Table of Contents

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

LX

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

IZx-OMT0049

Symbol Material V Tungsten Energy saving highefficiency cartridge S Silicon IZT40 3 CP Power supply cable length Symbol Length (m) 3 5 3 5 10 15 10 15 Power supply cable (IZT41-L/42-L) IZT41 J CP Power supply cable layout direction / Length Symbol Layout direction Length (m) J 3 K 5 Straight M 10 S 3 T 5 Angle Z 10 Communication cable (IZT41-L/42-L) Bracket for bar IZT41 G CE Communication

LX

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy ( ) 50 to 100mm stroke Non-rotating accuracy ( ) 0.09 1 0.1 10 50 100 Eccentric

Air Slide Table

10 18 12 27 49 40 400 113 10 10 19 16 35 62 50 670 201 16 16 33 20 43 72 60 1,100 314 21 21 49 25 52 88 70 1,900 491 41 41 82 Double-ported type (MXQA) 6 20 34 32 230 29 10 10 18 8 23 42 40 330 51 10 10 19 12 30 52 50 580 113 16 16 33 16 37 70 60 920 201 21 21 49 20 46 80 70 1,600 314 41 41 82 Low thrust with high rigidity type (MXQB) For applications which require more guide rigidity than

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

D-A5/A6 Same side 10 110 110 115 125 135 145 1 pc. 10 Different sides 20 2 pcs. D-A59W Same side 20 115 115 125 130 140 150 1 pc. 15 Different sides 10 2 pcs. D-F5/J5 Same side 10 115 115 120 130 140 150 1 pc. 10 Different sides 10 2 pcs. D-F5W/J5W D-F5BAL Same side 10 120 120 120 135 140 150 1 pc. 10 Different sides 10 2 pcs.

2 Phase Stepper Motor/Without Motor Brake Series LXP

Allowable lateral load (F) Allowable plate rotation torque (T) Load (N) Torque (Nm) Stroke 50 75 100 125 150 175 200 Stroke 50 75 100 125 150 175 200 L L 42 2.87 m m 42 2.47 40 2.17 42 2.38 32 2.16 24 1.98 17 1.82 50 to 200mm stroke F T 10 Load weight m (kg) F 125 to 200mm stroke Plate non-rotating accuracy () 50 to 100mm stroke Non-rotating accuracy () 0.09 1 + 0.1 10 50 100 Eccentric distance

KQ2

2 2 38 42 47 51 55 16 17 2.5 4 6 8 9 8 KQ2N08-10 21 18.5 2 T 10 KQ2N10-12 22 21 18.2 12 KQ2N12-16 25 22 29 Tube Cap: KQ2C Applicable tubing O.D.

0.55

+ 380 1/2 VP744 VV3P7-42 Individual Note) Supply pressure to 1(P) ports and exhaust pressure from 3(R) ports on both sides for 10 stations or more.

ZP

Connection 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40, 50 2 x 4, 3.5 x 7, 4 x 10 10 to 16 (Thin section series) 2 to 8 10 to 16 20 to 32 40 to 50 4, 6 Nylon tube, 4, 6 Urethane tube Vacuum entry Thread dia.

AC Servo Motor Driver (Network card type ）

When the movement is returned at the stroke end 18 81 18EtherCAT COMMUNICATION (i) Method -10 and -42 (dog type front end reference home position return) The following figure shows the operation of Homing method -10. The operation direction of Homing method -42 is opposite to that of Homing method -10.

LVQ

84 48 96 75 153.2 25 150 50.2 78.2 10 7 20 73 38.5 45 128 2 1 42 84 48 96 75 163 32 167 60 88 10 7 20 73 38.5 45 137.5 551 Series LVQ-Z Dimensions With bypass Double acting valve LVQ2 1 2 N M C C A B D D (Max.

KJ

fitting size 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 18.5 KQ2R08-12 42 4.6 12 20 12 KQ2R10-12 18.5 44.5 41.5 32.8 33 23 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

ZP

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

Table of Contents

For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 93 4 6 6 6 6 For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 10, 13, 15 + with function plate M3 x 0.35 x 37 M3 x 0.35 x 41 M3 x 0.35 x 42 M3 x 0.35 x 46 !0 Precautions Components Ejector unit Be sure to read before handling.

Air Cylinder Series MB

24 7 7 8 8 10 10 14 154 158 182 182 228 228 267 10 10 14 14 22 22 25 160 164 190 190 238 238 279 42 42 53 53 73 73 90 9 9 10.5 10.5 12.5 12.5 13 MB-B03 MB-B05 MB-B08 MB-B12 Rotating Angle Trunnion pivot bracket Model without air cushion is designed to include rubber bumpers.

Air Fittings & Tubing

Effective area (mm2) Weight (g) L M A D Nylon Urethane 2 1.8 3.2 4 6 KQ2R23-04 KQ2R04-06 9.6 33.5 34.5 3.4 2.9 15.5 18.5 17.5 10.4 4 KQ2R04-08 36.5 5.6 4 2.0 8 18 16 KQ2R04-10 12.8 39.5 3.3 10 18.5 2.5 KQ2R06-04 4 12.8 37 4 4 21 6 KQ2R06-08 37 2.5 8 18.5 17 KQ2R06-10 12.8 39.5 13.1 10.4 3 10 18.5 KQ2R06-12 42 15.2 4.7 12 20 8 KQ2R08-10 15.2 41 26.1 18.0 4.0 10 20 18.5 KQ2R08-12 42 4.6 12

ISO Standard Hydraulic Cylinder

24 24 25 42 10 50 16 11 3/8 58 63 25 to 800 77 77 9 98 118 84 M8 x 1 9 M27 x 2 36 33 58 19 36 36 30 21 32 50 10 56 18 13 1/2 66 80 25 to 800 96 96 11 119 143 96 10.5 M33 x 2 41 32 M10 x 1.25 75 13 45 45 41 26 41 60 16 70 17 17 1/2 74 100 25 to 1000 115 115 13.5 138 162 113 14.5 M42 x 2 42 42 M14 x 1.5 90 16 56 56 50 22 52 72 16 90 22 19 3/4 86 Bore size (mm) RD S SS Y Z ZZ V 40 51 6.5 161.5

AC Servo Motor Driver

10 10 10 Note.