max. 49.4 21 Initial exhaust solenoid valve 41.5 3.5 123 26 M5 Port 3(R) (EXH) (Exhaust port) M5 Port 1

ZP

8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E F E E F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 50.5 49 113 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

REA/REB

Speed 600 mm/s 2.5 2.7 3.2 3.6 4.1 REBH15 5.3 6.0 6.6 7.3 8.0 9.4 REBH25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 REBHT25 9.6 10.7 11.9 13.0 14.2 16.5 18.8 REBHT32 Theoretical Output Magnetic Holding Force (N) (N) High Precision Guide Type REBH Bore size (mm) Operating pressure (MPa) Piston area (mm) Bore size (mm) 15 25 32 0.3 70 0.2 0.4 88 0.5 105 0.6 123 0.7 176 Holding force 52 137 363 588

CJ5-S

-X Bore size (mm) W WA WB WH ZZ 2020 30 22 16 23 118 25 30 22 16 25 123 Data 32 25 22 16 28.5 125 40 20 22 16 33 143 50 20 25 18 40.5 167 63 20 25 18 47.5 167 80 20 30 22 60.5 201 100 20 31 22 71 202 10-14-13 14 Series CG5-S Dimensions R V Axial foot style (L): CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT X Y X Y M 8-J 4-LD C 0.1

REA/REB

4.9 5.4 C J G5-S REAH25 5.3 6.0 6.6 7.3 8.0 9.4 REAHT25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 CV REAHT32 9.6 10.7 11.9 13.0 14.2 16.5 18.8 MVGQ Theoretical Output Magnetic Holding Force CC (N) RB Operating pressure (MPa) Piston area (mm2) Bore size (mm) 10 15 20 25 32 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 J 10 Holding force (N) 15 23 78 31 39 54 46 53.9 137 231 363 588 D35 52 15 176 70 88 123