VQ4000

) (12.5) 11(B port) (12.5) Indicator light Indicator light 167 181 59 73 50 90 108 2 4 24.6 38 48 11 (A port) 11 (B port) B A (12.5) (12.5) 14 12 1 5 3 4 2 Manual override 30 45 24.6 A B 25.6 Mounting hole 38 48 B A 14 5 3 1 12 30 45 25.6 Mounting hole Manual override 14.5 27 30.5 32 41.5 91.5 129 G1/2 Electrical entry 79 PE X 41.5 32 30.5 X PE 27 R1 R2 P 15.5 14.5 R1 R2 P 15.5 Rc1/8 External

1.63

D-M9W 10 2 pcs. D-M9WV D-M9AV 5 Note 2) 1 pc. 10 2 pcs. 5 Note 2) 1 pc. D-M9A 10 Note 2) 2 pcs. 5 1 pc. D-M9V 5 2 pcs. 5 1 pc. D-A9V 10 2 pcs. 5 1 pc. D-A9 10 2 pcs. 1 pc. 15 D-P3DWA 2 pcs. 15 Note 1) Confirm that it is possible to secure the minimum bending radius of 10 mm of the auto switch lead wire before use.

Metal Seal/Rubber Seal Series VQ Body Ported

VVQ1000-57A-3 DIN rail mounting bracket [-D] VQ 3 Block valve 1 2 0 1 C6 (EXH) port One-touch fitting for 6 Refer to page 2-4-27 for cylinder port fitting.

Air Cylinder

(3.25") 3/8-24 1/2 M24 x 1.5 2.40 1/2-13 5/8 3.9 0 1 1/2 7/8 1 1/2 1 5/8 1 3/8 2 7/16 2.72 27/64 3 3/4 1/2 8.02 3/4-16 2.34 1.10 3.32 1.57 1 1/8 2 5/8 4 1/4 400 (4") 3/8-24 1/2 M24 x 1.5 2.40 1/2-13 5/8 4.7 0 2 1/16 7/8 1 1/2 1 5/8 1 3/8 2 7/16 2.72 27/64 4 1/2 1/2 38 Medium Duty Air Cylinder Series NCA1 Dual Operation Double Rod (XC10) Specifications Bore size (inch) 1.5 2 2.5 3.25 4 Media

5 Port Solenoid Valve

30 2 x 5.6 Mounting hole Manual override 129 91.5 41.3 32 30.6 27 14.5 G1/2 78.8 41.3 32 30.6 27 14.5 Electrical entry PE X X PE R1 R2 15.5 P R1 R2 15.5 P 19.5 (21) 19.5 (21) 31 31 1/8" External pilot port 1/8" PE. port 1/8" PE. port 1/4",3/8" 1(P),4(A),2(B),5(R1),3(R2) port 31 31 19.5 (21) 19.5 (21) G1/2 Electrical entry 1/4", 3/8" 1(P), 4(A), 2(B), 5(R1), 3(R2) port : Values for 3-position

NCA1

/4-16 1 1/8 3.90 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 27/64 2.76 1 3/8 2.34 4.64 2.72 9.38 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 27/64 3.32 1 3/8 2.34 4.64 2.72 9.38 Bore size (in) b c d SN NT ND TN XT 150 (1.5") 1 1/2 1.25 1.80 2 1/4 1/4-20 9/32 5/8 1 15/16 200 (2") 1 21/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 1 15/16 250 (2.5") 1 21/32 1.64 2.19 2 3/8 3/8-16 19/

NCA1

3/8 1.69 M16x1.5 325 (3.25") 1 3/4-16 1 1/8 3.9 1 1/2 1/2 7/8 3/8-24 3 3/4 0 1/2 1.57 1.10 5/8 27/64 2.76 1 3/8 2.34 4 1/4 2.72 8.02 1 1/2 2 7/16 2 5/8 2.40 M24x1.5 400 (4") 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 1.10 5/8 27/64 3.32 1 3/8 2.34 4 1/4 2.72 8.02 2 1/16 2 7/16 2 5/8 2.40 M24x1.5 Bore size (in) NT ND 150 (1.5") 1/4-20 9/32 200 (2") 5/16-18 7/16 250 (2.5") 3/

REA/REB

axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates Magnetic disks Ceramic products

REA/REB

precision guide type (Single axis) REBH 10-2-73 10-2-13 Direct mount type REAR Data Slider type (Slide bearing) REAS 10-2-14 10-2-73 High precision guide type (Double axis) REBHT Slider type (Ball bushing bearing) REAL 10-2-36 High precision guide type (Single axis) REAH 10-2-48 REAHT 10-2-48 High precision guide type (Double axis) 10-2-1 2 Semiconductor wafers Liquid crystal substrates

V

22 or less SY5000 2 Position Double 32 or less 38 or less 3 Position 31 or less 38 or less 2 Position Single 27 or less 30 or less SY7000 2 Position Double 50 or less 56 or less 3 Position H O W T O O R D E R S E E N E X T P A G E Courtesy of Steven Engineering, Inc. !

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

cable (5 m) Without cable Note 2) Note 2) Note 2) Note 2) 2 to 16 stations With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) With cable (1.5 m) With cable (3 m) With cable (5 m) F kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins

SYJ3000/5000/7000

3.2 (For mounting) 2-3.2 2-3.2 2-3.2 (For mounting) (For mounting) 25 28 28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to page 1-5-79 for dimentions with connector cable. 1-5-57 58 Series SYJ7000 2 Position Single [ ]: AC G H 01 02 Grommet (G), (H): SYJ714022 27 12 34 8.5 2-4.3 (For mounting) Manual override B A A B With interface regulator R1 R2 P Courtesy of Steven Engineering, Inc.

HRX-OM-R026

. 2-2 Names of each part Table 2-1 Accessory list 2pcs. 1 Alarm cord list label (English 1pc.

SYJ300/500/700

(A) 2 (A) 2 (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) i i V100 3 (R) 1 (P) 3 (R) 1 (P) SY u u SYJ VK Component Parts Replacement Parts VZ No. Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. q w e r t y Description Note Part no.

HRX-OM-W032

HRS Series 3.4 Piping 3-27 HRX-OM-W032 Chapter 3 Transport and Setting Up Recommended piping circuit 1 Thermo-chiller automatic fluid Fluid supply fill port 2 2 6 Circulating fluid outlet Users 1 2 equipment 2 Circulating fluid return port 4 3 Overflow port To wastewater collection pit Tank drain port 5 Fig. 3-16 Recommended piping circuit No.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

Applicable piping size Applicable tubing size (mm) 2 2 2 2 2 3 3 3 3 3 3 3 3 4 4 4 4 5 5 5 6 6 6 Size No.

15

x 0.5 8 45 30 3.5 27 4 NX M4 x 0.7 8 46 30 3.5 27 2 NM1/NM2 3.4 31 22* 2.5* 27 6 21 4 * Dimensions after mounting a ring spacer (Refer to page 818.) 813 LEFB Series Motorless Type Refer to the Motor Mounting on page 818 for details about motor mounting and included parts.

ISO Standard Hydraulic Cylinder

(n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) CH2 2 (Different surfaces and same surface), 1 20 110 150 140 135 130 125 D-F5/J59 D-F5W/J59W D-F5BA/F59F (n 4) 2 (n 2) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 CHA 20 + 55 110 + 55 125 + 55 130 + 55 135 + 55 140 + 55 150 +

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .