Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: Rc, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: G, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

VFR

C8 (A, B port) D side Bottom ported: VV5FR2-01TStation 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) With terminal block (One-piece junction cover): VV5FR2-01T1Station 1Port size U side 5n-Rc 1/8 (Pitch) P = 28 Stations 2n-Rc 1/8, 1/4 C6, C8 (A, B port) D side Bottom ported: VV5FR2-

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)