MGP

75mm stroke V = 200mm/s 20 20 25 10 10 25 Load weight m (kg) Load weight m (kg) 20 20 5 5 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 7 25mm stroke V = 200mm/s 8 Over 25mm stroke V = 200mm/s 100 100 63 63 50 50 50 50 Load weight m (kg) Load weight m (kg) 40 40 32 32 10 10 5 10 50 100 200 5 10 50 100 200 Eccentric distance l (mm)

q"s

Power supply voltage 0 Current 4 to 20 mA {Sink tvoe} I Current 01o 20 mA (Sink tvDe) Voltaoe0to5VDC Voltaoe 0 to 10 VDC 4 Preset inout ' option Cable connector type Thread type Port size Bracket 1/8 (1000 type) 2 1/4 (1000. 2000. 3000 tvoe) 3/8 (2000. 3000 tvoe) 4 1i2 (3000 tvDe) Wilhout bracket B ' Flat bracket L-bracket * Oplion Option %wm * oplion Electro-pneumatic Resurator Series ITV

Refrigerated Air Dryer

, IDF6E-10 IDF8E-10, IDF11E-10 Type 100 V 10 A IDU3E-10, IDU4E-10 IDU6E-10 30 mA IDF4E-20, IDF6E-20 IDF8E-20, IDF11E-20 Type 200 V 5 A IDU3E-20, IDU4E-20 IDU6E-20 S Option symbol IDF1E-10 to 11E-10, IDU3E-10 to IDU6E-10 With power cord connection The option allows the connection of a power cord to a terminal block.

ZX

Internal orifice Hysteresis 0.5 0.8 0.5 kPa ZX Adsorption confirmation switch Adsorption nozzle Weight62 g Voltage12 to 24 VDC (Ripple 10% or less) OutputOpen collector 30 V/80 mA Indicator lightLight at ON state Current consumption17 mA (24 VDC, at ON state) Operating temperature range0 to 60C Port sizeM5 x 0.8 Note) If not operated within the specified range of pressure and temperature

PSxx-OMS0006CN

V10 (p-p)10 25 mA 2% F.S.1 digit(253 ) 0.2F.S.1 digit 2%F.S.(25 ) NPN PNP 1 OFF 80 mA (NPN) 28 V () 1 V (80 mA ) 1 1.5ms (20,100,500,1000,2000,5000 ms ) 2 0 2, 2,bar,psi,InHg,mmHg MPa,kPa,kgf/cm 3 MPa,kPa,kgf/cm bar,psi LCD 3 (X2) 1)/ 2) 1)4 (7 ) 2)4 (1 11 7 ) ON OUT1 4 0,10,50,100,500,1000,5000 ms -62No.PS-OMS0006CN-G ZSE20() ZSE20F() ISE20() IP40 AC1000 V 1 50 M(DC500

HRX-OM-W060

P.5-10 It indicates the set temperature. (10) Circulating fluid set temperature P.5-10 CH2 Press the numeric section to change the set temperature. (11) Circulating fluid discharge pressure It indicates the discharge pressure.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

, 40 mA, 20 mA IC circuit, Relay, PLC No Reed auto switch D-A90 D-M9B, D-F8B D-M9N, D-F8N 2-wire 3-wire 24 VDC relay, PLC 24 VDC relay, PLC Solid state auto switch Yes 24 VDC (10 to 28 VDC) 24 VDC (4.5 to 28 VDC) Yes 2.5 to 40 mA 40 mA or less Refer to page 920 for the applicable auto switch list. 909 Rotary Table MSQ 1122Specifications Suction Flow Rate of Vacuum Suction Type (Reference

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

0.4 MPa setting (Ex.)10-ARP30-02BG 0.005 to 0.4 MPa Set pressure range Note1) 0.2 MPa setting (Ex.)10-ARP30-02BG-1 0.005 to 0.2 MPa 0.6 MPa setting (Ex.)10-ARP30-02BG-3 0.008 to 0.6 MPa Within 0.2% F.S.

K35-OMX0029

No. 1 Moving Relationship between the analogue input signal direction and the piston rod movement direction 4 mA 20 mA OFF (Default) Standard Set point (*1) Piston rod Retracted end 20 mA 4 mA ON Reverse Piston rod Set point (*1) Retracted end *1 Set point: Position set by Calibration. Refer to "7-2. Calibration" of Operation Manual (K35-OMW0030). 2-2.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

Pressure switch for energy-saving control ejector with N.O. type valve

connection) Current consumption 40 mA or less Switch Output Output type NPN or PNP open collector OUT1: General-purposeOUT2: Valve control Max. load current 80 mA Max. applied voltage 26.4 VDC Residual voltage 2 V or less (at load current of 80 mA) Response time 2.5 ms or less (with anti-chattering function:20, 100, 500, 1000, 2000 ms) Short circuit protection Yes Repeatability 0.2%F.S.1

Digital pressure switch for energy-saving control ejector

ZQ-OM01501 Specification Specifications Rated pressure range 100.0 to -100.0 kPa Set pressure range 105.0 to -105.0 kPa Proof pressure 500 kPa Min. display unit 0.1 kPa Applicable fluid Air, inert gas and non-flammable gas Power supply voltage 24 VDC 10%, ripple max. 10%pk-pk (with polarity protection ) Current consumption 40 mA or less Switch Output NPN or PNP open collector OUT1: General-purposeOUT2

EXxx-OMU0020CN

LED / MAC 1XD1 2XD2 PROFINET IO 2XF2 SCRJ PROFINET IO 1XF1 SCRJ . 6-1 EX245-SPN1 44 No.EX-OMU0020CN 6.2. . 6-1 EX245-SPN1 (WLH) mm 85148.5130 1000 g PBT 8 128 64 () /US1) 300 mA (US1 / US2) XD1/2 10A DC24 V 10% : DC 20.4 V : DC 21.6 V US1 6 A DC 17 V DC24 V +10%/-5% : DC 21.6 V : DC 22.8V US2 4 A / DC17 V US1-US2 SY3000/5000/7000, SV1000/2000/3000, VQC1000

Digital pressure switch for energy-saving control ejector

with polarity protection ) Current consumption 40 mA or less Switch Output NPN or PNP open collector OUT1: General-purposeOUT2: Valve control Maximum load current 80 mA Max. applied voltage DC26.4 V Residual voltage Max. 2 V (at 80 mA load current) Response time 2.5 ms or less (response times available for anti-chattering function: : 20, 100, 500, 1000 or 2000 ms) Short circuit protection

PSxx-OMT0001CN

(p-p)10() 25 mA 2 (NPN PNP) 10 mA 26.4 V 1 V (10 mA ) 2 LCD 3 7 (/) 6 7 () IP67 8 050 -2070 () 3585RH() AC1000 V 50/60 Hz 1 2 M(DC500 V ) Rc1/8 C 4 6 G1/8(ISO1179-1) F G1/8(ISO1179-1) -15No.PS-OMT0001CN-E 2 ISA3-F ISA3-G ISA3-H M12-4 4 4 5 m 0.72 mm 1.14 mm M12-4 4 4 1.14 mm 23 8 6 5 m46 14 6 5 m 0.50 mm 1.00 mm(26 ) 113 g() CE (EMC RoHS ) 120 2F 3

ZSE F/ISE

ZSE50F / ISE50 1 x 10 -5 Pam3/s ZSE60F / ISE60 1 x 10 -10 Pam3/s IP65 Enclosure Panel mount With bracket Option Panel mount + Front side protection cover To confirm working pressure of hydraulic cylinder Application examples To confirm adsorption of workpieces containing water To confirm primary pressure of cleaning line 16-2-26 3 High precision and high resolution 1/2000 (0.1 kPa) Positive

Refrigerated Air Dryer

Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Digital Gap Checker

Hysteresis 0 to variable 7 Withstand pressure 600 kPa Detection nozzle 1.5 4 Current flow 5 L/min or less 12 L/min or less 22 L/min or less Power supply voltage 24 VDC 10%, Ripple(p-p) 10% or less (with power supply polarity protection) Current consumption 25 mA or less Switch output 2 output (NPN or PNP) Max. load current 10 mA Max. applied voltage 26.4 V Residual voltage 1 V or less (at

ISA2

200 kPa Supply pressure Consumption flow rate l/min (ANR) Power supply voltage Current consumption 12 to 24 VDC, Ripple (p-p) 10% or less (With power polarity protection) 15 mA or less Switch Output NPN open collector: one output PNP open collector: one output NPN open collector: one output PNP open collector: one output 80 mA 30 VDC (at NPN output) 1.5 V or less (at 80 mA) Yes Maximum load