Exhaust Cleaner for Clean Rooms AMP Series

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

VK3000

VK VZ NL: Neon light R: Resister LED: Emitting diode R: Resister D: Protective diode LED: Emitting diode R: Resister VF DIN terminal Light/Surge Voltage Suppressor VFR Caution VP4 Grommet type (G) Rated voltage DIN terminal (D) Part no. symbol W/o indicator light With indicator light W/o indicator light With indicator light W/o indicator light With indicator light VZS Caution S VFS Markings

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Approx. 280 D F Approx. 300 F Q Q Class H coil Broken line section C C G 1/2 R R E E A H A H B B 2-P Port size 2-P Port size 2-M, thread depth N 2-M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6.8 to 10 F S Q 27.5 (Q) D F 25 C R C (44) R R E G 1/2 E G 1/2 A H D (S) B B A H 2-P Port size 2-P Port size 2-M, thread depth N 2-M L L K K N.C. dimensions (mm) Grommet: G Conduit

LG1H

Nil T Nil W Motor specification G R Y Matsushita Electric Industrial Co., Ltd.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

VXA21/22

VXA22 , , 18 21 9 10.5 40 45 21 27 55 62 64 71 11 13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible

FQ1

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved Printed in Japan. 1st printing January, 2001 D-SMC.L.A. P-80 (N) All specifications in this catalog are subject to change without notice. This catalog is printed on recycled paper with concern for the global environment.

ARJ1020F

(M5: 1.5 to 2 Nm, R 1/8: 7 to 9 Nm.) Excessive torque or holding it other than at the specified area could lead to equipment damage.

RHC

O.D. 6.8 to 11.5) G 1/2 (Applicable cable O.D. 6.8 to 11.5) 10-6-16 16 High Power Cylinder Series RHC Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Proper Auto Switch Mounting Position Auto Switch Mounting Height D-B5/B64 D-B59W D-G5/K59 D-B5 D-B64 D-H7 D-H7C D-H7NF D-H7W D-H7BAL D-G5 D-G5W D-G5NTL D-G5BAL D-K59 D-K59W D-B59W D-A33 D-A44 D-G39 D-K39

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

2/3 Port Solenoid Valve for Chemicals

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2003 SMC CORPORATION All Rights Reserved 1st printing August, 2003 D-YGA P-120 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Air-hydro Unit

VNA VNA 2 1 2 1 2 1 VNA VNA D-X Technical Data 1177

Compact Manifold Regulator

AR425 to 935 Nil A B C D E F G H J K L M N O P Q R ARX AMR ARM ARM With pressure guage With digital pressure switch ARP IR-A Common supply block Common supply block with pressure switch IR L side L side IRV VEX Note 1) Pressure display means a pressure gauge or digital pressure switch is attached.

AC Servo Motor Driver (SSCNET Type)

Acceleration/ deceleration time 0 ~ 50 ms Set the time until the servo motor reaches/stops to the rated speed (3000 r/min) Move distance 0 ~ 2147483647 pulse Sets movement distance. -35- 6.6.2 Motor speed Configuration Motorspeed (r/min) configuration. * r/min (rpm): Indicated motor rotation speed (motor rotations/min) Rotation speed must be between 0 and the

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B A B A 0.6 P R R P R R Pilot pressure MPa Pilot pressure range SS5YJ3-41-03-M5T SYJA3140 SYJA3240 SYJ3000-21-2A 0.5 3 Position pressure center 3 Position pressure center 1pc. 1pc. 1pc. 1pc. 0.4 B A B A 0.3 P R R P R 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure MPa 18 18 18 18 18 18 Air Pilot Drawings Series SYJ3000 (mm) Body Ported Type / Dimensions Base Mounted Type / Dimensions

q"s

P S I : 0 . 1 N d r a ' . k P a : 1 Ambient and lluid temoeralure 0 to 50'C {with no condensation) Enclosure tP65 Hated pressure I Weight tw10trn ADorox. 250 a {without options) tw20t Aoorox. 350 q (without options) tws0 Aoprox. 645 q (without options) R = ='5 Note 1) Please refer to graph 1, relation lo lhe ditferences belween lhe sel pressure and input.

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

HRX-OM-W069

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

CC

-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AS2000-01/02 AS600-10 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) No load No load Load ratio Load ratio Bore size (mm) Bore size (mm) AS4000-02/03/04 AS3000-02/03 Piping bore Piping bore Cylinder driving speed (mm/s) Cylinder driving speed (mm/s) Circuit diagram No load No load Load

CM2

/B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C80 D-C73C D-C80C D-C7/C8 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-H7C D-B59W D-A3A D-G39A D-K39A D-A44A D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-A3A D-G39A D-K39A D-A44A D-G5NTL