High Vacuum Angle Valve

How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !

Battery-less

5 r t w q y !6 !

JXCx-OMT0061CN

(P.29) CC-Link 11CC-Link 11 0 () 10 11.2 (P.50) 4.3 PLC PLC PLC CC-Link Ver. 1.10 Ver.2.00 CC-Link (Q ) PC :QCPU(Q ) PC :Q00UJ (RxRy)(RWrRWw) 10.1 (P.32)PLC (Rx) X1000 (Ry) Y1000 (RWr) W0 (RWw) W1000 (SB) SB0 (SW) SW0 PLC LECPMJ 1 LECPMJ 2 2 Ver.1 4.1 (STATION NO. B RATE) (P.17) PLC 18 - 5. CN1~5 5.1 CN1: DC24V CN1 (DC24V) 6.

AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Stability of suction position,

0 r r r o e e e e u u y w u u w t u w t y y y y w t q w t q t q q q Male thread (for direct mounting) With male thread adapter (Vacuum inlet: Vertical) With male thread adapter (Vacuum inlet: Lateral) With female thread adapter (Vacuum inlet: Vertical) With female thread adapter (Vacuum inlet: Lateral) Component Parts No.

CQ2

Note No. q w e r t y u i o !0 !1 !2 !3 !

42

Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ SZ VF VQ5150 VQ5151 (A) 4 (B) 2 (A) 4 (B) 2 VP4 VQ 1/2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 4/5 VQ 4/5 q w e q w VQC 1/2 VQC 4/5 VQZ SQ (A) 4 (B) 2 VQ5251 VQ5250 (A) 4 (B) 2 VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3

MY1

Special resin Carbon steel Description No. q w e r t y u i o !

Electric Actuator/Slider Type

How to Order q w e r t y u i o !

15

Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy e Motor mounting position r Motor type t Lead [mm] y Stroke [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Nil In-line R Right side parallel L Left side parallel Symbol Type NZ Mounting type Z NY Mounting type Y NX Mounting

Aluminum High Vacuum Angle Valve

0 o 102 0.2 2-1 132 q 134 O-ring Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

New

Grommet (with surge DIN terminal Conduit terminal voltage suppressor) fitting P Q R Q R Q R S Q R S T 1 2 3 C6, C8 1.06 1.16 1.26 1.67 2.01 2.22 1.18 1.28 1.38 1.14 1.46 1.69 2.54 2.64 2.74 1.36 1.69 1.91 2.07 2.17 2.26 3.92 4.02 4.11 1.44 1.77 1.99 2.70 2.80 2.89 3.21 3.60 3.88 C8, C10 C10, C12 21 Series VX2 For Air Dimensions/Body Material: Resin inch Conduit Faston type Y Y W W U U X

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Q Q Q 25 Q Q Series VQZ Base Mounted Type Construction VQZ100 Poppet type N.C.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Flange bracket material: Carbon steel 7-6-19 20 Series CQ2 Accessory Bracket Double Knuckle Joint Single Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Material: Cast iron Material: Carbon steel Material: Cast iron Courtesy of Steven

C85

1 y q r e i !2 o !

D. P. Lube ALD600/900 Series

Lube Unit/ALDU600-06 to 10, ALDU900-12 to 20 Float switch mounting position Mounting thread M12 R 3.2 S 40 Q IN P M N M L A B C E E F G K J (Bracket mounting dimensions) H D S Bracket (Option) Panel (Option) 6 x 17 A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 289 291.2 453 453 476 24.5 13.6 51 45.5 14.5 69.5 78.2 89 94.5 102.5 4

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

O-ring Pressure drop (kPa) 10 IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.