in / 123 mm, Width: 1.85 in / 47 mm, Height: 3.07 in / 78 mm, Net Weight: 1.98 lbs. / .9 Kg Series Configured Datasheet.

Rotary Clamp Cylinders

MK-A012 MK-A016 Bore size (mm) 12 16 20 25 32 40 50 63 12 70 87 16 100 123 20 250 290 25 280 320 32 500 525 40 595 640 50 1100 1350 63 1520 1805 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer MK-A020 MK-A032 Additional Weight MK-A050 Unit: g 50 7 46 13 350 345 63 17 46 25 350 531 40 6 21 7 200 198 20 6 10 2 100 133 25 7 10 3 100 153 32 7 21 5 200 166 16 32

Plate Cylinder

M12 x 1.75 4.3 5.1 6.9 8.7 10.5 M5 x 0.8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 G1/8 G1/8 G1/4 G1/4 M8 x 1.25 depth 13 M8 x 1.25 depth 13 M10 x 1.5 depth 15 M10 x 1.5 depth 15 The position of the 4 flats of the piston rod is 3 in relation to the cylinder side surface. 5 Plate Cylinder: Double Acting, Single Rod Series MU Dimensions with Mounting Bracket Foot (mm) LY LH 29 37 46 57 67 LS 79 90 96 116 123

Digital Flow Switch (Integrated display type)

A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -85No.PF-OMM0005-N PF3W704/720/740/711/721 (With temperature sensor) Temperature sensor Symbol A AA Model PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W704--T 115 74 PF3W721-F12-T 119 76 PF3W721-F14-T 123

Compact Guide Cylinder Series MGQ

25 196 88 196 88 294 137 294 137 353 235 539 470 30 15 17 25 26 44 47 60 61 50 12 19 19 33 34 69 47 72 167 59 167 59 255 88 255 88 304 157 470 313 75 9 15 15 28 57 53 77 59 137 275 137 275 215 392 215 392 255 863 412 1370 100 8 13 13 23 49 44 65 51 108 216 108 216 176 313 176 313 206 686 343 1070 125 42 30 56 42 87 156 87 156 138 207 138 207 168 465 278 708 150 37 26 49 36 77 136 77 136 123

Magnetically Coupled Rodless Cylinder

X168 Helical insert thread specifications Standard Stroke Theoretical Output Bore size (mm) Number of axes Standard stroke (mm) Maximum available stroke (mm) Note) (N) Operating pressure (MPa) Piston area (mm2) 10 500 100, 200, 300 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 100, 200, 300, 400, 500 15 750 1 axis 10 15 23 78 31 39 54 46 100, 200, 300, 400, 500, 600 20 1000 15 35 52 176 70 88 123

IC

100.5 70 M3 x 0.5 x 9.5 48 6 (Sensor breathing port) PRESSURE OUT CONTOROLLER 45 45 RUN 4 3 2 1 CH kPa 4 3 2 1 SW D-IN RUN UP SET P-ON READ DOWN STOP 105.5 M5 x 0.8 x 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (Sensor pressure port) External sensor type 123

Table of Contents

Series ISG General Purpose Pressure Switch . 88 88 89 90 90 90 91 92 95 95 96 96 96 97 98 98 99 101 103 105 108 108 109 110 111 114 116 116 117 117 118 118 119 120 122 123 123 124 125 127 130 131 131 131 133 134 135 137 137 138 139 140 144 146 152 155 155 156 157 157 158 159 159 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

Model Selection 1

5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing O.D.

Table of Contents

8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E E E F F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 49 113 50.5 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 389 759 352 722 315 685 278 648 L1 L2 L3 L4 L5 241 611 204 574 167 537 130 500 93 463 56 426 379 749 342 712 305 675 268 638 231 601 194 564 157 527 120 490 83 453 46 416 412.5 775 375 737.5 337.5 700 300 662.5 261.5 625 225 587.5 187.5 562.5 150 525 112.5 487.5 75 450 423 785.5 385.5 748 348 710.5 310.5 673 273 635.5 235.5 598 198 573 160.5 535.5 123

VEX1

VEX3 Base mounted: VEX342 Air operated: VEX3420 External pilot solenoid: VEX3421 Internal pilot solenoid: VEX3422 DlN connector (D) 5.1-21 VEX3 Body ported/VEX350/370 Air operated: VEX3500/3700 External pilot solenoid: VEX3501/3701 Internal pilot solenoid: VEX3502/3702 VEX370 VEX350 VEX AN AMC Dimensions R port Port size B C D E F G H J K L M N O A Model P, A port Rc(PT) 107 VEX350 1 2 3 4 123

Hand Valve Series VH

6.6 49 62 125 134 94 97 92 73 106 1 (P) 88.5 23 3 (R) 1 (P) 3 (R) 12 12 27 4-Rc1/4 13.5 4-Rc1/4, 3/8 VH32l-02 to 03 (Bottom piping) 2 (A) 44 3 (R) 1 (P) 4-Rc1/4, 3/8 4 (B) 3.6-9 Hand Valve Series VH Body Mounted/Dimensions VH40l-02 to 04 VH40l-06 4 (B) 2 (A) 4 (B) 2 (A) 25 25 1 (P) 3 (R) SlA 1 (P) 3 (R) l102 102 88 89 VlA SlA 4-6.6 4-6.6 VlA 81 88 94 VM/VR 144 144 97 97 VH 125 123

VQC

MIL-C-24308) 2-C8 3(R) port n 1 2 3 4 5 6 7 Stations D-side 8 U-side DIN rail clamp screw 62.5 60 40.5 35 18.5 25 7.5 9.5 (7.5) (12) 2-C8 1(P) port 20.5 2n-C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread 34 P = 10.5 Formulas: L1 = 10.5n + 45, L2 = 10.5n + 102 n: Stations (maximum 24 stations) n L L1 L2 L3 L4 1 55.5 112.5 137.5 148 2 66 123

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

ZP

8 9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E E E F F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 49 113 50.5 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

REA/REB

4.9 5.4 C J G5-S REAH25 5.3 6.0 6.6 7.3 8.0 9.4 REAHT25 6.2 7.3 8.3 9.4 10.4 12.5 14.6 CV REAHT32 9.6 10.7 11.9 13.0 14.2 16.5 18.8 MVGQ Theoretical Output Magnetic Holding Force CC (N) RB Operating pressure (MPa) Piston area (mm2) Bore size (mm) 10 15 20 25 32 Bore size (mm) 0.3 0.2 0.4 0.5 0.6 0.7 J 10 Holding force (N) 15 23 78 31 39 54 46 53.9 137 231 363 588 D35 52 15 176 70 88 123

MU

X 0.8 M6 X 1 M8 X 1.25 M10 X 1.5 NE 4.3 5.1 6.9 8.7 10.5 S 55 58 60 74 75 ZZ 69 72 75 92 96 M10 X 1.25 M8 X 1.25Depth13 M12 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M8 X 1.25Depth13 M10 X 1.5Depth15 M10 X 1.5Depth15 M12 X 1.75 2.4-4 Plate Cylinder/Double Acting Single Rod Series MU Dimensions (mm) ZZ 109 122 133 159 169 LY 56 71 89 109 129 Y 6 8 10 11 14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123

MY1

MY1 HT MY1 W MY1 W MY1CW (Cam follower guide type) 16, 20 25, 32, 40, 50, 63 MY2C MY2 H/HT MY3A MY3B MY3M B A B A Proper Auto Switch Mounting Position (mm) D-Z7/Z80 D-Y59/Y7P D-Y7W D-Y7BA D-M9V D-M9WV D-M9AV D-A9 D-Y69/Y7PV D-Y7WV D-M9 D-M9W D-M9A Bore size (mm) A B A B A B A B A B 16 20 25 32 40 50 63 74 86 70 90 94 106 90 110 102 118 102 118 97 123 97 123 132 148 132 148 127 153

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 1-5-20 4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead