REC Mounting hole F N N Z CE1 S+Stroke H 40 ZZ+Stroke CE2 Standard port ML2B Relieving port ML1C (mm) 2-7 FT FX FY FZ B1 D A AL B B2 F G H E Bore size Stroke range Mounting hole REA 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 4 60 75 13 8 18 15.5 34 26 13 10 41 150 to 700 20 FX 25 4 60 75 17 10 22 19.5 40 32 13 10 45 150 to 700 26 REC 32 4 60 75 17 12 22 19.5 40 32 13 11 45 150 to1000 26 20, 25,
x 0.7 45 Width across flats 24 3-M3 x 0.5 28 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B D B D Dimensions Dimensions (mm) (mm) A B C D E G H I Y A B C D E G H I Y F F Model Model ZPX40HB-B01-B8 ZPX63HB-B01-B10 M8
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
181 247 Axial foot style: RECL G H Width across flats B2 F G K A NA 2-RcP F AL Standard port 2-NN Pluged (M5 x 0.8) H1 H2 Width across flats B1 I D C B 4-LD LH MM 2-4 3.2 N N X X Y S + Stroke Y LX Z LS + Stroke LZ ZZ + Stroke (mm) A AL B B1 B2 C D F G H H1 H2 I K LD LH LS LX LZ MM N NA Bore (mm) Stroke range 20 M8 x 1.25 Up to 700 18 15.5 40 13 26 40 8 13 10 41 5 8 33.5 5 6.8 25 186 40 55
) EH5 kPa EH5 kPa EPL:25kPa EPH:50kPa -46No.PS-OMT0001CN-E 4 (1)(100 kPa200 kPa) (2) () (1) OUT1 (2) OUT1 1 () (3) OUT2 (4) [F 2](52 ) OUT [EPH] OUT [EPL] (5) -47No.PS-OMT0001CN-E 4 2 [F 0] [F] 2 [Function ][]] F 0(Unit) [ PA] kPa 49 ISA3-F[ 20] ISA3-G[ 50] ISA3-H[ 50] F 1(oUt1) OUT1 50 ISA3-F[ 3] ISA3-G[ 20] ISA3-H[ 20] [ SoG] ON OFF out2[ Ewin] OUT 2ot[ 2_P] F 2
S. or l ess H yst eresi s F. S. or l ess Repeat abi l i t y F. S. or l ess Sensi t i vi t y F. S. or l ess Tem perat ure charact eri st i cs F.
C type snap ring for hole Bracket 16 Series MGG Dimensions Basic type/MGGB 20 to 50 4-F through, counter bore G Bottom 4-H Bracket (See table below.)
[ oFF] 57 -46No.PS-OMR0001CN-J 4 [F 0] M 2 [F 0] [Unit][] kPa Bar PSI 2 -47No.PS-OMR0001CN-J 4 [F 1] P_1 H_1 ISA3-F ON () OFF () () () ISA3-G ON () OFF () () () ISA3-H ON () OFF () () () ON() OFF() -48No.PS-OMR0001CN-J 4 2 [F 0] [F 1] [oUt1][HYS] P_1 H_1 ON ON OFF OFF 2 1 () -49No.PS-OMR0001CN-J 4 [F 2] -50No.PS-OMR0001CN-J 4 [F 6] 20R.D. 2 [F 0] [F 6] [FSt][
(mm) A B C D E F G H J L Port size Bracket part no.
Class Stainless steel, NBR O-ring t y u t y u FKM, EPDM, PTFE FKM, EPDM, PTFE NBR O-ring NBR Return spring Stainless steel Return spring Stainless steel Body Stainless steel Brass Stainless steel Body Brass Dimensions: Bracket A J 4-G C 1.5 B D L E 4-H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) A B C D E F G H J L Port size Bracket part no.
P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive
P. 551 0 F1 H J1 J2 Q R1 R2 V ZB Without SI unit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System 3 2 1 4 Note 2) 3 2 1 4 Max.16 stations 4 3 2 1 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 outputs) Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (8 outputs) DeviceNet OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-Link CompoNet (Positive
Series MQQ Dimensions Standard type (through hole and double end tapped)/MQQTB 10, 16, 20 H effective thread depth C 2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB F Q Y I 4-N through M 0.2 D E L B + Stroke K A + Stroke M 0.2 E 25, 28 H effective thread depth C 2-Rc 1/8 F Q Y 2 x 4-OA effective depth RA 2 x 4-OB Depth of counter bore RB J I 4-N through M 0.2 D W
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
B2 G F K A REB F AL NA 2 x NN Plugged (M5 x 0.8) Width across flats B1 H2 H1 I REC CY D C B 4 x LD LH CX MM N N 2 x 4 Width across flats KA 3.2 MQ S + Stroke Y X LZ LX Y X Z ZZ + Stroke LS + Stroke RHC (mm) RZQ A AL B B2 F G H H1 H2 I K KA D B1 C LD LH MM LS LX LZ N NA Bore (mm) 20 M8 x 1.25 18 20 15.5 30 40 26 13 10 55 41 8 13 40 186 40 5 8 33.5 5 6 6.8 25 25 M10 x 1.25 22 20 19.5 34.5
QA F Q QB QU QW DBore size (mm) QW QU 29 " 32 40 50 13 13 16 38 42 50 20 24.5 26 7.5 8 9.5 6 6 8 60.5 68 82 -X 20 32 to 50 20B 41.5 45 48 52.5 54 D 10 12 20 25 25 E 29 36 45 52 64 F 6 8 7.5 8 8 G 3 4 8 10 10 H 26.5 33 39 53 53 I 60 69 86 J 4.5 5 7 L 2 2 3 4 4 M 28 36 34 40 50 N 3.5 5.5 5.5 5.5 6.6 O counterbore P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Q 17 20 20 24.5 24.5 S 8 10 18 24
(Symbol F: G3/4, Symbol N: NPT3/4) Tank drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic uid ll system (Standard) Pump capacity Supply side pressure range 29 to 73 psi (0.2 to 0.5 MPa) Supply side uid temperature 41 to 95F (5 to 35F) Automatic uid ll port Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Overow port Rc1 (Symbol F: G1, Symbol N: NPT1) Fluid contact material Stainless steel
/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid outlet, circulating fluid return port Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4) Pump drain port Rc1/4 (Symbol F: G1/4, Symbol N: NPT1/4) Automatic fluid fill system (Standard) Pump capacity Supply side pressure range MPa 0.2 to 0.5 Supply side fluid temperature C 5 to 35 Automatic fluid fill port Rc1/2 (Symbol F: G1/2, Symbol
300 mm 6 600 mm 10 1000 mm 15 1500 mm 20 2000 mm 25 2500 mm 30 3000 mm 50 5000 mm 51 Series SYJ7000 2 Position Single [ ]: AC G H G H Grommet (G), (H): SYJ7120-01 With bracket: SYJ7120-01-F 44 36 2-4.5 (For mounting) 4 26 34 + G: Approx. 300 H: Approx. 600 (Lead wire length) 82 [84.2] 59.8 24.1 28.3 39.5 [46.5] 13 B A 3 Manual override 2-3.2 (For manifold mounting) 35 17 1/8 (A, B port)
5 3 4 5 G H Built-in one-touch fitting: SYJ5 20G H C4, N3 C6, N7 Grommet (G), (H): SYJ5 20-M5 G: Approx. 300 H: Approx. 600 (Lead wire length) 103.2 [107.6] 44.2 [46.4] 36.9 22.1 44.2 [46.4] 3.5 11 5 B A B A 10.6 19 10 M5 x 0.8 (A, B port) Manual override 2-2.6 (For monifold mounting) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" : 6, 1/4" (3.2) 32.3 (Light/surge voltage