CL

15 15 20 21 23 23 25 45 50 60 70 80 153 168 182 208 226 8 0 0 0 0 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 1/4 3/8 3/8 1/2 1/2 8 11 11 13 16 With rod boot CLAL40SCLA40, #2 (#1+#2+#11) CLAL50SCLA50, #2 (#1+#2+#11) CLAL63SCLA63, #2 (#1+#2+#11) CLAL80SCLA80, #2 (#1+#2+#11) CLAL100SCLA100, #2 (#1+#2+#11) Without rod boot Bore (mm)

Air Cylinder Series CA2

1.5 23 37 21 116 4 40 204 1/2 Up to 750 40 37 116 41 92 30 20 52 14 21 72 16 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 367.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) Width across flats B1 H1 2 x NN MM MM NA 2 x Eh8 20, 25 D D Standard port Width across flats KA 45 45 1.5 A AL K Relief port (10-, 21-) H + Stroke A AL K 1.5 Vacuum port (11-, 22-) ZZ + 2 x Stroke S + Stroke F H F (mm) Female Rod End Female rod end 2 x M5 x 0.8 Relief port (10-) Vacuum port (11-) A1 20 20 20 21 H M4 x 0.7 M5 x 0.8 M6 x 1 M8 x

CA2

71 65.8 80.5 M12 x 1.75 11 22 17 M22 x 1.5 23 37 21 116 4 40 204 1/2 up to 750 16 40 37 116 41 92 30 20 52 14 21 72 72.8 87.5 M12 x 1.75 11 26 17 M26 x 1.5 23 40 21 126 4 40 215 1/2 For more information about the rod end nut and accessories, refer to page 6-8-13.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

1/2" 3/8" 1/4" 3/8" 1/4" 3/8" 3/4" 3/4" 3/4" 1/2" 3/8" 1/2" 1/2" 3/8" 1/4" 1/4" 1" 1" 1" 1" 3/4" 1/2" 3/4" 3/4" 1/2" 3/8" 1/4" 1/4" 16 9 17 10 33.5 29.5 9 16 16 9 19.5 16 19.5 19.5 16 34.5 30.5 29.5 33.5 37 32.5 44.5 37 44.5 45.5 38 10 17 17 10 22.5 17 22.5 22.5 17 30.5 34.5 38 33.5 47.5 38 47.5 48.5 39 16 11 11 16 16 11 21 16 21 21 16 20 14 14 20 20 14 25 20 25 25 20 1/8" 1/4" 1/4" 1/8"

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SS5YJ3-31 -S31 -32 -S32 Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Phillips head screw SY100-33 -2 (M1.7 X 7, matted nickel plated) Blank plate SYJ3000-21-1 A Mark A Mark Blank plate SYJ3000-21-1 Manifold gasket Manifold gasket VJ3000-14-3 VJ3000-14-2 Dust cap SYJ3000-42-1 Applicable manifold base SS5YJ3

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

21 21 21 2 x 3.2 (For mounting) 2 x 3.2 2 x 3.2 (For mounting) 2 x 3.2 (For mounting) (For mounting) 25 25 25 25 28 28 28 Pg7 28 Applicable cable O.D. 3.5 to 7 Refer to page 375 for dimensions with connector cable. 348 5 Port Solenoid Valve 10-SYJ7000 2 Position Single [ ]: AC G H 01 02 Grommet (G), (H): 10-SYJ714322 27 12 34 8.5 2 x 4.3 (For mounting) Manual override B A A B R1 R2 P 59.8

ZP

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

ZP

Pad type Type Thin flat (With groove) Symbol MT Dimensions: Pad Unit ZP2-B10MT ZP2-B15MT ZP2-B20MT ZP2-B25MT 8.5 8.5 15 13.5 6 10 6 10 6 4 6 4 2 2 2 2 2 2 2 2 5.5 5.5 5.5 5.5 1.5 1.5 1.5 (0.3) (0.3) 1.5 (0.3) (0.3) 15 10 20 25 21 16 26 11 ZP2-B30MT 18 10 6 Adapter Mounting Dimensions 2 2 5.5 If an adapter will be made by the customer, design the adapter with the dimensions shown below. 1.5

Table of Contents

Filter unit ZX1-K1-F Without switch and filter ZX1-K1 69.4 66.2 50.4 7 11 1 20 20 41 1 51 8 Bracket B (Standard accessory) 2-3.6 (Mounting hole) 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 19 10 1 Filter M5 (or M6) (V port) Vacuum pad connection port 70 50 38 8 17 38 35.4 (Mounting hole) 2-3 (Mounting hole) 3 1 5.4 13-2-21 21 Series ZX Ejector exhaust Vacuum pad connection V port Air

AC Servo Motor Driver (Pulse input type/Positioning type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

4/5 Port Air Operated Valve Series SYJA3000

2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-

KR

22.5 8 18.5 18.0 17 26.1 26.1 17 30 10 21 Connection thread (With seal) 41.5 29.5 1 2 KRH10-04S 19 53 42 34 22 1 4 3 8 KRH12-02S KRH12-03S 28.5 23.5 19 22 46.1 58.3 12 1 2 KRH12-04S 22 51 22 Straight Union: KRH M Effective area (mm 2) Weight (g) Applicable tubing O.D.

AC Servo Motor Driver (Network card type ）

2 to 10 AWG20 2 21/0.18 34.6 or less 1.35 4.7 0.1 HRZFEV-A(CL3) AWG20 2 cores LE-CSB-SB 2 to 10 Lock cable LE-CSB-RA 2 to 10 Note 5) or less 1.37 4.5 0.3 (Note 4) RMFES-A(CL3X) AWG20 2 cores LE-CSB-RB 2 to 10 AWG20 2 110/0.08 39.0 Note 1. d is as shown below. d Conductor Insulation sheath 2.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note) 36 2 x 4-M22 x 2.5 thread depth 38 2-M24 x 3 effective thread depth 33 Note) In the case of 20 stroke or less, it would come with 2 x 4-M22 x 2.5 through thread. 162 102 + Stroke 17 + Stroke 17 136 + 2 (Stroke) 204 Width across flats 55 Width across flats 55 M36 x 1.5 M36 x 1.5 21 21 47 47 50 50 64 + Stroke 64 230 + 2 (Stroke) 200 2-Rc 1/2 (Port size) 30 30 2 x 2-31.5 counterbore depth

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

Air Cylinder

10 15 50 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 50 + 45 (n 2) (n = 2, 3, 4, 5) D-H7l D-H7lW D-H7BA D-H7NF 10 15 60 15 + 45 (n 2) 2 (n = 2, 4, 6)Note 3) 60 + 45 (n 2) (n = 2, 3, 4, 5) CG3 JMB MB D-H7C D-C73C D-C80C 10 15 65 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 65 + 50 (n 2) (n = 2, 3, 4, 5) D-G5NT D-B5l/B64 10 15 75 15 + 50 (n 2) 2 (n = 2, 4, 6)Note 3) 75 + 55 (n 2) (n = 2, 3, 4, 5)

SMC Pneumatic Clean Series

Clean series 10 11 Relief type Vacuum suction type 10 C D M 2 R A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.

LEC-OM071xx

.3 0 /S-RDY 1 2 3 Torque Limit Detection Pn50F.0 0 /CLT 1 2 3 Speed Limit Detection Pn50F.1 0 /VLT 1 2 3 Brake Pn50F.2 1 0 /BK 2 3 Warning Pn50F.3 1 0 /WARN 2 3 Near Pn510.0 0 /NEAR 1 2 3 Pn512.0=1 Polarity inversion of CN1-1(2) 0 Pn512.1=1 Polarity inversion of CN1-23(24) (Not invert at factory setting) Pn512.2=1 Polarity inversion of CN1-25(26) 3-21 3 Wiring and Connection 3.4 Examples

SQ1000/2000

D side Stations 1 2 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Description/Type 4 2 Single 1 5 3 Metal 4 2 Rubber 4 2 Double (latching) 1 5 3 1 5 3 Metal 4 2 Rubber 4 2 Double (double solenoid) 1 5 3 1 5 3 4 2 Closed center 1 5 3 4 2 Valves Options Cylinder port sizes Note 4) Exhaust center 1 5 3 4 2 Pressure center 1 5 3 4 2 Dual 3 port valve (A) 1 5 3 N.C N.C 4 2 Dual 3