70 80 88 96 116 116 16 20 24 30 39 48 98.5 123 155 187 213 220 53 65 56 67.5 78 78 18 24 24 38 42 49 1.09 2.03 4.1 6.4 10 10.5 28 35 38 45 55 55 1.5 1.5 1.5 1.5 1.5 1.5 50 59.5 66 79 96 96 42 48 54 60 74 74 36 44 48 48 86 107 102 125 144 151 25 32 70 80 90 90 47 58 69 79 89 89 2 2 4 4 4 4 14 16 18 18 22 22 16 20 20 22 24 28 32 41 41 46 55 70 1.25 2 2 2.5 3 3 9000 14000 22000 36000 55000
7 7 9 10 11 20.5 22 28 33 43.5 51.5 11 12 13 16 20 24 9 12 17 20 22 29 15 16.5 16.5 19 21.5 23 10 10 11.5 12.5 13 12.5 18 21 26 29 33 42 10 11 14 16 20 24 17 18 25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 Without auto switch With auto switch Bore size (mm) 6 10 16 20 25 32 NN P Q QA R Y T S 33 36 30 36 40 42 Z 51 57 56 65 73 84 S 33 36 40 46 50 52 Z 51
17 4.6 6 12 KQR06-12 12.8 42 20 17 13.1/13.1 5/16 9.5(3/8) KQR09-11 16 45.5 25 18.5 6 8 10 KQR08-10 15.2 41 20 18.5 26.1/18 5/16 12.7(1/2) KQR09-13 16 42.5 21 18.5 6 8 12 KQR08-12 15.2 42 20 18.5 26.1/18 3/8 12.7(1/2) KQR11-13 48 44.5 22.5 21 7 10 12 KQR10-12 17 42 20 21 41.5/32.8 10 16 KQR10-16 21 50.5 26.5 21 41.5/(29.5) 12 16 KQR12-16 21 50.5 26.5 22 58.3/(46.1) Note: ( ) Dimensions are
VQC 20 16 8 20 20 08 Note) Two manifold stations are required for double solenoid 3 position valves (dual body type).
Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time
m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100
Form w 1 Material e Vacuum inlet r Connection B M5 x 0.8 thread 10 13 38 22 2.5 M5 x 0.8 5 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 10 13 B5 C2 Construction p. 117 38 22 2.5 N S U F GN GS Adapter Assembly p. 123 N4 N6 U4 U6 16 38.5 22.5 20 25 42 24 3.5 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 20 25 B8 ZP Y U B6 M6 x 1 6 42 24 3.5 M8 x 1.25 8 32 42.5 24.5 40 46.5 28.5 6 50 47.5 29.5 Dimensions
AFF37B-14 AM650-14 37 176.5 300 AMH650-14 AMD650-14 AME650-14 AMF650-14 A B AT55C-20 IDFB55E HAW75-20 AFF75 -20 AM850-20 55 264.7 450 AMH850-20 AMD850-20 AME850-20 AMF850-20 A B AT75C-20 IDFB75E AFF75 -20 AM850-20 HAW110-30 75 353.0 600 AMH850-20 AMD850-20 AME850-20 AMF850-20 For screw compressors (when an aftercooler is installed) Air compressor Local line Sub line Main line Note 2) Air
(SNJ-016B for 10, SNKJ-016B for 16) (mm) Bore NN NB NA MM KA H GB GA FZ FY FX FT FC FB F CB CA BB BA Z A S 10 9.5 12.5 M4 X 0.7 4.2 28 5 8 42 20 33 2.3 M10 X 1.0 5.5 17.5 8 14 17 12 15 74 15 46 16 9.5 12.5 M5 X 0.8 5.2 28 5 8 42 20 33 2.3 M12 X 1.0 5.5 19 8 20 20 18 18 75 15 47 Double Clevis (D) CJ2KD Bore size Stroke Material: Iron Part No.
12 16 5, 10, 15, 20 25, 30 2.2-10 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 2.2-16 Solid state switch D-F9N, F9NV D-F9P, F9PV D-F9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Series CQSK 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 2.2-24 Series CQSlS 12 16 5, 10, 15, 20 25, 30 20 25 5, 10, 15, 20 25, 30, 35, 40 45,
CRBUWU10-lD CRBUWU15/20/30-lD The dimensions below are based on size 20.
Thread size Tightening torque (Nm) M10 20 to 25 M12 35 to 42 8. Check the auto switch operation when the product is used where welding is performed. 9.
to 800 30 27 71 60 22 44 16 32 60 9.0 12 80 42 100 15 8 M8 x 1.25 MB1 50 Up to 1000 20 to 1000 35 32 81 70 27 52 20 40 70 9.0 12 90 50 110 17 11 M8 x 1.25 63 M10 x 1.25 Up to 1000 20 to 1000 35 32 101 85 27 64 20 40 86 11.5 15 105 59 130 17 11 CA2 80 M12 x 1.75 Up to 1000 20 to 1000 40 37 119 102 32 78 25 52 102 13.5 18 130 76 160 21 13 100 M12 x 1.75 Up to 1000 20 to 1000 40 37 133 116
to 500 30 27 22 44 16 32 10 12 42 100 15 8 M8 x 1.25 71 60 80 60 9.0 50 up to 600 20 to 600 35 32 27 52 20 40 10 12 50 110 17 11 M8 x 1.25 81 70 90 70 9.0 63 up to 600 20 to 600 35 32 27 64 20 40 10 15 59 130 17 11 M10 x 1.25 101 86 105 85 11.5 80 up to 750 20 to 750 40 37 32 78 25 52 14 18 76 160 21 13 M12 x 1.75 119 102 130 102 13.5 100 up to 750 20 to 750 40 37 41 92 30 52 14 18 92 180
0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] LZ 1500 1500 1500 LC3F2 Mey 1000 1000 1000 L5 [mm] L5 [mm] L5 [mm] m Wall Y L5 500 500 500 0 0 0 0 5 10 15 20 Work load [kg] 0 10 20 30 40 Work load [kg] 0 10 20 30 40 50 60 Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10
( ( $% ( 6 ( $% &' ( 8 ( $% &' 12 &' ( $% 16 &' $% (( 20 &' ( $% ( 25 ( &' ( ( ' %!) " " ' 1 " # 2 Mass + ) , . /" * 42 . #) "33 -!* 3 3 # ) +2) 5 6 * 7)!* 73".. ( 42 ! 42 ! 42 !
Rod Trunnion (U) with Pivot Bracket TS Bracket mounting range B TH TT 4 x TF Z TW TY TX TV +0.10 0 TE Male Thread Female Thread (mm) (mm) Bore size B TE TF TH TS TT TV TW TX TY Z 20 38 10 5.5 25 28 3.2 35.8 42 16 28 46 25 45.5 10 5.5 30 33 3.2 39.8 42 20 28 51 32 54 10 6.6 35 40 4.5 49.4 48 22 28 51 40 63.5 10 6.6 40 49 4.5 58.4 56 30 30 62 50 79 20 9 50 60 6 72.4 64 36 36 71 63 96 20 11
Positioning driver Model Operating Conditions Plate non-rotating accuracy () Allowable plate rotation torque (T) Allowable lateral load (F) Non-rotating accuracy () Stroke 50 75 100 125 150 175 200 Load (N) Stroke 50 75 100 125 150 175 200 Torque (Nm) 42 2.87 0.09 42 2.47 40 2.17 + 42 2.38 32 2.16 24 1.98 17 1.82 F T F Refer to page 304 for deflection data. 218 2 Phase Stepper Motor/Without
4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 12 16 20 25 5, 10 Rear Flange L1 Without auto switch A 26 26 32 35.5 With auto switch A 31 31 42 45.5 Bore (mm) Stroke range (mm) FD FT FV FX FZ L Inch Metric 14 15.5 18.5 22.5 B 17 17 19.5 22.5 B 22 22 29.5 32.5 11.5 11.5 12.5 14.5 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64
SB) A (3 x 3.2) Section SD SD Auto switch mounting groove dimensions (2 locations) MHSJ3-16D MHSJ3-20D MHSJ3-25D 4 4 5 4 6 5 3 6.5 5 3 3 20 20 5 5 90 90 20 20 20 20 (mm) NB 5h9 6h9 6h9 K 4 5 6 J 10 12 14 HB 36 42 50 HA 44 50 59 FX 12 15 18 EO 9.5 10 12.5 EC 7.5 8 9.5 DO 19.5 22 26.5 A 39 42 47 CB 14 14 17.5 DC 17.5 20 23.5 B 30 36 42 CA 7 7 7.5 AE 27 28 32 Q 6 7 8 AA 46 49 55 AD 16 18 20