1.63

32 39 18 21 24 27 32 39 24 30 34 40 46 58 92 113.5 116.5 116.5 135 135 47.5 66.5 64.5 60.5 74.5 67.5 62 63.5 76.5 76.5 85 85 17.5 16.5 24.5 20.5 24.5 17.5 25, 50, 75, 100, 125, 150, 175, 200 Nil TN TF P Bore size (mm) PW Q R S T U V X YY YL Z MM ML NN OA OB OL 20 25 32 40 50 63 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 Rc1/8 Rc1/8 Rc1/8 Rc1/8 Rc1/4 Rc1/4 17 18 26 27 28.5 30

SX

Description Note M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm 1 4 3 8 SY5000-27-1 Rc: SY7000-27-1 Rc: SY7000-27-2 SY3000-27-1 Sub-plate Aluminum die-casted i Gasket o HNBR SY5000-11-15 SY7000-11-11 SY3000-11-25 Round head combination screw For valve mounting (Matt nickel plated) M3 x 30 M4 x 35 SX3000-22-2 (M2 x 24) 1-6-31 Base Mounted 32 Series SX3000/5000/7000 Dimensions: Series SX3000 2 position

CE

18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Grommet terminal DIN terminal 2 to 10 Plug-in type VV5FR3-01(-Q) VFR300-F(-Q) 2 to 8 VFR31-E VFR31-D(-Q) VFR34-G VFR34-E VFR34-T VFR34-D(-Q) Non plug-in type VV5FR3-10(-Q) Note) 3 8 1 4, 1 2 Side/Bottom C8, C10 SJ 2 to 10 Grommet Grommet terminal Conduit terminal DIN terminal Non plug-in type VV5FR3-40(-Q) SY Note) If silencer is mounted to EA/EB port, use silencer AN403-04 (O.D. 27

60

Width across flats 27 14 34 14 34 2 x 5.5 Mounting hole 42 42 B B DIN terminal: D Conduit terminal: T 23 23 (E) G1/2 Cable 6 to 12 K I F I F 34 K D 32 J Width across flats G Width across flats G (E) 14 25 31.5 (44) E E 14 J (L) A (C) C A 2 x H Port size E (E) G1/2 2 x H Port size 2 x 5.3 Mounting hole Mounting hole 2 x 5.3 Width across flats 27 Width across flats 27 42 14 34 14 34 42 B B

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

(37) 5 (15) D-M9, D-M9V 0 15 27 (39) 5 (17) d L d L 8 D-F8 0 15 47 25 D-M9W, D-M9WV 0 15 27 (39) 5 (17) Dimensions by Mounting Style (1) (2) (3) (4) ( ): Denotes the values of D-A9V, D-M9V and D-M9WV.

Prevents Micro-Bubbles

Note 2) A R P N.C. 3 port PA N.C. 17-5-5 3 Series LV Manually Operated Series LVH P. 17-5-27 Integral Fitting Type Model LVH20 4 4, 6 1/8, 3/16, 1/4 LVH30 8 6, 8, 10 1/4, 3/8 LVH40 10 10, 12 3/8, 1/2 Orifice diameter Tubing O.D. Metric Inch Symbol Type Valve type Basic type N.C. A B A B Non-locking Locking Manifold (5 stations max.)

VQ4000

) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External pilot

Vacuum

:Opfion' ,' Note Lead wire with connector zs-27-A Lead wire length: 2m Bracket zs-27-B With mounting screws lM3x5L:2Pcs.) Panel mounl adapter H i s h-p reci s io n D i s *"l?

Table of Contents - Tubing

Tube Reel Tube Stand: TB-2 TB-3VS Vertical Stand Applicable tube size mm Model 4, 6 8 10 12 TBR-1 TBR-2 TBR-3 TBR-4 TB-3VS Vertical Stand Dimension: 37 1/4" W x 27 9/16" D x 68 11/16" H Designed for high capacity and reel size flexibility. This stand comes with two cross bars.

0.4

(general purpose type) Dust-protected SI unit (L4) (L3) L2 (5.25) (12) 13 27 28 L1 Indicator light 63.5 10.5 (n-1) x 10.5 23.5 1.5 Manual override B A B A B A B A A A A FG + + 0V 24V SMC S E R I A L U N I T MODEL SC (SI No.EX120-STA1) 2 93.5 66 64 ERR T/R RUN (35) (5.5) 0 1 DIP SW. 4 x M4 mounting hole 61.5 4.5 Drawing shows a SC case.

Stainless Steel 316 Fittings

25 22 27 52.3 45.9 Union Elbow: KFG2L Applicable tube size (mm) O.D.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8L (2 pcs.) ZS-27-D Note) These options are not attached in the factory, but packed together with it for shipment. Front protective cover 1 pc.

VM

steel roller Hexagon nut thick 6, across flats 27 EXH port (3 port only) Panel mounting hole 3 port SA VA 0.5 MPa supply 3.5 mm P.T. 56 N F.O.F.

/

Width across flats 27 A A T T IN OUT IN OUT B B K L K L M 40 M 40 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P 1 (IN), 2 (OUT) port DIN terminal: D Conduit terminal: T 19.5 53.5 65.5 19.5 34 (69.5) (100.5) 30 32 T Width across flats 27 Width across flats 27 31.5 (44) 25 Applications A A T G1/2 OUT IN OUT IN B B G1/2 K L K L M 40 40 M Cable 6 to 12 2 x P 1 (IN), 2 (OUT) port (50) (50) 2 x P

Air Cylinder

16 15 23.5 35.5 47.5 53.5 77.5 95.5 107.5 9 D-A7l/A80 10 10 10 17.5 29.5 41.5 3 16 9.5 9.5 18 30 42 48 72 90 102 3.5 D-A79W 10 7.5 15 27 39 0.5 16 7 15.5 27.5 39.5 45.5 69.5 87.5 99.5 1 : In the actual setting, adjust them after confirming the auto switch performance.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

12.5 27 14.5 27 10.5 22 12(10.5) 22 13.5 22 6 29.5 16 29.5 18 29.5 14 24.5 15.5(14) 24.5 17 24.5 9.5 42 22.5 42 24.5 42 20.5 37 22(20.5) 37 23.5 37 16 The values inside ( ) are for D-Z73.

VDW

27 Rectifier element AC type Rectifier element AC type 20 2 x 3.5 14 2 x 3.2 27 20 20.5 17 56 48 5 11 1 1 6 8 5 M5 1 (IN) port 2 (OUT) port M5, 1/8 1 (IN) port M5, 1/8 M5 2 (OUT) port 15 2 x M3 x 5 2 x M2.5 x 3.5 VDW31-l G W 36 (27.6) Lead wire l Approx. 300 30 40 SMC SMC 1 1 Rectifier element AC type 4 x 5 25 34 28 Bracket assembly part no.

AC Servo Motor Driver (SSCNET /H Type)

Set "acceleration time 0 to 3" to use for the acceleration time during positioning. 0: Use the value set in "Pr.9 Acceleration time 0" 1: Use the value set in "Pr.25 Acceleration time 1" 2: Use the value set in "Pr.26 Acceleration time 2" 3: Use the value set in "Pr.27 Acceleration time 3" Da.4 Deceleration time No.

OMR0031

I/O Status Green/Red: ON, Black: OFF Refer to 7.4 Parallel I/O Signals (P.27) for details of the I/O signals. Each output signal can be turned ON and OFF manually regardless of their current status, to check the connection.