New

Model Q R U T Q R 99.5 99.5 20 20 196 231 68.5 68.5 47.5 47.5 20 20 VXF25A< VXF26A< Q R U 196 231 23 23 20 20 202 237 U 16 Series VXF2 Dimensions: Flange type VXF25B<<B B A A C C U S S S J J z300 Q R I 1/2 Exhaust port 24.4 Q z300 1/2 Exhaust port K I R K 24.4 (Y) E H (X) L L H (X) E U (Y) Z Z DIN terminal B A C T Q J

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

CV/MVGQ

MK(2) RS Q G Width across flats Socket Bore size (mm) RS H A Nut JIS B 1181 Class 3 Intermediate M8 x 1.25 JIS B 1181 Class 3 Intermediate M10 x 1.25 JIS B 1181 Class 3 Intermediate M12 x 1.75 RZQ 40, 50 13 JIS B 4636 + 2 point angle socket 13 63 17 JIS B 4636 + 2 point angle socket 17 MI W S 80, 100 19 JIS B 4636 + 2 point angle socket 19 CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

arm position 9 4 x M8 x 1.25 Depth 12 A B C D Same as the port side 48 32 7.5 42.5 LOCK 90nfrom the port side 180nfrom the port side 80 Dustproof cover (Manual unlocking unit) 270nfrom the port side D Clamp arm 2 x Rc1/8 Port side C A 49.5 45 B Hole diameter Hole diameter Model Model Model Hole diameter SR C d Q D K SR C d Q D K SR C d Q D K of workpiece of workpiece number number number

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4 u t t q t u y !3 u e !3 !8 t y e !2 !1 !3 !6 r A A A A !4 i u q i !4 r y t y !2 o !5 r u t q !5 e i o !2 r Component Parts No. Description Material Note No. Description Material Note Body A O-ring PBT NBR q !3 Elbow body O-ring PBT NBR w !4 Body B O-ring Electroless nickel plated Brass NBR e !5 Body B O-ring Electroless nickel plated Brass NBR r !

Rotary Actuator/Vane Type

q END w END q A B A B B A Switch for rotation END q Switch for rotation END q Switch for rotation END w Switch for rotation END w Auto switch B port A port * Solid-lined curves indicate the rotation range of the output shaft with single flat (key).

ZP

width across flats 12 Hexagon width across flats 3 3 Y 2.5 2 A B A B Stroke 20 to 50 mm Stroke 20 to 50 mm Dimensions: 10 mm Stroke Dimensions: 10 mm Stroke (mm) (mm) Model A B C D F H I J K P Q: 6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

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DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

DM1 M2 Body (B) N 20Body (A) 2-R A port J E2 H E1 F S N A port B port 2-R Y Y A1 M1 A2 P 6-Q X A1 For single vane: Above illustrations show actuators for 180 when B port is pressurized.

Hydraulic

+ l R J MM FY BB D E e Air release Width across flats G K F MA l C f Air release 10 NA FT A SS NB B SS+ Q + l + Stroke S + Stroke FX M H ZZ + Stroke ZZ + Q + l + Stroke FZ (mm) With rod boot Stroke range (mm) Bore size (mm) l e J B BB C F GA GB M NA NB P R S FD FT FX FY FZ SS f Q B-rod C-rod B-rod C-rod M10 x 1.25 32 58 62 38 16 21 15 11 37 31 3/8 39 130 11 11 88 40 109 30 21.5 15 52 25

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w No. q w e r t y u i o !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

When P2 + 0.1 b, choked flow P1 + 0.1 293 Q = 600 x C (P1 + 0.1) (1) 273 + T When P2 + 0.1 > b, subsonic flow P1 + 0.1 2 P2 + 0.1 b P1 + 0.1 Q = 600 x C (P1 + 0.1) 1 (2) 1 b 293 273 + T Glossary of Terms Specific Product Precautions 54 JSX/JSXm Series Q : Air flow rate [L/min (ANR)] C : Sonic conductance [dm3/(sbar)], dm3 (Cubic decimeter) of SI units = L (liter) b : Critical pressure

Stability of suction position,

0 % b % b % b % b e u e u y e u y e u e o ZP3 u y y y ZP3E ZP3E % a % a % a % a % a ZP2 q w q w q w q w q w ZP2V Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) ZP ZPT ZPR Component Parts (Male thread) Component

ZP

-A22 ZPT125 50-(B/N/T)01-A22 ZPT125 75-(B/N/T)01-A22 ZPT125 100-(B/N/T)01-A22 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T1 25-(B/N/T)01 ZPB-T1 50-(B/N/T)01 ZPB-T1 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T2 25-(B/N/T)01 ZPB-T2 50-(B/N/T)01 ZPB-T2 75-(B/N/T)01 ZPB-T3 25-(B/N/T)01 ZPB-T3 50-(B/N/T)01 ZPB-T3 75-(B/N/T)01 ZPB-T3 100-(B

Air Cylinder Series CM2

A B B B A B A B A B A B A 20 25 32 40 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 6.5 5.5 10.5 9.5 1 0 6 4 3 0.5 0 6 5 2.5 1.5 7 7.5 6.5 11.5 10.5 2 1 7 5 4 1.5 0.5 7 6 3.5 2.5 8 13.5 11.5 17.5 15.5 7 6 12 10 9 6.5 5.5 12 11 8.5 7.5 13 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Electric Actuator/Slider Type

How to Order LEFS 32 R T7 B 200 B S 5 S2 q w e r t y !

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AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

LVQ

Construction Basic type N.C. type PB PB Double acting type N.O. type q q q PA PA A B A B A B A B B A e w e e With indicator With bypass With flow rate adjustment t r PA PA r A B A B A B A B Description No.