3 Port Solenoid Valve Metal Seal Series VZ200 1

Local Area: (800) 258-9200-www.stevenengineering.com M5 x 0.8 (Pilot EXH) 1 2 1 2 DIN terminal: VZ2 5-D(Z)-01 L: VZ2 5-L(Z)-01 300 (Lead wire length) With light/surge voltage suppressor Applicable cable O.D. 3.5 to 7 Max.10 84 With light/surge voltage suppressor M5 x 0.8 (Pilot EXH) Pg7 76 68.2 1 2 M: VZ2 5-M(Z)-01 43 19.5 PE PA 11 8.5 7 With light/surge voltage suppressor 300 2.5 3-Rc 1

SFOD-OMT0005CN

(PLC ) No. (01-051) <> (1)( )1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2 [2](P.53) No. B RESET <>(+) (-) (JOG ) <>(+) (-) (01-052) B RESET -63- () 12 (12 0 ) (2) (3) (4) (5) (6) (7) Alarm _Comment _058 (01-058) 3A B RESET <>No.

Mechanical Valves Series NVM, NVFM, NVZNI

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

IIIIIII

EX: NVM121-N01-01S NVM131-01-01 NVM131-01-35 NVMl51-01-35 NVMl21-01-02 NVM13t-01-02 NVM120-N01-00 130-N01-00 F.O.F.'lbs.

E-P HYREG

B VVEX 1 5 01 Body size Pilot type Valve stations Port size 1 22 Note 1) 2 stations 1(P), 3(R) 2(A) Internal pilot Ex.) VVEX2-2-5-02 VY1200-00-G 4 pcs.

Modular Design with Uniform Body Style

5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

VZA2000

Rc NPTF, NPT G Nil T F 3 position closed center 3 position exhaust center Caution Refer to pages 5-11-2 to 5-11-6 for Safety Instruction and Solenoid Valve Precautions. 5-3-5 6 Series VZA4000 Dimensions: Body Ported 2 position single: VZA4121-01 2 position double: VZA4221-01 2-3.4 Mounting hole 2-3.4 mounting hole Pilot port (A side) Pilot port (A side) Pilot port (B side) Manual override

HRX-OM-X084

4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5

Table of Contents

T0425 (0.5 m) H04-01 (1 pc.) DL04-01 (1 pc.)

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

HRX-OM-W002

4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List of parameters . 5-6 5.3.1 Main Menu . 5-6 5.3.2 Alarm display menu . 5-6 5.3.3 Notice for maintenance Menu . 5-6 5.3.4 Monitor Menu . 5-7 5.3.5 Standard setting menu . 5-8 5.3.6

KJ

Weight Color of release button Model KDM10-01 KDM10-03 KDM10-07 No. of connecting tubes 1 8 5 32 1 4 5 16 1 8 5 32 1 4 5 16 300 g 10 Red KDM10-09 520 g KDM20-01 20 KDM20-03 520 g KDM20-07 KDM20-09 950 g KDM20 Applicable Tubing Tubing material Tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Flow Rate and Effective Area AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 Universal type 3.2 6 8 10 12 3.2 6 10 4 6 8 JIS Symbol 4 4 8 10 12 Metric size 6 10 Tubing O.D. 1/8" 5/32" 1/8" 5/32" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 3/16" 1/4" 1/4" 5/16" Inch size 3/16" 1/4" 5/16" 3/8" Flow Direction Symbols on Body Meter-out type Meter-in

E-P HYREG ® Series VY1 1

Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VY1D00-5 VY1B0-5 VY120-5 1 V V V 0 1 2 3 4 5 0 1 2 3 4 5 0 1 2 3 4 5 A VY1D00-6 VY1B0-6 VY120-6 A 1 1 1 1 V V V 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 VY1D00-7 VY1B0-7 VY120-7 1 A 2 2 2 mA mA mA 4 0 8 12 16 20 4 0 8 12 16 20 4 0 8 12 16 20 VY1D00-8 0 5 10 15 20 VY1B0-8 0 5 10 15 20 VY120-8 0 5 10 15

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

M 1/8 1/4 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 12 14 12 24.5 26.5 27 29 30 31.5 35.5 36.5 38.5 41.5 23.2 27.2 24.4 28.4 26.6 29.4 32.1 33.1 34.3 38.3 4 5 5 6 8 9 13 14 15 18 KPL04-01 KPL04-02 KPL06-01 KPL06-02 KPL08-01 KPL08-02 KPL10-02 KPL10-03 KPL12-03 KPL12-04 4 18 20.7 3.5 10.4 3.5 10 D1 6 19.5 22.8 9 12.8 9 D2 L2 A 14 8 21.5 26.3 15 15.2 22 12 H Connection threads 10 24 29.4 25 18.5 35 17

SYJA3000

port) (Piping port) 21.5 R1 P 8.5 6 6 R2 15 1.8 (Bleed port) With filter (80 Mesh) 217 17 21 45.5 24 32 3 position closed center/exhaust center/pressure center: SYJA5 20-M5 3 position closed center/exhaust center/pressure center: SYJA5 40-01 3 4 5 3 4 5 28 2-M5 X 0.8 4.3 22-M5 X 0.8 37.5 23 (Pilot port) (Mounting holes) (Pilot port) (Mounting holes pitch) A B 1 A B 11 5 3 1 24 A B 1 1 R

Table of Contents

5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

Precision Regulator

Description IR1000 IR1010 IR1020 IR2000 IR2010 IR2020/2120 IR3000 IR3010 IR3020/3120 P362030-201 Bracket P36201023 P36202028 Pressure gauge234 G33-2-01 G33-10-01 G43-2-01 G43-10-01 G43-2-01 G43-4-01 G43-10-01 G33-4-01 G43-4-01 1 A bracket and two mounting screws (M5 x 35) To mount the bracket, remove two body screws (M5 x 30) on the name plate on the opposite side and replace the attached

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

(Tightening torque of 0.3 to 0.4 Nm) Clamp screw B 2.10-23 3 Port Solenoid Valve VQZ100/200/300 Valve Single Unit Base Mounted Plug Lead Unit How to Order Valve VQZ100 VQZ 1 1 5 5 M 01 Series 1 VQZ100 Body width10mm Port size {2(A)port} Without sub-plate Rc(PT)1/8 01 CP Configuration (A) 2 N.C. 1 1 (P) 3 (R) Manual override B: Locking style (Slotted) : Non-locking push style (Flush) Body

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...