Regulator Recommended tightening torque for the port Unit: N m Thread size 1/8 1/4 3/8 1/2 3/4 1 Torque 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Recommended tightening torque for the pressure gauge port Unit: N m Thread size 1/8 Torque 3 to 5 *Please refer to "10-7.
9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.
) 0.63 1 5 0 1 m 2.36 1.C16 1 . 1 0 M 1 8 x l 5 0 5 9 r r 6 ; o o ; ) (60) (38) l:27j (i2 + 0 070) (28) ( 1 5 ) 127) 0.71 +0003 M22xr.50.75 2.17 1 . 1 0 1.42 2 A O 1 itti (16 fO 070) (28l; l (55) (19) (28) l:371 (36) {71) (20+0.064) 0.
CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly
Terminal resistance 1 1 1 9 5 9 5 9 5 SDSD+ SDSG SD+ SD+ SD+ SG SDSG SDSG Terminal resistance120 Master This product This product This product (first slave) second slave 31st slaves Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-485 [Tips] Both ends of the communication connection (the end nodes) need to be connected to the host computer.
(mm) NA Model P M3 x 0.5 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc1/8 PA 22.5 25 41.5 50 69.5 PB 24 27 44 55 75.5 PC 8 10 12 14 14.5 PD 4.5 6 7 8.5 11 PE 2.2 2.8 2.7 2.7 RA M4 x 0.7 M5 x 0.8 M8 x 1 M8 x 1 RB 7 8 12 12 17 RC 2 2.5 4 4 6 RD 5.7 6 9 9 12.4 LC MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 7.5 11
idling 0: hold 1: depend on Idle value 0 (Ch0 output) Idle value 0: clear, 1: ON 9 : : : 7 (Ch7 output) Idle value 0: clear, 1: ON -102No.EX-OMZ0024 Configuration format (EX600-AXA) EX600-AXA (14 byte) Byte Bit Parameter Setting value 0..3 Unit No. 0..8 0 4..7 Parameter type 1 1 0..7 Unit ID 20 (Hex) Unit parameter 0 Monitor short circuit 0: disable, 1: enable 1..3 Reserved 4 (Ch0&1 in)
Other Nil 1 2 3 4 9 ... ... 10 10 stations Note) When equipped with control unit, 1 or 2 stations are used for mounting.
Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8
POWER ON 1 2 3 Figure 5-11 Control Setting screen 1 Table 5-9 Control Setting screen 1 No.
Double wiring specification Double wiring specification Connector entry direction 04 05 09 10 4 stations 9 stations 1: Vertical connector 2: Horizontal connector 5 stations 10 stations Specified wiring (up to 19 solenoids possible) Specified wiring (up to 9 solenoids possible) ... ... ... ... 09 19 9 stations 19 stations Note 1) Double wiring specifications: Single, double and 3 position
0.5 9 0.6 VX3224-03 2.2 0.19 3.4 1 1 VX3324-03 2.2 0.19 3.4 3/8 (10A) 0.3 VX3234-03 3 0.33 6 0.6 VX3334-03 3 0.33 6 0.15 VX3244-03 4 0.5 9 0.3 VX3344-03 4 0.5 9 Courtesy of Steven Engineering, Inc. !
Normal Close High Vacuum Solenoid Valve *1 RoHS Minimum operating pressure *1 Excluding grommet/AC *1 OUT side 1x10 6 Pa(abs) *1 Leakage Internal External 1.3x10 9 Pam3/s 1.3x10 11 Pam3/s Power consumption Fluid temperature 5 to 60C Size XSA [W] Previous model [W] 25% reduction Max. Max.
ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 12 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA
-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 (H) 28.5 57 34.5 69 103 16.5 137 N 28.5 57 34.5 69 108 22 151 M 42 84 48 96 165 25 202 42 84 48 96 175 32 236 J 21.8 K 37 L 5 M 7 N 15 Q 21 Y 55 Model LVQH20S-Zm-1 LVQH30S-Zm-1 LVQH40S-Zm-1 LVQH50S-Zm-1 LVQH60S-Zm-1 C B A D 32 50 6 7 20 25 80 1/46 1/46 37.5 55.5 6 7 20 25 80 50.2 78.2 10 7 20 38.5 110 60 88 10 7 20 38.5 110 Multi-turn type (with indicator
1 12.5 8.5 M8 x 1.25 1 12.5 22 R7 R28 22 1 20 22 8.5 R7 22 20 NAAMS code K NAAMS code K Part no.
1/4 1 1/4 to 1 1/2 1 3/4 to 2 2 to 2 1/4 MHS MHC MHT MHY Impact load Clearance MHW -X 3.
When the power supply to the solenoid coil(1) is stopped, the armature assembly(5) is separated from the armature(2) by the reaction force of the spring(6), closing the poppet. 7 Body SUS IN OUT 8 O-ring FKM Port 1 Port 2 9 Spacer Al 9 Poppet (9) Spacer: Increase the height of the body when tightening the body to the flat surface. << Optional specifications >> 11 XSA-OMS0001-A 3-2.
ISO size 1 Series VQ7-6 ISO size 1 Max. 10 stations 0.43n + 0.49 (n: Stations) 1/4 3/8 Bottom Note) When equipped with control unit, 1 or 2 stations are used for mounting. 3-10-11 Series VQ7-6 DIN Terminal Type VV71-100 80 100 2n-1/4, 3/8 80 23 37 9 14 9 15 U side U side Manual override R4.5 R4.5 Indicator light P = 43 53.5 P = 43 53.5 B B B B 9 9 B 23 20 SMC SMC SMC 9 A PA A B B A PA A B
pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 L/pulse 0.5 L/pulse 1 L/pulse 0.05 L/pulse Display units Instantaneous flow rate Accumulated flow L/min, gal(US)/min Note 1) L, gal(US) Accumulated flow range Note 1) 0 to 9 L, 0 to 9 gal(US) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC 10% (With power supply polarity protection) 55 mA or less