Model: SV4000, Valve Manifold Stations: 18

Model: SV4000, Valve Manifold Stations: 20

Model: SV4000, Valve Manifold Stations: 4

Model: SV4000, Valve Manifold Stations: 16

Model: SV4000, Valve Manifold Stations: 8

Model: SV4000, Valve Manifold Stations: 14

Model: SV4000, Valve Manifold Stations: 3

Model: SV4000, Valve Manifold Stations: 11

Model: SV4000, Valve Manifold Stations: 7

HRX-OM-W060

Setting of contact input signal form.5-55 Setting of contact output signal 1 to 3 .5-57 Setting of contact output signal 4 to 6 .5-57 5.4.11 Temperature waveform screen.5-62 Chapter 6 Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Operation of this product when an alarm occurs . 6-1 6.3 Troubleshooting . 6-2 6.3.1 Alarm contents, causes, and troubleshooting

VQ7-6/7-8

station 2 VQ7-6-FHG-D 4 2 Use of Control Unit VQ7-6-FG-D 4 2 1.

VQ7-6/7-8

ISO Standard Solenoid Valve: Size 1, 2 Metal Seal/Rubber Seal Series VQ7-6/7-8 (Size 1) (Size 2) VK VZ VF VFR VP4 Conforms to ISO standard 5599/I Interface conforms to ISO standard Size 1 (VQ7-6) and Size 2 (VQ7-8).

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Ejector Valve Unit, Series ZYY/ZYX

A A A B A B P1 B B Section A-A (ejector) Section B-B (solenoid valve) Replacement parts list Parts list No. 1 2 3 4 5 6 7 8 Description Material No. Description Part No.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

HRX-OM-X010

) 1-55 1-55 HRX-OM-X010 Chapter 1 Safety 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-56 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-57 1-57 HRX-OM-X010 Chapter 1 Safety 1.8.5 Ethylene glycol aqueous solution 60% 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-58 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-59 1-59

SZ3000

M5 x 0.8 Mixed C4 C6 M5 M 1 2 3 4 5 5 6 24VDC 12VDC Match to the voltage specifications of the manifold.

HRX-OM-M090

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-M090 Contents 6.3 Option T [High-pressure pump mounted] . 6-2 6.3.1 Option T [High-pressure pump mounted] . 6-2 6.4 Optional Accessories [Drain pan

24

6 r !0 !2 !6 w u !4 t !0 @4 @1 u q !6 y @3 r !0 w !2 !4 o t !0 @4 @1 i e @2 o e @2 !3 i !3 @0 !5 !9 !9 !5 63 or more MGJ 12 to 25 50 stroke or less JMGP MGP MGP MGPW 12 to 25 Over 50 stroke MGQ 50 or more MGG MGC MGF Component Parts Component Parts MGZ No.

13

43 55 95 ZH ZH07B ZH10B ZH13B ZH05D ZH07D ZH10D ZH13D ZH15D ZH18D ZH20D 1 8 1 8 Box type (Built-in silencer) 0.7 1.0 1.3 0.5 0.7 88 48 1 4 1 8 ZU 1 8 1 8 1 8 6/Rc 6/Rc 6/Rc Body ported type (Without silencer) 48 1.0 1.3 1.5 1.8 2.0 88 ZL 1 8 1 8 1 8 1 8 6/Rc 8/Rc 10/Rc 12/Rc 12/Rc 6/Rc 10/Rc 8/Rc 10/Rc 1 4 1 4 ZY 1 4 3 8 3 8 12/Rc 12/Rc Body ported type (Without silencer) 88 53 3 8 3 8 Supply