PFxx-OMX0007

R/W AoUt (Setting of analogue output) U8 0 Y 0: 1 to 5 V 10 to 10 V Setting of analogue output (Voltage output type only) 1 R/W FrEE (Setting of free range mode) U8 0 Y 0: oFF (Unused) 1: on (Used) Setting of free range mode 2110 0x083E Setting range 0x0190 to 0x1068 (400 to 4200) 2 R/W F_H (Set value of free range) S16 4000 Y Set value of free range Rated value 10% to 105% SAVE (Accumulated

Electric Actuators

Series LEPS RoHS LEPS 10 K 50 1 1 R 6N q w e r t y u i o !

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

/

External pilot solenoid SGH 1 Y A G 1 T Z B1 10 0 30 3 SGHA 1 A G B1 10 0 3 30 Air operated q w e r t y u i o !0 !1 !

CKZ2N

D E E F G 6F7+0.010 +0.022 through F G 20 0.03 10 3 20 0.03 30 0.025 30 0.025 10 H 9 through 30 0.025 30 0.025 I 9 through M6 x 1.0 H I 15 0.03 15 0.03 30 3 25 0.05 R45 50 0.05 6.5 6.5 18 10 10 18 R25 19 R6 R6 R25 19 19 19 NAAMS code A Weight kg (lbs) NAAMS code A Weight kg (lbs) B C D E F G H I B C D E F G H I Part no.

Power Clamp Cylinder

30 to 90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.

CE

Auto switch model Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CE

/A80 D-A7H/A80H D-A73C/A80C 12 10 11 12 12 10 D-A79W 16 14 14 13 13 13 D-A9/A9V 11.5 9.5 9.5 9.5 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W/F7NTL D-F7BAL/F7BAVL/F79F 6.5 6 6 6 5.5 5.5 D-M9/M9V D-F9W/F9WV D-F9BAL 4.5 4.5 4.5 4.5 6 5.5 5.5 5.5 Since this is a guideline including hysteresis, not meant to be guaranteed.

CE

Bore size (mm) 12 20 10 3 D-A9/A9V 6 D-M9/M9V D-F9W/F9WV D-F9BAL 2.5 3 5 Since this is a guideline including hysteresis, not meant to be guaranteed.

44

Applicable tubing M L1 KFG2 KFG2 6 4 5 9 10 16 5.8 3.3 H1 d MS 8 6 14 12 14 18.4 6.6 5.3 A L2 H2 KKA H3 10 7.5 25 6.8 KP Connection thread 15 17 21.4 7.6 10 8 29 7.3 LQ MQR 12 9 38 23 8 16 17 8.5 T 12 10 48 24.5 9 IDK 16 13 86 21 22 26.7 9.3 12 Reference dimensions after installation of R thread 325 KFG2 Series Applicable Tubing: Metric Size, Connection Thread: R, Rc Dimensions Female Connector

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

(Except 50) MY1MW16/20/50/63 MY1CW16/20/50/63 L L L L L L R R R R R R R L L R R R L L L R Slide table operating direction MY1MW25/32/40 MY1CW25/32/40 L L This port is not available for use. (Except 32, 40) L L L L L L L L R R R R R R R R L L R R L L L R Slide table operating direction 8-12-3 4 Series MY1W Specific Product Precautions 2 Be sure to read before handling.

7.4

VQ1000-FPG-C4M5-D: 6 sets Double check block 757 S0700 Series Construction Body Ported Construction 2(B) (A)4 S0716 2-Position Single r u e w q 3(R2) (R1)5 1 (P) t y i 2-Position Double S0726 2(B) (A)4 r u e w q 3(R2) (R1)5 1 (P) t y i 3-Position Closed Center S0736 r u e w q 2(B) (A)4 (R1)5 1 (P) 3(R2) t y i 4-Position Dual 3-Port Valve S07A6 r u e w q 2(B) 4(A) 5(R1) 3(R2) 1(P) N.C. + N.C

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Elbow type Universal type Port size Metric size Inch size 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS131FG-M5 AS121FG-M5 M5 x 0.8 AS231FG-01 AS221FG-01 R 1/8 AS231FG-02 AS221FG-02 R 1/4 AS331FG-02 AS321FG-02 R 1/4 AS331FG-03 AS321FG-03 R 3/8 AS431FG-04 AS421FG-04 R 1/2 AS131FG-U10/32 AS121FG-U10/32 10-32 UNF AS231FG-N01 AS221FG-N01 NPT 1/8 AS231FG-N02 AS221FG-N02 NPT 1/4 AS331FG-N02

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

R 3/8 R 1/2 10-32 UNF NPT 1/8 0 1 Meter-out Meter-in Be sure to read before handling.

Modular Type Filter Regulator Series AW

R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G H 1 2 6 8 C J N R W Z With bracket (with set nut) Accessories Float type auto drain (N.C.)

Manifold Specifications

VK Applicable solenoid valve Type 25 (Non plug-in type) How to Order D 25 05 00C VV4Z1 VZ 4(A), 2(B) port G L M D G L M D VZ1120-M5 Stations VF VZ110-M5 (3 port valve) 02 2 stations 1(P), 3(R) port One-touch fitting for 6 VFR Applicable blanking plate assembly VZ1000-10-2A 20 20 stations SUP/EXH block mounting position VP4 DIN rail length specified B D U Both sides: 2 to 20 stations D side

Soft Start-up Valve

P X Built-in silencer (Option) 3(R) Q S L K R AV5000-A Flow adjustment needle at low speed air supply D D 2 x W 4 x W Y V Y U H H U Dimensions [mm] Standard specifications Port size A B C D E F G H J 1(P) 2(A) 3(R) Model AV2000-m02-1 to 6D/Y(Z)m-A 1/4 1/4 1/4 66 97 47 24.5 40 96 33 Width across flats 22 58 AV3000-m03-1 to 6D/Y(Z)m-A 3/8 3/8 3/8 76 97 50 29.5 40 96 38 Width across flats 24

Programless Controller Series LECP1

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 65 Programless Controller Series LECP1 Precautions Model Selection Details of The Controller e r Details No.

reduces flow setting time

Series Construction: Universal Type Seal method: Gasket seal For M5, 10-32UNF Seal method: Sealant For R, NPT thread r !