, ): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
(3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B)
): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil
Panel adapter B ZS-22-02 Thread type Piping port size Rc NPT G Nil N F 01 02 1/8 1/4 Specifications PFA301-m PFA300-m Model Specifications Note 1) 1 to 10, 5 to 50l/min (0.04 to 0.35, 0.18 to 1.77SCFM) Flow rate range measurement & setting Minimum setting unit 1% of maximum flow rate range Model PFA510-m PFA550-m Real-time flow rate l/min, CFM x 10-2 Display units Measured fluids Dry air,
No base (lncludes subplate gasket and hold dolvn bolts,) ,{vsA 4 0 24 0l = Mounted on Indlvidual SubDlate 1/4" NPTF Side Ports (5) 51 = Mounted on lndlvldual Subplate 1/4" NPIF Slde Pons (5);10-32 Pllot Ports (4) 02 = Mounted on Indivldual Subplate 3/8" NPTF Side Pons (5) 52 = Mounted on Individual Subplate 38' NPTF Side Ports (5); '10-32 Pilot Ports (4) 03 = Mounted on Indlvidual Subplate
For Rc 1/8" AXT954-01 For Rc 1/4" AXT954-02 For Rc 3/8" AXT954-03 For Rc 1/2" AXT954-04 For NPTF 1/8" AXT954-01T For NPTF 1/4" AXT954-02T For NPTF 3/8" AXT954-03T For NPTF 1/2" AXT954-04T For G 1/8" AXT954-01F#1 For G 1/4" AXT954-02F#1 For G 3/8" AXT954-03F#1 For G 1/2" AXT954-04F#1 This is used to plug the cylinder ports when using as a 3-port valve, etc. 26 Series VS 8-2/VS 8-4 S R S R
Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal
Controlled flow Free flow Model Port size Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS2000E-01 AS2000E-02 AS3000E-02 AS3000E-03 AS4000E-02 AS4000E-03 AS4000E-04 90 1/8 340 0.94 250 0.7 115 1/4 1/4 810 2.3 0.35 0.2 810 2.3 130 3/8 1/4 1670 4.6 1670 4.6 225 3/8 1/2 Note
. 4-1 4.2 Starting and Stopping . 4-2 4.2.1 Operation . 4-2 4.2.2 Operation restart when alarm is generated . 4-3 4.2.3 Stopping the product . 4-5 4.2.4 Cautions for re-start . 4-5 4.3 Adjustment of bypass valve . 4-6 4.4 Check items after starting . 4-6 Chapter 5 Display and Setting of Various Functions . 5-1 5.1 List of Functions . 5-1 5.2 Function. 5-2 5.2.1 Key operations . 5-2 5.3 List
Model Weight Weight (g) VFN2000N/Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) VFN2120N-5D-02F 260 400 C 3.48 3.48 b 0.25 0.25 Cv 0.85 0.85 C 4.57 4.57 b 0.17 0.17 Cv 1.06 1.06 VFN2220N-5D-02F 2 position Single solenoid Double solenoid How to Order VFN2 20 1 5 D N 02 F Z Thread type Solenoid Single solenoid Double solenoid 1 2 NAMUR Interface Rc (PT) G (PF
Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Brass Body, FKM Seal, Class B Coil, Option: -, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 3 (110VAC 50/60Hz), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Brass Body, NBR Seal, Class B Coil, Option: F (Foot Bracket)
Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: H (Stainless Steel Body, FKM Seal, Class B Coil)
Series: 350 [3 Port COM (Single Unit)], Voltage: 6 (12VDC), Electrical Entry: W (Grommet / Molded), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: A (Brass Body, FKM Seal, Class B Coil)
Kit type Thread type Port size F T Rc G NPT/NPTF 1 2 S Kit T Kit Symbol C3 C4 C6 C8 C10 C12 N1 N3 N7 N9 N11 M5 02 03 B T02 T03 G02 G03 VQC4000 Port size VQC2000 VQC1000 3.2 One-touch fitting 4 One-touch fitting 6 8 10 12 1/8" 5/32" 1/4" 5/16" 3/8" M5 thread Rc 1/4" Rc 3/8" Rc 1/4" bottom ported 1/4" NPT/NPTF 3/8" NPT/NPTF 1/4" G 3/8" G U-side end plate assembly 12 U-side end plate assembly
B 4-Counter bore depth C MM thread depth M Hollow shaft for piping FA FB EB H S + Stroke HO TT T HP 4-J depth JK HI HG PA Slider Type/Slide Bearing REAS H 2-P HP HG 2-P d D LD A 5.5 NN GP PW PW QW GP PB W HT HT Slider Type/Ball Bushing REAL (11) RW HB HS HB HA L G G View A REAL15 HS Z + Stroke Q + Stroke A High Precision Guide Type REAH N N Max.