MXF

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX IN OUT DTheoretical Output (N) -X Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.7 0.6 0.5 0.4 0.3 0.2 20OUT 50 35 30 25 20 15 10 8 4 IN 38 27 23 19 15 11 8 Data 79 68 57 45 34 23 OUT 113 12 6 60 51 43

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

Non-standard Motor/Horizontal Mount Specification Series LJ1H30 Dimensions/LJ1H303PD(X10) Scale: 10% 8H10 depth 10 4-M8 x 1.25 thread depth 10 120 4-M12 x 1.75 thread depth 15 20 80 12.5 16.5 Cable entry side Work piece mounting reference plane 8H10 depth 8 Body mounting reference plane 212 160 Z section detail 63.5 63 Stroke + 204 (table movement range) 194.5 Z section 31.5 110 3.3 69 113

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

113 115 145 ZZ Bore size 8 8 12 13 Female thread MM 20 25 32 40 Thread depth A1 When female thread is used, use a thin wrench when tightening the piston rod.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

22 308.5 326 350 360.5 21 297 314.5 337.5 348 20 285.5 303 325 335.5 19 274 291.5 312.5 323 18 262.5 280 300 310.5 17 251 268.5 300 310.5 16 239.5 257 287.5 298 15 228 245.5 275 285.5 14 216.5 234 262.5 273 13 205 222.5 250 260.5 12 193.5 211 237.5 248 11 182 199.5 225 235.5 10 170.5 188 212.5 223 9 159 176.5 200 210.5 8 147.5 165 187.5 198 7 136 153.5 175 185.5 6 124.5 142 162.5 173 5 113

Short Stroke Electric Actuator Series LX

: Dynamic moment 1000 m L1 3 0 1 2 Transfer load m (kg) a = 1000 300 L2 (mm) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113

Booster Regulator/Air Tank

Make sure to refer to the procedure for maintenance. 1018 Booster Regulator VBA Series Dimensions VBA10A-02 With elbow silencer (Option) 150 Pressure gauge (Option) Elbow silencer (Option) 60 IN side gauge port Rc 1/8 OUT side gauge port Rc 1/8 28 7 28 7 ARJ Silencer (Option) 113 113 IN port 1/4 IN port 1/4 OUT port 1/4 AR425 to 935 23 27 23 27 OUT port 1/4 ARX 22 22 60 4 x 5.5 EXH port 1

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

VZS

4 87 96 3 70 79 2 53 62 Formula 17n + 19 17n + 28 L1 L2 With attachment plug lead wire: VV5ZS2-51GStation 1Port size 4-4.5 mounting hole Manual override Indicator light U side (n) (2) (1) Stations D side 2-C4, C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Electrical entry n: Stations L Stations Formula 17n + 19 17n + 28 2 53 62 3 70 79 4 87 96 5 104 113 6 121 130 7 138 147 8 155

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Note 1) 13 Series SZ3000 Plug-in Manifold Station Expansion Caution In addition to solenoid valves, housing holders (SX3000-113-1) are necessary for expansion of manifold stations.

VXA21/22

Applicable Fluids Standard Option (1) Water (Standard, Up to 40C) Air (Standard, dry), Turbine oil Vacuum (Up to 1 Torr) Carbon dioxide (CO2), Nitrogen gas(N2) Freon11, 113, 114 Vacuum (Up to 103 Torr) (V, M) Non-leak (105 atm cc/sec or less) (V, M) Symbol N.C.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Plug-in tyP N0n Pad No , NPIFllvw$m+{Il NWF$2m0P.0rT-2 %NPTF IvwSmP-02T-1 nwFs2000P@T-2 Other Opirons Available: (See NVFS Se.ies Catalog) . Air Shutofi Valve spacer . Single-cheok Drop Guard spacer . Double-check "Pertect" spacer .

-fl Seies

Plug-in tyP N0n Pad No , NPIFllvw$m+{Il NWF$2m0P.0rT-2 %NPTF IvwSmP-02T-1 nwFs2000P@T-2 Other Opirons Available: (See NVFS Se.ies Catalog) . Air Shutofi Valve spacer . Single-cheok Drop Guard spacer . Double-check "Pertect" spacer .

SMC's?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The VP series may be?used as either a?selector valve, or a divider valve.? It?is?available in a normally closed?or a normally open style. The series is vacuum applicable up to ?101.2kPa., MANIFOLD, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ,

SMC's?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The VP series may be?used as either a?selector valve, or a divider valve.? It?is?available in a normally closed?or a normally open style. The series is vacuum applicable up to ?101.2kPa., MFLD,, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3

SMCs?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The VP series may be?used as either a?selector valve, or a divider valve.? It?is?available in a normally closed?or a normally open style. The series is vacuum applicable up to ?101.2kPa., MFLD,, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3

SMC's?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The VP series may be?used as either a?selector valve, or a divider valve.? It?is?available in a normally closed?or a normally open style. The series is vacuum applicable up to ?101.2kPa., MFLD,, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3

SMCs VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The VP series may be used as either a selector valve, or a divider valve.  It is available in a normally closed or a normally open style. The series is vacuum applicable up to –101.2kPa., MFLD,, VALVE, VP3/5/7 SOL VALVE 3-PORT, FJ, VP3

76

F (C) Correction factor 58.0 (0.4) 0.9 1.06 72.5 (0.5) 36 to 77 (2 to 25) 0.93 1.02 87.0 (0.6) 86 (30) 0.96 1 101.5 (0.7) 90 (32) 1 116 (0.8) 0.99 95 (35) 1.03 130.5 (0.9) 0.98 104 (40) 1.06 145 to 232 (1 to 1.6) 0.92 113 (45) 1.09 1 Refrigerant R407C (HFC) Series IDF100FS/125FS/150FS Applicable Compressor Size: 100 kW, 125 kW, 150 kW (Max. inlet air temperature: 140F (60C) (Max. ambient

SMC Pneumatic Clean Series

-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26 88 64 62 62 42.5 34.5 30 24 47.3 37 37 30 21.5 15 15 15 46.5 37.5 33.5 28 7 5.5 5.5 5 1/8 143 113

XM, XY

XMA series with KF (NW) flange A (mm) Model Weight (kg) Conductance (L/s) B (mm) CYV XMA-16 40 103 0.33 5 XMA-25 XMA-40 XMA-50 50 113 0.61 14 B 65 158 1.40 45 70 170 2.00 80 A 160 XMA-63 XMA-80 88 196 3.60 90 235 6.20 200 A : Common to all series. 479 Series Variations Operating pressure Flange size Shaft seal system Models Valve type Angle type In-line type Options Application Switch Indicator