MU

depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14

MU

depth 12 M6 x 1 depth 11 M8 x 1.25 depth 13 M8 x 1.25 depth 11 M10 x 1.5 depth 15 M10 x 1.5 depth 14.5 M12 x 1.75 depth 18 M12 x 1.75 depth 15 Rod End Female Thread (mm) (mm) P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 ZZ 127 138 150 180 187 S 55 58 60 74 75 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14

VM

0.03 10 10 15 10 5 0.05 0.03 JIS Symbol How to Order 01 VR320 0 01 Port size Precautions Rc 1 8 NPT N01 1 8 Be sure to read before handling.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

25.6 NPT 1/8 17 14.2 13.2 33.9 15.8 38.9 31 5/16" ASD330FM-N01-09S 44.8 28.2 18.5 15.2 1/4" ASD430FM-N02-07S 43.9 25.6 17 13.2 17.5 18 55 15 36.7 40.4 34.6 11 41.7 5/16" 29.6 ASD430FM-N02-09S 46.5 35.4 28.2 NPT 1/4 18.5 18.5 15.2 19.7 3/8" ASD430FM-N02-11S 49.3 32.6 21 62 18.5 Reference dimensions of 10-32UNF and NPT threads after installation. 15-9-71

Lightweight and Compact

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

53

(English 1 pc./Japanese 1 pc.), Operation Manual (for installation/operation) 2 pcs. (English 1 pc./Japanese 1 pc.), Y-strainer (40 meshes) 25A, Barrel nipple 25A, Anchor bolt fixing brackets 2 pcs.

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 units (EX600-WPN#) 15 Remotes DA refresh time(sec)*1 0.1 / 0.2 / 0.5 / 1 / 2 / 5 / 10 / 30 / 60 s 1 s *1 The analog input update time is set for every Wireless Remote unit. Refer to "3.3 Remote setting".

CXT

10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder Series

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Plug-in Unit

The total number of solenoids (points) must not exceed 24. 19 20 19 20 17 18 17 18 15 16 15 16 13 14 13 14 11 12 11 12 9 10 9 10 7 8 7 8 5 6 5 6 3 4 3 4 1 2 1 2 (For 26P) (For 20P) 2-2-46 Base Mounted Series VQC Plug-in Unit VV5QC41 3(R) port 2-Rc 3/4 Flat ribbon cable connector assembly (26P) 1(P) port 2-Rc 1/2 AXT100-FC26-3: 5 m AXT100-FC26-2: 3 m AXT100-FC26-1: 1.5 m VQC SMC SMC SMC SMC

ZX

Refer to pages 13-15-3 to 13-15-4 for Safety Instructions and Common Precautions on the products mentioned this catalog, and refer to page 13-1-5.

Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

JXCx-OMT0001CN

1 -65No.JXC-OMT0001CN-C () (1)No.1(IN0 ON) (2)DRIVE ON No.1 (3)No.1 ON (OUT0 ON) (2)(6)(10)(14) DRIVE (4)INP OFF (1) IN0 (5)BUSY ON (9) IN1 PLC (6)DRIVE OFF (3) OUT0 (7)INP ON (11) OUT1 (8)BUSY OFF (15)(12)(7)(4) INP No.1 (16)(13)(8)(5) BUSY (9)No.2(IN0 OFF IN1 ON) (10)DRIVE ON 100mm(1 )50mm(2 )) (11)No.2 ON (OUT1 ON) (12)INP OFF (13)BUSY ON (14)DRIVE OFF (15)INP ON

OMR0031

Controller Specifications . 15 3.1 Basic specifications . 15 3.2 2 Parts description . 16 3.3 External dimensions . 17 (1) Direct mounting (LATCA-) . 17 (2) DIN rail mounting (LATCA-D). 17 3.4 Mounting . 18 (1) Mounting. 18 (2) Connection to ground . 18 (3) Mounting location. 19 4.

Rotary Table/

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

MXH Series Compact Slide

My(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb MXH20 MXH20 0.25 0.35 60 50 40 60 50 40 0.3 0.2 Displacement (mm) 25, 30 0.25 25, 30 15, 20 5, 10 0.15 0.2 15, 20 5, 10 0.15 0.1 0.1 0.05 0.05 0 0 0 1.10 1.65 2.20 2.75 0 0.63 1.26 1.88 2.51 3.14 Yaw moment My(Nm) Pitch moment Mp(Nm) 1 N m = 0.7375 ft lb 1 N m = 0.7375 ft lb Design Precautions Caution Bore size selections cannot be