VM

8 P . 5-6-12 P . 5-6-20 P . 5-6-41 P . 5-6-35 P . 5-6-48 P . 5-6-54 P . 5-6-32 P . 5-6-26 Effective area (mm2) Number of ports 1 2, 3 Poppet 2.5 2, 3 Poppet 19 2, 3 Poppet 7 3 Balanced poppet 10.8 5 Rubber spool 18 5 Metal spool 9.9 5 Metal spool 18 5 Rubber spool 6 3 Balanced poppet Function Dual pressure is available only on external pilot. 5-6-2 5-6-3 2 Series VM Transmitters Effective

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

HRX-OM-W032

Alarm Notification and Troubleshooting . 6-1 6.1 Alarm Notification . 6-1 6.2 Alarm Buzzer Stop . 6-3 6.3 Troubleshooting . 6-4 6.3.1 Alarm contents, causes, and troubleshooting. 6-4 6.3.2 How to release the thermal relay trip and circuit protector trip . 6-8 6.4 Other Errors . 6-10 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

1 !2 !3 !4 !5 !6 !7 No. q w e r t y u i o !

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Integrated Controller

6 H9 (+0.030 0 ) depth 6 n x 6.6 76 7 7 6 H9 (+0.030 0 ) depth 6 6 H9 (+0.030 0 ) depth 6 11 G 70 1 When mounting the actuator using the body mounting reference plane, set the height of the opposite surface or pin to be 3 mm or more.

Compact

1 t q r e A A B !6 @3 @6 @5 @4 @6 @2 @4 @5 @1 i y u C-C A-A !8 !3 B @7 !2 C w !7 C !5 !0 o Motor option: With lock !3 !1 !2 @0 !9 Component Parts Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

CRB2/CRBU2/CRB1

Shaft type W1 = J K T J K T J K T J K T Size L1 = L3 = 50 11.5 to 39.5 1 to 6 Y3 L22 L4 = 50 L12 11.5 to 39.5 1 to 6 X3 L2 = 63 12.5 to 45 Y = Y3 L22 1 to 7.5 63 L12 1 to 7.5 12.5 to 45 X3 80 13.5 to 53.5 Y3 L22 1 to 8.5 80 L12 1 to 8.5 X3 13.5 to 53.5 X = 100 18.5 to 65 Y4 L22 1 to 12.5 W2 100 L12 1 to 12.5 X4 18.5 to 65 (mm) Caution Size Size W1 W2 W1 W2 L1L3 L2L4 L1L3 L2L4 For the shaft

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Compact Manifold Regulator

OUT Fitting Type Metric size Inch size Symbol Position 1 2 Bottom Top Straight Elbow 4 6 4 6 Straight Elbow 5/32 1/4 5/32 1/4 Fitting type Symbol Fitting type Symbol 04 05 16 17 54 55 66 67 4. Accessory (Pressure Display) 5.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

L 16 44 8 L (7.5) 8 2514 131 (35) (25) 5.5 47.04 SMC 55 Approx. 10 Multi-core vinyl cable 0.3 mm 2 x 25C 2 x M2.6 x 0.45 Socket side Terminal no. Rail mounting hole pitch 12.5 0 1 2 3 4 5 6 7 8 9 No.

HRX-OM-W038

OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M [DI water (Pure water) piping] . 6-2 6.2.1 Option M [DI water (Pure water) piping] . 6-2 HRS Series HRX-OM-W038 Contents 6.3 Option T [High-pressure pump] . 6-2 6.3.1 Option T [High-pressure pump] . 6-2 6.4 Optional Accessories [Electric resistivity /conductivity

AC Servo Motor Driver (CC-Link Type)

RX RX RX RX RX RX RX RX (n+2)8 (n+2)9 (n+2)7 (n+2)6 (n+2)5 (n+2)4 (n+2)3 (n+2)2 Point table No. output 3 (PT2) RX(n+2)4 0 0 0 0 0 0 1 0 1 1 0 0 0 0 0 2 0 0 Point table No. output 4 (PT3) RX(n+2)5 1 1 0 0 0 0 0 3 0 0 1 4 0 0 0 0 0 0 Point table No. output 5 (PT4) RX(n+2)6 Point table No. output 6 (PT5) RX(n+2)7 1 1 1 1 1 254 1 1 0 1 255 1 1 1 1 1 1 1 Point table No. output 7 (PT6) RX(n+2)8

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Core wire color A-coded A-coded A-coded 7 1 8 3 2 8 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 2 3 1 7 7 1 8 3 2 8 2 3 1 7 White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 4 5 6 6 5 4 4 5 6 6 5 4 Socket pin arrangement Plug Socket pin arrangement Plug Connections Connections pin arrangement pin arrangement Item Specifications

SZ3000

1 i w w u 6 e 5(R) SOL.a SOL.b 3(R) 1(P) SZ3B60K/With back pressure check valve 4(A) 2(B) 5(R) SOL.a SOL.b 3(R) 1(P) o 5 (R) 1 (P) 3 (R) SZ3C60 [N.C. valve, N.O. valve 1 pc. each] SZ3C60 [N.C. valve, N.O. valve 1 pc. each] 4(A) 2(B) r u !0 !

HRX-OM-R005

Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2

HRX-OM-O021

Measures . 1-6 1.5.1 Safety Instructions for Use . 1-6 1.5.2 Personal Protective Equipment . 1-7 1.6 Emergency Measures. 1-8 1.7 Waste disposal . 1-9 1.7.1 Disposal of refrigerant and compressor oil. 1-9 1.7.2 Disposal of product . 1-9 1.8 Material Safety Data Sheet (MSDS) . 1-9 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2

VQ4000

(FD) D side Filter regulator SMC AP: Auto-drain (INA-13-854DG) Blanking plate (MP3-1) 212.5 (191: MP) MP: Manual drain (INA-13-854G) Plate assembly (VVQ4000 60A-1) 106 17 Drain port 6 AP: 10 MP: 6 Rc 1/2 (Supply port: Po) 4-Rc 1/2 17.5 42 70.5 119 " 185 5(R1), 3(R2) port P0 SMC R2 R1 5 1 P 3 30 PE 18 18 2-Rc 1/8 (Pilot EXH port) 70 (91) 29 38 163 L n Dimensions Formula L1 = 25n + 63, L2

Table of Contents

Hose nipple Data Without Auto Switch : Applicable to mounting positions 1, 2, 3 and 4. : Applicable to mounting positions 1, 2 and 3. : Applicable to mounting positions 1 and 3. Bore size (mm) 4, 6, 8, 10 Port size M3 x 0.5 6 8 or more Stroke (mm) AS121F-M3-23 AS121F-M3-04 AS131F-M3-23 AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

34 B 2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2-One-touch fitting 2-One-touch fitting 2n1-M5 x 0.8 (A, B ports) (A, B ports) Applicable tube O.D.: 4 6 (X, PE ports) Applicable tube O.D.: 6 (L4) L3 Applicable connector: D-SUB equivalent { } JIS-X-5101 MIL-C-24308 Connector case attachment lever (both sides) (3.2)