Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
ZP : Pad Unit ZP3-10UM;[Weight: 0.6 g] ZP3-13UM;[Weight: 0.7 g] ZP3-16UM;[Weight: 0.8 g] Flat with groove Pad Unit 9 6 4 9 6 4 4 6 9 1.2 2 2 2 2 1 2 2 1.2 7 7 7 Vertical 2 2 2 14 13 11 10 17 16 With Adapter: Vacuum Inlet Vertical With Buffer: Vacuum Inlet ZP3-04B;[Weight: 0.3 g] ZP3-06B;[Weight: 0.3 g] ZP3-08B;[Weight: 0.4 g] Bellows 7 5 3 7 5 3 7 5 Lateral 3 With Adapter: Vacuum Inlet 1.5 2
Body size Port size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF AS 2 0 F A 1 1 M5 06 G Body size 1 AS 2 0 S F A 1 2 01 06 G Body size 2/3/4 Body size Made to Order Refer to page 484 for details. 2 1/8, 1/4 3 3/8 4 1/2 Push-lock type Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Note) Face seal method is used for the G thread type.
: Pad Unit ZP3-10UM;[Weight: 0.6 g] ZP3-13UM;[Weight: 0.7 g] ZP3-16UM;[Weight: 0.8 g] Flat with groove Pad Unit 9 6 4 9 6 4 4 6 9 1.2 2 2 2 2 1 2 2 1.2 7 7 7 Vertical 2 2 2 14 13 11 10 17 16 With Adapter: Vacuum Inlet Vertical With Buffer: Vacuum Inlet ZP3-04B;[Weight: 0.3 g] ZP3-06B;[Weight: 0.3 g] ZP3-08B;[Weight: 0.4 g] Bellows 7 5 3 7 5 3 7 5 Lateral 3 With Adapter: Vacuum Inlet 1.5 2
P L U G VQ 1 2 4 0 1 B L O C K VA LV E 23 04 06 08 01 03 07 Courtesy of Steven Engineering, Inc. !
M5 x 0.8 Y G: M6 x 1 G: M8 x 1.25 G: M4 x 0.7 G: M5 x 0.8 D ZPY02U 2 4 6 8 Applicable tube O.
Panel mounting hole VM120-01-30R/B/G/Y-X219 VM130-01-30R/B/G/Y-X219 40 T.T. 30.5 31 1.5 1.5 0.8 to 7.5 Symbol (85.1) 3 (A) 2 2 port 29.1 10 12 (54.1) 1 (P) P A 3 port 17 5.5 (A) 2 25 R port (3 port only) 14.5 14.5 10 12 1 (P) 3 (R) 25.4 2 x 1/8 17 17 44 0.5 MPa supply T.T.
Series: 350 [3 Port COM (Single Unit)], Voltage: 110VAC 50/60Hz, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 02 [1/4 (8A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 12VDC, Electrical Entry: Grommet / Molded, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -
Series: 350 [3 Port COM (Single Unit)], Voltage: 5VDC, Electrical Entry: Grommet / Tape winding, Orifice: 2 [250 (3 Port) Ø1.6; 350 (3 Port) Ø2], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: Foot Bracket, CE Compliance: -