SFOD-OMT0005CN

Shield Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 (-) A-3 (8) (1) (2) (B1) A1 (14.2) 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5 (3) B1 A1 2 1 (B3) (A3) (5.7) (4) 15 16 L (11) (30.7) 15.4 ()[820m] (1) (2) LECPB A B-1 2 A A-1 1 (L) B (B-2) 6 B (A-2) 5 8 8m * COM-A/COM B-3 3 A 10m * COM-B/ A-3 4 (3) B 15m * Shield

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

Series KG Stainless Steel One-touch Fittings

(mm) Weight (g) A D M5 0.8 KGH04-M5 KGH04-01 14 13 9.5 8 17 22 4 4 2.4 9 16 5.6 1 4 KGH04-02 19.5 13.5 14 4 4 1 8 16 18 10 5.6 M5 0.8 KGH06-M5 KGH06-01 KGH06-02 14 3.4 16 14 15 18.5 17 11.5 18.5 22.5 23 4 10 12 14 1 8 1 4 6 13.1 13.1 17 3 8 KGH06-03 22 15.5 17 27 21 19 26 19 30 1 8 1 4 3 8 1 8 1 4 KGH08-01 KGH08-02 KGH08-03 KGH10-01 KGH10-02 24 20.5 15.5 26 27.5 28 26.5 22 30 33.5 14

100

1 !4 Component Parts No.

Environment

to 4 30% to 85% LEY16A 1 to 4 40% to 95% 5 to 20 35% to 85% 5 to 20 60% to 95% 21 to 50 60% to 85% 21 to 50 80% to 95% 800 LEC SS-T Lead 4: LEY32C 700 Lead 8: LEY32B LEY25 1 to 4 20% to 65% LEY25A 1 to 4 40% to 95% 5 to 20 35% to 65% 5 to 20 60% to 95% 21 to 35 50% to 65% 21 to 35 80% to 95% 600 LEC Y Lead 16: LEY32A Force [N] 500 400 Motorless LEY32 1 to 4 20% to 85% 5 to 20 35% to 85% 21

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

4/5 Port Air Operated Valve Series SYJA3000 1

(A) 4 (A) 4 (B) 2 (B) 2 (Example) SS5YJA7-41-03-01 1 pc. SYJA7140 1 pc. SYJA7240 1 pc. SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

PF2D

Brown 4 3 2 1 4 3 2 1 Sensor Sensor PF2D PF2D Load U CH_1OUT2 CH_1OUT2 White White IF Load Load 4 3 2 1 4 3 2 1 Sensor Sensor Sensor Sensor Sensor Sensor CH2_OUT1 CH2_OUT1 Gray Gray Main circuit Main circuit 24 VDC + 24 VDC + Load Load 4 3 2 1 4 3 2 1 CH3_OUT1 CH3_OUT1 Red Red Load Load CH4_OUT1 CH4_OUT1 Green Green 4 3 2 1 4 3 2 1 Load U DC() DC() Blue Blue 389 PF2D Series Functions/PF2D

Environment

@6 @7 Cable is shipped together. @1 @0 @3 @4 @5 !

VCA

OUT (2) Rc G NPT NPTF Nil F N T 1 IN (1) Port size Fluid Symbol 02 03 04 06 Class 3 Class 2 Port size 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 General air Dry air Nil A Voltage 1 2 3 4 5 6 100VAC 200VAC 110VAC 220VAC 24VDC 12VDC Orifice size Orifice size (mm) 3 4 5 7 10 Symbol 3 4 5 7 10 Class 3 Class 2 Class 4 Consult SMC regarding other voltages.

Process Pump

1/4 3/8 1/2 150 330 800 800 1/4 3/8 1/8 1/4 Port size Rc 3/4 Ambient and fluid temperature 5 to 60C (No freezing) Pressure gauge port size Rc 1/8 1/8 1/4 1/4 AW: 5 m, AFM: 0.3 m (Filtration efficiency 99.9%) Nominal filtration rating Downstream oil mist concentration Bowl material Max. 1.0 mg/Nm3 (Approx. 0.8 ppm) Note 2) Note 1) Conditions: Upstream pressure 0.7 MPa, set pressure 0.5 MPa

Process Pump Series PA3000/5000/PAX1000 Series PB1000

Type (mm) 1in = 25.4mm PA3000 115 68 85 105 4-7 7.5 FLUID OUT 3/8 5.5 AIR SUP (P1) 1/4 FLUID OUT PROCESS PUMP P1 2 90 74.5 FLUID I N P2 44.5 3 AIR SUP (P2) 32 1/4 100 130 FLUID IN 3/8 PA5000 179 4-9 90 90 FLUID OUT 1/2, 3/4 AIR SUP (P1) 1/4 112 56 165 56 RESET PROCESS PUMP FLUID OUT 167 P1 132.5 FLUID I N 125.5 103.5 P2 58.5 48.5 202 114 3.5 3 AIR SUP (P2) FLUID IN 1/2, 3/4 1/4 10 Series

SYJA3000

R1 R2 P 11.5 12 18 22 22 27.2 (R1, R2 port) 2-Rc(PT)1/4 63 5-Rc(PT)1/8 (Piping port) 3.1-21

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

AC Servo Motor Driver (SSCNET Type)

(AL) Pr.4 Unit magnification (AM) 1:1 times 10:10 times 100:100 times 1 1 151 301 451 1000:1000 times (Note 1) LECSS sets [262144] Pr.1 Unit setting Set the unit used for defining positioning operations.

Fluoropolymer Tubing Variations

8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

ML2B

4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

ML2B

4 !5 !7 !8 !9 @0 @8 #4 $2 $3 $9 %2 ^0 ^7 Qty. 1 1 1 1 2 2 2 2 2 4 2 1 1 2 2 4 2 2 6 4 8 2 6 2 1 2 4 4 3 4 4 1 1 4 1 4 2 1 1 1 2 2 1 1 1 2 1 1 1 8 4 2 1 6 No. q w e r t y u i o !0 !1 !2 !3 !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

78 55 55 3/4, 1, 1 1/4 (IN, OUT port) 1 1/4 (EXH port) 22.6 (Guide) 36 82.6 36 In the case of B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 14 17 12 34.9 36.9 31.9 16 9 21.8 35.8 37.5 36 12 10 14 1 4 3 8 1 4 8 L08-02 L08-03 L10-02 52 61 68 14 17 14 16 19 23.3 35.9 37.9 36.9 38 39.7 40.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10